Inficon 550-300A Operating Manual Download Page 9

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Operating instructions

1-7

jinb

-h

anua

Minimum detectable leak rate

The smallest leak rate the Modul1000 is able to detect.

(5x10

-12

mbar l/s).

Menu

The menu allows the user to program the Modul1000 according to the requirements.
The menu has a tree structure.

As-delivered condition

The default settings of the Modul1000 are as delivered by the factory.

Standby

The Modul1000 is ready for operation.

MEASURE

MEASURE mode is when the Modul1000 has achieved a pressure better than the
crossover and the unit is sampling the gas load for helium leak rate.

Summary of Contents for 550-300A

Page 1: ...O P E R A T I N G M A N U A L jinb80en1 j 1501 Translation of the original manual Catalog No 550 300A 550 310A 550 330A from software version V1 75 Modul1000 Modular Leak Detector ...

Page 2: ... Operating Manual 1501 Legal notice INFICON GmbH Bonner Straße 498 50968 Cologne Germany Copyright 2010 INFICON GmbH Cologne This document may only be reproduced in any form with the permission of INFICON GmbH Cologne ...

Page 3: ...3 1 Desktop operation 3 4 3 3 2 Installation in switch cabinet 3 4 3 3 3 Remote control RC1000 3 5 3 4 Scope of delivery 3 6 3 5 Accessories 3 6 3 5 1 Sniffer line SL200 3 6 3 5 2 Test chamber TC1000 3 6 3 5 3 Set of male connectors for Interfaces 3 7 4 Installation 4 1 4 1 Mechanical Installation 4 1 4 2 Electrical installation 4 1 4 2 1 Mains socket 4 1 4 2 2 Electrical interfaces 4 2 4 2 3 Vacu...

Page 4: ...und 6 23 6 12 6 3 Main menu o Settings o Mass 6 23 6 12 6 4 Main menu o Settings o Interfaces 6 23 6 12 6 5 Main menu o Settings o Miscellaneous 6 26 6 12 6 6 Main menu o Settings o Load Save Parameters 6 27 6 12 6 7 Main menu o Settings o Monitoring 6 28 6 12 7 Main menu o Info 6 30 6 12 8 Main menu o Access Control 6 31 7 Maintenance tasks 7 1 7 1 Maintenance and service at INFICON 7 1 7 2 Gener...

Page 5: ...9 3 9 2 2 PLC Outputs 9 6 9 3 The digital valve outputs 9 9 9 4 Analogue Output 9 10 9 4 1 Configuration of the analogue outputs 9 10 9 5 Pin Assignments 9 13 9 5 1 PLC IN AUDIO 9 13 9 5 2 PLC OUT 9 15 9 5 3 Pressure Gauge 9 16 9 5 4 Valves 9 19 9 5 5 Recorder 9 21 9 6 Installation diagram of the control unit for rackinstallation 9 22 9 7 Commander mode 9 23 9 8 CE Certificate 9 24 10 Error Messag...

Page 6: ...1 4 Content jinb80e1 h Operating Manual 1501 ...

Page 7: ...sed on to third parties 1 2 Warning and danger symbols S TOP Danger This symbol refers to an immediate hazard which may result in fatal or serious injuries crippling Warning This symbol refers to a possibly hazardous situation which may result in fatal or serious injuries Caution This symbol refers to a possibly hazardous situation which may result in slight injuries This symbol is also used to al...

Page 8: ...est sample inlet pressure PE and the fore vacuum pressure PV are used for control purposes Auto zero Determination and automatic adaptation of the helium background in the Vacuum mode Through this function the internal zero level of the instrument is determined which is then subtracted from the current leak rate signal This function is run during the calibration process or when operating the start...

Page 9: ...the user to program the Modul1000 according to the requirements The menu has a tree structure As delivered condition The default settings of the Modul1000 are as delivered by the factory Standby The Modul1000 is ready for operation MEASURE MEASURE mode is when the Modul1000 has achieved a pressure better than the crossover and the unit is sampling the gas load for helium leak rate ...

Page 10: ...1 8 Operating instructions jinb80e1 h Operating Manual 1501 ...

Page 11: ...cessories The intended use includes the compliance with the technical data and the ambient conditions the use of standard and original accessories consideration of this documentation and the observation of the included instructions and directives 2 2 User requirements The Modul1000 must only be connected and operated by properly trained staff Get used to the functioning of the device Only connect ...

Page 12: ...k of dangerous gases The device is not suitable for caustic toxic and explosive substances Only use this device for detecting harmless substances S TOP Danger Danger of fatal injuries due to explosion When explosive gases are used as test gas the gas container could explode Avoid flames and sparks keep ignition sources far away from the device S TOP Danger Danger of fatal injuries due to electric ...

