Inficon 550-520, Translation Of The Original Operating Instructions

Page: 68 / 146

6 | Operation INFICON
68 / 146 UL6000-Fab-Operating-instructions-iina75en1-04-(2109)
If you would like to compensate for this you can multiply the measured leak rate with
the suitable machine factor and then have the value shown. This factor is used only in
the vacuum mode and not in the sniffing mode.
When taking into consideration the Helium pumping speed of the device, the machine
factor can also be estimated. The measurement of the leak rate is more accurate
using an external calibration leak with the test object - once with the external pump
switched and once without. The difference between the results determines the
machine factor.
The machine factor can also be used to correct the leak rate display with respect to
the air equivalence. The machine factor for this correction is 0.37.
ü
Operator or Supervisor rights
ü
The operation mode "Vacuum" is set.
1 > Setup > Measurement > Calibration leak
ð
The field “Machine factor helium” is shown.
2 Adjust.
3 Save .
6.3.8 Set external calibration leak
To use an external calibration leak for calibration, enter the leak rate of the calibration
leak.
ü
Operator or Supervisor rights
1
> Setup > Measurement > Calibration leak
2
Adopt the printed value and the associated unit from the calibration leak or
certificate.
Do not change the combination of the printed value and associated unit, even if
your device is otherwise set to other units!
3
Save .
See also
2 External calibration [ } 75]
6.3.9 Change pressure limits
Pressure limits for the vacuum mode.
The pressure limits refer to the pressure sensor "p1", the inlet pressure of the turbo
molecular pump 1. See also "View vacuum diagram [
}
89]".