Inficon 550-300A, Operating Manual

Page: 79 / 128

Maintenance tasks
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7.6 TMH 071 Replace the Lubricant Reservoir
The turbomolecular pump TMH 071 is filled with operating fluid for the lubrication of
the ball bearings. The lubricant reservoir has to be replaced every two years, no
matter if the operating hours are reached. The lubricant reservoir must be replaced
at shorter intervals under extreme loads of the TMH 071 or in unclean processes.
Required Tools
Special tool - calliper face spanner
Required material
operating fluid reservoir P/N: 200 000 577
1 For flooding the TMH 071 disconnect the fore vacuum connection to the Modul1000
and switch the device on for about 10 to 25 s. After about 10 s, valve V2 opens and
the mass spectrometer and the turbo-molecular pump are flooded. Further wait for
at least 10 s until the high vacuum system is completely flooded.
2 Switch the mains switch Off again and disconnect the device from the power supply.
3 Turn the device and place it on its long side to access the inspection port on the
bottom.
Notice:
Make sure not to damage the fore-vacuum connections.
4 To be able to replace the lubricant reservoir of the turbo-molecular pump, the cover
at the bottom of the TMH 071 has to be unscrewed. Refer to Fig. 7-3 /3.
Warning
Prior to starting maintenance work, please verify that the mass spectrometer and
the turbo-molecular pump are completely flooded. The cover for the lubricant
reservoir can only be removed in the flooded state.