Page 13: ...plosive radioactive or other hazardous substances Contact the manufacturer if you plan to use the device for such substances S TOP Danger Danger of fatal injuries due to implosion Components which are not pressure resistant can burst cause through implosion Only connect containers and parts to the inlet flange of Modul1000 which are suit able for vacuum S TOP Danger Danger of fatal injuries due to...

Page 14: ...uld carry the Modul1000 or use a lifting device Warning Injury to health due to emissions and fumes of oil sealed pumps Before it is operated in closed rooms the oil sealed fore pressure pump if used has to be connected to an exhaust gas pipe Warning Danger of fatal injuries due to electric shock Only operate the Modul1000 in buildings and on dry surfaces Warning Risk of injury due to sucking inle...

Page 15: ...nto the device when the device does not operate any more after long storage time under unfavourable conditions after strong transport conditions Warning Supposed risk If it can be supposed that safe operation is not ensured any more the device must be switched off and must be secured against accidental switching on If this happens contact the INFICON service people ...

Page 16: ... Check if the local power supply voltage complies with the required supply voltage of the device Caution The electronic system of the Modul1000 may be damaged by too high voltages The digital inputs are designed for maximum 30 V Caution The electronic system of the Modul1000 may be damaged by too high electric loads The relay outputs should be connected to maximum 60V DC or 25 V AC 1A at ohmic loa...

Page 17: ...e for free openings for air inlet and outlet Caution The Modul1000 can be damaged when liquid gets into it If liquid has entered the Modul1000 do not switch it on and contact the INFICON Service Caution The Modul1000 may be damaged by being stored in unfavourable conditions too damp too hot too cold too high above sea level for months or years refer to Technical Data If the Modul1000 has been stor...

Page 18: ...2 8 Important safety instructions jinb80e1 h Operating Manual 1501 ...

Page 19: ...he user are stored in a separate memory module I STICK which can be withdrawn easily All device configurations and the necessary maintenance works can be performed without opening the device To generate the fore vacuum required for the operation of the turbo molecular pump as well as for evacuation of the connected test sample a fore vacuum pump with a pumping speed of 2 m h has to be connected It...

Page 20: ...enings for unlocking 9 Mains socket with main switch and the cover Mains fuses 4 Recess handles 10 Connection DN25 KF for 5 Status LED Fore vacuum pump or sniffer line 6 air filter 11 Electrical interfaces Fig 3 3 Cut out in the bottom side of Modul1000 Item Description 1 Connection for the fore vacuum pump screwed flange 9 10 11 6 5 4 3 ...

Page 21: ...ntrol panel for the installation in a switch cabinet The Modul1000 provides an extensive software menu which serves for operation and configuration refer to chapter 6 8 This control unit offers access to the menu struc ture The control unit can optionally be connected to the Modul1000 via 1 m or 5 m long connecting cables The control unit is for configuring and controlling the Modul1000 individual...

Page 22: ...grated in the front of a 19 rack system Fig 3 5 Control Unit for Desktop Operation Item Description Item Description 1 LCD display 8 Soft Key no 5 2 Soft Key no 1 9 Soft Key no 6 3 Soft Key no 2 10 Soft Key no 7 4 Soft Key no 3 11 Soft Key no 8 5 Soft Key no 4 12 Menu button 6 START button with LED 12 STOP Vent button with LED 7 Control Unit 14 ZERO button with LED 1 6 5 4 3 2 7 8 9 10 11 12 13 14...

Page 23: ...of the RC1000 for a recorded period of maximum 24 hours Then the data can easily be transferred to a USB stick An internal trigger can be set to provide a warning if the limit leak rates are exceeded An optical warning is shown on the display and an acoustic warning signal is sounded on the integrated loudspeaker or the connected headphones The RC1000 remote control is housed in a robust housing t...

Page 24: ...or integrated testing of helium filled parts The test procedure can be configured individually in the software menu of Modul1000 and runs automatically after the chamber has been closed Accessories Cat No Ref No Sniffer line SL200 140 05 Test chamber TC1000 551 005 Set of male connectors for Interfaces 551 110 Control unit desktop version 551 100 Control unit mounting version 19 inches 551 101 Con...

Page 25: ...tion of equipment 3 7 jinb80e1 h Operating Manual 1501 3 5 3 Set of male connectors for Interfaces The connector kit includes the following plugs PLC IN AUDIO PLC OUT RECORDER PRESSURE GAUGE VALVES ACCESSORIES ...

Page 26: ...3 8 Description of equipment jinb80e1 h Operating Manual 1501 ...

Page 27: ...xceeded during operation If the leak detector Modul1000 is used for an application that can cause strong vibra tions or impacts then we recommend connection via flexible connections and to pref erably avoid direct connections Please also use also flexible connections for the test chambers angle valves and the like if wear from impact or vibration is to be expected The following figure illustrates ...

