Inficon 550-300A, Operating Manual

Page: 51 / 128

Operation
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External Calibration
The external calibration has the advantage that it considers the application-specific
measuring conditions. The external calibration leak can be connected to the vacuum
chamber.
Calibration leaks with solenoid valves can be connected to the terminal VALVES at
the back of the device. Then, the Modul1000 automatically controls the valve.
Before the calibration, enter the corresponding value of the calibration leak which
shall be used for calibrating the Modul1000 in the settings of the Modul1000. This
can be done via the optional control unit or the RS232 interface.
The external calibration in the Partial Flow mode is carried out with the setting „Fore
and partial flow pump“ in the item „Measure mode". (see chapter
6.9.6.1 )
Automatic External Calibration
The automatic external calibration requires a calibration leak with solenoid valve.
It is electrically connected via the VALVES connector.
After starting the automatic external calibration, the Modul1000 runs through the
complete calibration sequence.
In this case, the signal transient time of the test leak (CAL-transient time) is used
which can be set in the menu. Before, it must be adjusted to the volume at the inlet.
The CAL-transient time increases depending on the volume enclosed at the inlet.
Manual external Calibration
In case of the manual external calibration, the test leak has to be opened and closed
manually.
Also acknowledge the steady-state test leak signal manually.
The control unit or the control panel guides the user through the calibration routine
via the display.
6.6.2 Calibration in Sniff mode
It only applies for devices with the catalogue No. 550-310 and 550-330.
In Sniff mode, calibration is done in the same way as it is done for the external man-
ual calibration in Vacuum mode.
With the optional sniffer line connected to the Modul1000, it is required to measure
a sniffer test leak and a helium background.
Acknowledge the steady-state test leak signal and the steady-state background
value manually.
6.6.3 Calibration in Auto Leak Test
There are four different ways of calibration:
• Internal automatic
• Internal manual
• External automatic
• External manual