Page 28: ...trical interfaces All electrical interfaces of the Modul1000 are clearly visible arranged in a connecting area on the right side of the device refer to Fig 3 2 Valves The connection VALVES is for controlling external valves Caution Place the device in a way that you can always reach the power plug Connectors LED yellow LED green CONTROL UNIT PC RS232 REMOTE CONTROL PLC IN AUDIO PLC OUT RECORDER PR...

Page 29: ...as to be connected to PRESSURE GAUGE Connect the pressure gauge as follows with the 8 pin Phoenix plug PRESSURE GAUGE Notice The pressure transmitters to be connected can be supplied via the contacts 1 and 2 of the Modul1000 If they are supplied by external power supply units ensure that the contacts 4 and 6 may only have a maximal potential of 4V compared to contact 2 Otherwise it could be damage...

Page 30: ...gnal Pin 1 and Pin 2 of XP5 are connected for a voltage signal connect Pin 2 and 3 By changing the jumper position on the connector XP4 the setting of the Input 2 will be changed However this input is not supported in the current software Recorder Output analogue The two Recorder outputs analogue outputs may be used to log the leak rate the inlet pressure or the fore vacuum pressure The output vol...

Page 31: ...nt 1 24V can tied in via the jumper XT2 maximum current consumption 0 3 A Pin 2 and 3 connected As delivered 24 V are not tied in Pin 1 and 2 connected 2 TxD 3 RxD 4 GND 24 V can be tied in via jumper XT1 Pin 2 and 3 connected On delivery GND 24 V is not tied in Pin 1 and 2 connected 5 GND RS232 6 not used 7 not used 8 not used 9 not used S TOP Danger Danger of fatal injuries due to electric shock...

Page 32: ...peed of 2 m h and a possible ultimate pressure of 1x10 2 mbar If the fore vacuum pump is equipped with a solenoid gas ballast valve or purge gas valve it can be controlled via the valve output V22 of the Modul1000 Test sample Test Equipment The test sample or the test equipment are connected using the DN25 KF inlet flange on the top of the Modul1000 To be able to measure with the leak test device ...

Page 33: ...od connection 8 mm hose connection on the left side of the device The gas pressure on the flood connection may not exceed 1100 mbar absolute It is also possible to connect an additional external ventilating valve to the valve output V21 Sniffer line The connection for the sniffer line exists only for the sniffer version of the Modul1000 catalogue number 550 310 This connection is for the optional ...

Page 34: ...as Stand Alone leak detec tor The unit under test or the vacuum chamber are only evacuated via the inlet flange of the leak detector The pumping speed on the inlet of the leak detector depends on the used fore vacuum pump and on the conductivity ratios of the device If the pressure is lower than 0 4 mbar the device will switch over to the Measuring mode and display the measured leak rate When meas...

Page 35: ...ly be added via an external partial flow valve only for evacuation or for evacuation during the measure ment If the partial flow pump is also added during the measurement the pumping speed of the partial flow pump for helium has to be considered In this case adjust the machine factor as required refer to chapter 6 9 Furthermore an external calibration is recommended refer to chapter 6 6 For fast v...

Page 36: ...e The test run can be adapted to your special application of the leak detector The corresponding settings can be entered via the control panel or the RS232 interface refer to Interface Description Measuring time The measuring time starts as soon as the Modul1000 switches over from the evacu ation phase to the Measuring mode The possible time settings range from 1 second to 30 minutes At the end of...

Page 37: ...l1000 determines the internal helium background of the test equipment and then it deducts this values from the values of following measuring cycles The reduce the background of the test equipment in case of a reference measure ment the vacuum system of the device is evacuated and vented for three times 5 4 Commander mode If the Modul1000 is integrated in a leak detector system in Commander mode it...

Page 38: ...hamber walls and is filled with helium after the chamber has been evacuated Due to the difference between the helium pressure in the test sample and the vacuum in the vacuum chamber the helium of a leaky part flows out of the leak into the vacuum chamber and into the leak test device where it can be measured as gas leak Fig 5 2 Leak detector system Item Description Item Description V30 Valve evacu...

Page 39: ...uum chamber which is connected to the inlet of Modul1000 2 After the START signal the Modul1000 starts evacuating the vacuum chamber If a partial flow pump is connected with Modul1000 the partial flow valve V20 Fig 5 1 will be actuated and the test run is accordingly supported by the partial flow pump 3 Before the actual helium test is executed a gross leak test is carries out to detect gross leak...

Page 40: ...set time t_G_ Measuring_time has expired If the pressure of the test sample drops below the pressure p_E_Pressure_drop_threshold during the leak test due to a leak in the system the measuring cycle will be interrupted indicating the error message 99 8 At the end of the measuring time the valve V32 is opened Helium is returned from the test sample to the helium filling facility until the pressure i...

Page 41: ...ode the detection limit is restricted to 1 10 7 mbarl s due to the high atmos pheric helium background The gas flow rate though the sniffer line is approximately 25 sccm It is electrically connected by the ACCESSORIES connector The operating mode must be set to Sniff mode In SNIFF mode the red LED on the sniffer handle indicates a bad test sample and the green LED indicates a good test sample The ...

Page 42: ...p mode d 3 Min the following items appear on the display Speed of the turbo molecular pump Fore vacuum pressure State of emission Active filament A bar graph which shows the run up progress After the run up has been completed the Modul1000 is in Standby mode 6 2 Status LED The LEDs show the operating mode of the device Operating mode LED green LED yellow Run up Flashes Flashes Standby Vent On Off ...

Page 43: ... 1 and the control panel for the rack installation refer to chapter 3 3 2 are the same Hand set The optional remote control refer to chapter 3 3 3 includes the main functions Start Stop Vent and Zero Additionally the volume can be controlled If LOCK is displayed the control of the Modul1000 via the remote control was disa bled in the menu item Control location RS232 Interface The RS232 interface s...

Page 44: ...of the leak test device reaches 0 4 mbar the Modul1000 will automatically switch over to the Measuring mode This pressure limit can be set in the following menu Settings o Monitoring o Pressure limit for the vacuum area STOP VENT The STOP command stops the measurement and the leak test device switches over to the Standby mode If you press the STOP button briefly the measurements are interrupted If...

Page 45: ...ged is displayed shaded Use the keys No 8 and No 4 and go to the position to be changed To change a digit to a specific number press the corresponding pair of numbers A sub menu opens and the desired number can be selected The sub menu closes automatically and the next whole number will be displayed with inverted colours and can be changed Having reached the last digit all corrections have to be c...

Page 46: ...Manual 1501 To change the trigger level from 1 0x10 9mbarl s to 3x10 9mbarl s please press 2 3 button No 3 A sub menu is opened in which the desired value 3 button 4 can be selected Fig 6 4 Examples for a numeric input of Trigger Level 1 ...

Page 47: ...et The evacuation time depends on the volume connected the Modul1000 and the fore vacuum pump or the partial flow pump Display symbols Meaning Explanation Sound volume Refer to chapter Volume for the audible signal S1 2 3 Trigger Level 1 2 3 If the trigger values are exceeded these signs are inverted White on black background Detected mass The number of dots stands for the mass number 4 dots heliu...

Page 48: ...perating Manual 1501 Measuring When the pressure on the inlet of the Modul1000 drops below the set lower pressure limit the device will change over to measuring mode Fig 6 5 Evacuate Fig 6 6 Measuring p2 V2 MS V6 V7 p1 V1 V4 V22 ...

Page 49: ... numeric display and the graphic display using the button No 8 It is labelled with the symbols for numeric and graphic display 6 6 Calibration Switching off the preamplifier test Fig 6 7 Fig 6 8 During calibration the device tests the installed preamplifier You can switch off the amplifier test This makes calibration fast but lowers reliability 0 Off 1 ON Control unit Settings Control Preamplifier...

Page 50: ...re use Internal Calibration If a partial flow pump is used in measuring mode set the correct machine factor before the 1st calibration The internal calibration is not done in partial flow mode not even if it is set to Partial flow in measuring mode It will be corrected via the set machine factor Automatic Internal Calibration After starting the calibration the whole calibration procedure runs auto...

Page 51: ... calibration the Modul1000 runs through the complete calibration sequence In this case the signal transient time of the test leak CAL transient time is used which can be set in the menu Before it must be adjusted to the volume at the inlet The CAL transient time increases depending on the volume enclosed at the inlet Manual external Calibration In case of the manual external calibration the test l...

Page 52: ...l manual For the external calibration a separate test leak is required which is mounted on the chamber The calibration procedure is the same as it is for the vacuum mode 6 7 Machine factor The machine factor takes into account that the Modul1000 is used in parallel with a pumping system partial flow method Because in such a system configuration only a part of the leak gas flow reaches the leak tes...

Page 53: ...ting Manual 1501 The machine factor can also be used to correct the leak rate display referred to the air equivalent The machine factor for this correction is 3 7 x 10 1 When this setting is used this status will be displayed by COR ...

Page 54: ...Trigger level 1 Series Error Messages Part Number Reference Measurement Commander Timing Commander functions Commander pressure threshold Background suppression Trigger level 1 Machine factor Leak rate internal test leak Zero Background Background suppression zero Mass Interface Control location RS232 External pressure gauge Characteristics Zero point Full scale Define PLC outputs Define PLC input...

Page 55: ...ng functions Calibration request Paging function RC1000 Contamination protection Pressure limits for vacuum ranges Pressure limits for sniff mode Maximum evacuation time Info View settings View internal data Vacuum diagram Interface Logged data View error list Maintenance history Calibration history Test log Clear test log Calibration factors Services Access control Access to CAL function Change d...

Page 56: ...er to the chapter Display of Measured Values There is the choice of linear and logarithmic presentation Only in the logarithmic view the number of shown decades can be changed by pressing the keys n and p o Display range auto manual The upper limit of the displayed bar graph and the diagram can be set manually or automatically Manually If selected manually any upper detecting limit between 10 3 mb...

Page 57: ...for vacuum modes only The lower display limit applies for the graphical diagram of the leak rate and for the numeric output of the leak rate as well The Modul1000 does not display leak rates below the lower display limit The lower display limit can be selected between 1x10 5 and 1x10 11mbar l s 6 9 3 Main menuo Mode The operating mode can only be changed in Standby mode The following operating mod...

Page 58: ...levels e g during the evacuation process an alarm delay can be set The alarm delay time will start after the Modul1000 has changed from the Evacuation mode to the Measurement mode Trig ger 1 will release only then when the set alarm delay time has expired or the meas ured leak rate was below the set trigger value for a short time The alarm delay can vary between zero and ten minutes If the set tim...

Page 59: ...rnal manual calibration method the test leak value has to be entered when the displayed leak rate does not match with the value of the used test leak The internal manual calibration already starts with selecting the calibration method The value of the used test leak can be entered by pressing the Change leak rate button also refer to chapter Change values After the test leak value has been entered...

Page 60: ...the entire procedure is performed automatically At the end after about 25 s a beep is released Thereafter the leak detector is ready for further use It is possible to set the time before the test leak is opened closed to receive a constant measuring signal o External manual 1 Make sure that the test leak is connected and opened 2 Check the leak rate printed on the test leak and compare it with the...

Page 61: ...on If immediately is selected activating the Stop Vent button will immediately switch over to Standby mode o Partial flow In the Partial Flow menu the Partial Flow mode can be set and configured It is possi ble to add the partial flow pump separately only for the Measuring mode and for the evacuation phase Main menu o Settings o Vacuum settings o Auto Leak Test Settings o Measuring time This softw...

Page 62: ...ero delay Time delay until ZEROING if zero enabled or time in which I ZERO is carried out if I ZERO has been activated Default setting 10 seconds t_C filling time Maximum time to achieve the filling pressure p_C Filling pressure in the unit under test Default setting 30 seconds t_D depressurising time Maximum time to achieve the set depressurising pressure p_B evacuation pres sure factory setting ...

Page 63: ...machine factor takes into account that an additional external pumping system is used Because internal calibration does not take into account the sharing of helium in partial flow mode all measured leak rate would be measured too small The measured leak rates are multiplied with the machine factor and the result is displayed This factor is only used for vacuum mode not for sniff mode The machine fa...

Page 64: ...the ZERO button only when the leak rate signals are stable In this setting the inclination of the decreasing background signal is measured The leak rate signal must be stable enough to detect a leak of the programmed size of Trigger 1 This is shown in the status bar by displaying STABLE The I Zero function is locked as long as the leak rate signal is not stable enough The inclination of the droppi...

Page 65: ...ters e g during maintenance o UL2xxLeak Ware Allows controlling and reading of measured values when connected to a computer For operation of the Leak Ware refer to the corresponding operating instructions Notice The calibration function of the Leak Ware cannot be used for the Modul1000 Please execute the function STORE DATE in the operating mode Single Part Measurement for recording the measured v...

Page 66: ...of the listed functions 3 After the PLC inputs have been assigned as desired confirm the settings by pressing the OK button The PLC inputs and the PLC outputs can be inverted in the menu via the serial inter face The inverting is also be saved in the parameter sets Main Menu o Settings o Interfaces o Recorder In this sub menu the signals to be recorded by the recorder can be assigned to the two re...

Page 67: ...ult language is English If accidentally a wrong language has been set English can be set during the run up of the Modul1000 after it has been switched on when the buttons 2 and 6 are simul taneously pressed The settings are not saved automatically but have to be saved via this menu item o Leak rate filter The kind of the leak rate filter can be chosen The default value is I CAL The abbreviation I ...

Page 68: ...P It resets the maintenance interval of the turbo molecular pump refer to chapter 7 Maintenance Works o Maintenance message for TMP This menu item maintenance message for TMP serves for resetting the maintenance messages which appear automatically after the maintenance interval has expired o Maintenance Inter val Fan Filter In the Maintenance Interval Fan Filter menu the maintenance interval can b...

Page 69: ... GAS BALLAST STOP CAL PLC IN Pin 5 ZERO ZERO ZERO ZERO ON PLC IN Pin 6 CAL CAL INV GAS BALLAST ON PLC IN Pin 7 CAL INTERN CLEAR GAS BALLAST OFF PLC IN Pin 8 CAL EXTERN NOT USED NOT USED PLC IN Pin 9 CLEAR NOT USED NOT USED PLC IN Pin 10 GAS BALLAST NOT USED NOT USED PLC OUT Pin 3 TRIGGER 1 Error MEASURE EMISSION ON PLC OUT Pin 4 TRIGGER 2 WARNING Error INV TRIGGER1 PLC OUT Pin 5 TRIGGER 3 EMISSION...

Page 70: ...ted by changing the switching points Default setting 0 4 mbar Modul1000 or 3 mbar Modul1000b o Pressure limit for Sniff mode This function is automatically activated in sniff mode The pressure limits define an upper and lower limit of the inlet pressure If the pressure is not in this range the following error messages warnings will be generated Fore vacuum pressure Maximum pressure Error message E...

Page 71: ...w over the interfaces configuration and status o Recorded Data This screen can display the history of errors maintenance works and tests Refer to 6 8 o Calibration Factors The calibration factors for the several masses or operating modes and the machine factor are displayed o Service This menu item is only accessible for authorized INFICON service personnel Main menu o Info o Recorded Data o View ...

Page 72: ...unction o Change DevicePIN The access to the Modul1000 can be restricted by entering or editing the Device PIN Is the Devise PIN not 0000 the Modul1000 will request this PIN immediately after switching on Without Device PIN the Modul1000 cannot be started o Change Menu PIN Here you can set and change a 4 digit PIN to lock the access to the menu via the control unit ...

Page 73: ...rm directly to the equipment or put it into the packaging with the equip ment Notice The contamination declaration is required to meet legal requirements and protect our employees If the equipment has no Declaration of Contamination attached INFICON must return any equipment to the sender s address 7 2 General Maintenance Instructions Maintenance work for the Modul1000 is divided into 3 service se...

Page 74: ...ched on The message appears as long as the maintenance interval has been acknowledged The maintenance counter 2 is only enabled for the service steps II and III in the service menu Notice To be able to claim for compensation for damage the maintenance schedule of the Modul1000 has to be observed If necessary maintenance works were not done the claim for compensation for this component will expire ...

Page 75: ...Modul1000 can be subdivided in 4 maintenance groups 1500 hours maintenance 5000 hours maintenance Maintenance every two years Assembly Maintenance tasks Operating hours Years Service segment Spare Modul1000 1500 5000 15000 Part No 1 4 1 2 3 Vacuum system Valve block Clean the valves replace seals for valves X1 III 200000594 Take apart the valve bloc and clean it X1 III 200002002 Replace the filter...

Page 76: ...nce The 5000 hours maintenance should be performed by an INFICON service technician or an other person authorized by INFICON The valve drives have to be inspected and cleaned every 5000 operating hours and the valve seals or the valve caps have to be replaced The flood filter needs to be inspected after 5000 hours depending on the application however it will be neces sary to replace it after 15000...

Page 77: ...perating hours achieved Please follow the instruc tions in 7 6 when replacing the operating fluid reservoir 7 5 Description of the maintenance work Only trained specialist staff may modify the Modul1000 in a way that exceeds the standard scope of maintenance For maintenance works described in this chapter it will not be required to remove the cover of the device However the replacement of fuses re...

Page 78: ... on both sides of the device cover Refer to Fig 7 2 1 Turn the Roto Locks until they reach their end positions OPEN 2 Carefully lift the cover 3 The cover is reassembled in reverse order When attaching the cover ensure that no electrical wires reach between the cover and the chassis 4 To secure the cover turn the Roto Locks until they reach their end positions CLOSE S TOP Danger Before removing th...

Page 79: ...switch the device on for about 10 to 25 s After about 10 s valve V2 opens and the mass spectrometer and the turbo molecular pump are flooded Further wait for at least 10 s until the high vacuum system is completely flooded 2 Switch the mains switch Off again and disconnect the device from the power supply 3 Turn the device and place it on its long side to access the inspection port on the bottom N...

Page 80: ...2 by a new O seal Verify that the new O ring is inserted in the proper position An incorrectly inserted O ring may cause large leaks and the malfunction of the equipment 9 Then assemble and tighten the cover Fig 7 3 Cover of the lubricant reservoir TMH 071 Item Description Item Description 1 Fore vacuum connection 3 Cover of the lubricant reservoir TMH 071 2 Pocket for special tool 4 Inspection po...

Page 81: ...Maintenance tasks 7 9 jinb80e1 h Operating Manual 1501 Fig 7 4 Replace the Lubricant Reservoir Item Description Item Description 1 Operating fluid reservoir 2 O Ring 1 2 ...

Page 82: ...ns Power supply unit ZWS240PAF 24 TA Designation Technical data Fuse for F1 F 6 3 A Fuse power supply unit I O PCB Designation Technical data Fuse for F1 F2 T 0 8 A not used F3 T 0 315 A not used Circuit board MSV Designation Technical data Fuse for F1 T 2 A 24 V main fuse for MSV card F2 T 3 15 A Anode heater no use F3 T 1 A 15 V 5V DC DC transformer F4 M 0 032 A Anode cathode voltage 85 V Interf...

Page 83: ...pen the cover of the fuse insert using a screwdriver For this insert the screwdriver into the respective groove and open the cover Refer to Fig 7 5 S TOP Danger Danger of fatal injuries due to electric shock Before replacing the fuse disconnect the power plug of the Modul1000 Only insert fuses with the specified values in the Modul1000 Fig 7 5 Fuse replacement Item Description Item Description 1 C...

Page 84: ... SW 8 Required material Complete set of fusesOrder No 200 000 641 Access to the fuses is only possible when the cover of the Modul1000 has been removed Follow the instructions in 7 5 1 Opening of the Device Notice Please observe the safety instructions in this chapter After the cover has been removed the fuses on the interface board are accessible Refer to Fig 7 6 Fig 7 6 Fuses on interface board ...

Page 85: ...s to the I STICK is only possible when the cover of the Modul1000 has been removed Follow the instructions in 7 5 1 Opening of the Device Notice Please observe the safety instructions in this chapter To replace the I STICK release the two screws with which the I STICK is screwed on the connector See the Fig 7 7 below After the screws have been released pull the I STICK out of the socket and insert...

Page 86: ...filter is only possible when the cover of the Modul1000 has been removed Follow the instructions in 7 5 1 Opening of the Device Notice Please observe the safety instructions in this chapter To dismantle the vent filter disconnect the hose connections of the filter from the quick connecting couplings By pressing on the outside ring on the quick connecting couplings the hose can be pulled off Please...

Page 87: ...Name Date and legally binding signature Companystamp 1 or not containing any amount of hazardous residues that exceed the permissible ex posure limits Process related contamination of product toxic no 1 yes caustic no 1 yes biological hazard no yes 2 explosive no yes 2 radioactive no yes 2 other harmful substances no 1 yes The service repair and or disposal of vacuum equipment and components will ...

Page 88: ...8 2 Transport and disposal jinb80e1 h Operating Manual 1501 8 2 Disposal When disposing the Modul1000 consider your federal law concerning the disposal of electronic devices ...

Page 89: ...oltage category to IEC 60664 1 II Mains connection line 3 m Max inlet pressure Modul1000 Max inlet pressure Modul1000b 0 4 mbar 3 0 mbar Minimum detectable Helium leak rates in vacuum mode ULTRA 5 10 12 mbar l s Minimum detection limit in sniff mode 5 10 8 mbar l s Maximum allowed gas flow in the sniffer line 25 sccm Maximum Helium leak rate which can be displayed 0 1 mbar l s Measurement range 12...

Page 90: ... use within buildings Permissible ambient temperature during operation 10 C 40 C 50 F 104 F Permissible storage temperature 0 C 60 C 32 F 140 F Maximum relative humidity 80 at 31 C 88 F linearly decreasing to 50 at 40 C 104 F Max permissible height above sea level during operation 2000 m ...

Page 91: ...tions are also selectable as inverted functions Notice Signals at these inputs are only accepted if the location of control is set to PLC or Local and PLC Caution The electronic system of the Modul1000 may be damaged by too high input voltages The maximum permissible input direct voltage is 30V Pin Assignment 1 24V fuse protected with F3 on the interface board 0 8 A maximum output current on this ...

Page 92: ...ly VENT Edge controlled input Change from LOW to HIGH Flooding GAS BALLAST Edge controlled input Change from LOW to HIGH Activate Gas Ballast Purge Change from HIGH to LOW Deactivate Gas Ballast Purge CLEAR Edge controlled input Change from LOW to HIGH Acknowledge error message or abortion of a calibration CAL Edge controlled input Change from LOW to HIGH In case the device is in Standby mode Star...

Page 93: ...d and in the Measurement status STOP will be executed GAS BALLAST ON Edge controlled input Change from LOW to HIGH The gas ballast valve is opened GAS BALLAST OFF Edge controlled input Change from LOW to HIGH The gas ballast valve is closed ZERO ON Edge controlled input Change from LOW to HIGH Activate ZERO ZERO is switched off when the devices switches over to Standby SNIFF Status controlled inpu...

Page 94: ...t is closed Pin Assignment 1 24V fuse protected with F4 on the interface board 1 6A maximum output current on this pin together with pin 1 on pin VALVES 2 GND 3 Normally open contact to pin 15 e g TRIGGER1 default setting 4 Normally open contact to pin 15 e g TRIGGER2 default setting 5 Normally open contact to pin 15 e g TRIGGER3 default setting 6 Normally open contact to pin 15 e g ZERO ACTIVE de...

Page 95: ...VENTED Closed when the inlet is ventilated ERROR Closed when no error occurs Open when an error occurs WARNING Closed when no warning occurs Open when a warning appears CAL ACTIVE Closed when a calibration routine is run CAL REQUEST External manual calibration active Open if the external test leak has to be closed External manual calibration not active Open when a calibration request is still acti...

Page 96: ...n emission has been switched on CYCLE ACTIVE Closed when the device is in evacuation measuring or calibration mode PUMP DOWN Closed when the device is in evacuation mode SNIFF Closed when the device is in SNIFF mode This output has a feedback function for the PLC input SNIFF ...

Page 97: ... with maximum 0 2 A Via this pin the following valves can be controlled by the Modul1000 If control inputs are connected e g valves with integrated electronic circuitry instead of solenoid valves a resistance of 10 kOhm 5 0 5 W has to be shunted Pin Assignment 1 24V fuse protected with F4 1 6 A on the interface board The sum of the maximum supplied current to this pin and the received current from...

Page 98: ...ter outputs 50mV offset plus 1 from the measured value current output voltage as linearity deviation at 25 C Notice The chart recorder outputs are electrically isolated from other plugs If in spite of this hum interference occurs we recommend supplying the Modul1000 and the recorder by the same mains phase If this is not possible you must make sure that the frame ground of both instruments is kept...

Page 99: ... The upper limit refers to 10 V and the scale division in Volt decade is set via the optional control unit in Scale recorder output LR log The leak rate output is logarithmically scaled The output voltage is 1 10 V in optional steps from 0 5 to 10 volts per decade The scale in volts decades is set via the optional control unit in Scale recorder output Example for signal LR log The upper limit valu...

Page 100: ...onent is displayed as step function U 1 10 V with steps of 0 5 V per decade starting with 1 V 1 10 12 LR log H LR 10 V E 10 11 E LR leak rate V output voltage E output voltage values rounded up 1V 2V 3V 4V Voltages between 1 V to 1 1 V 2 V to 2 1 V 3 V to 3 1 V etc are not displayed ...

Page 101: ... PLC IN AUDIO All inputs are electrically isolated by opto couplers Fig 9 2 External circuitry e g PLC with external voltage supply unit Item Description 1 External active loudspeaker 1 4 3 2 6 5 8 7 9 10 11 13 12 14 F3 24V GND GND 24V 24V AUDIO OUT GND 24V 24V PIN GND 1 SPG GND ...

Page 102: ...echnical Data jinb80e1 h Operating Manual 1501 Fig 9 3 External circuitry e g PLC with internal voltage supply unit 1 4 3 2 6 5 8 7 9 10 11 13 12 14 F3 24V GND GND 24V 24V AUDIO OUT GND 24V PIN GND 1 SPG GND ...

Page 103: ...5 jinb80e1 h Operating Manual 1501 9 5 2 PLC OUT PIN 3 12 Relay contacts max 60 V DC 25 V AC 1 A PIN 13 14 Semiconductor relays max 30V DC 1 A Fig 9 4 PLC OUT 24V GND 24V n c 15 16 1 4 3 2 6 5 8 7 9 10 11 13 12 14 PIN F4 ...

Page 104: ... on the interface boards accordingly Fig 9 5 Internal power supply 24 V Item Description 1 Pressure sensors Fig 9 6 External supply voltage 24V with common GND Item Description 1 Pressure sensors 24V 0 8 A GND 24V Input 1 GND 1 GND 2 Input 2 4 20mA 1 4 3 2 6 5 1 24V 0 8 A GND 24V Input 1 GND 1 GND 2 Input 2 Modul1000 1 4 3 2 6 5 4 20 mA 1 24V ...

Page 105: ...of sensors with 0 10V signal Notice Arrange the jumpers on the interface boards accordingly Fig 9 7 External sensor supply 24 V with electrically isolated installation of mass 24V 0 8 A GND 24V Input 1 GND 1 GND 2 Input 2 1 4 3 2 6 5 4 20 mA 24V Fig 9 8 Connection with common mass 1 4 3 2 6 5 24V 0 8 A GND 24V Input 1 GND 1 GND 2 Input 2 ...

Page 106: ...ata jinb80e1 h Operating Manual 1501 The voltage difference between pin 2 and the pins 4 6 may be maximum 4 V Fig 9 9 Connection with separated mass arrangement 1 4 3 2 6 5 24V 0 8 A GND 24V Input 1 GND 1 GND 2 Input 2 ...

Page 107: ...l 1501 9 5 4 Valves Internal power supply Fig 9 10 Connection example Item Description 1 Valves I max 0 2 A maximum 8 pcs 2 Valves I max 1A 1 4 3 2 6 5 8 7 9 10 11 13 12 14 15 16 24V F1 GND F5 F6 1 V30 V31 V32 V33 V34 V35 V20 V37 V36 V22 V21 24V 2 ...

Page 108: ...Manual 1501 External power supply Fig 9 11 Connection example Item Description 1 Valves I max 0 2 A maximum 8 pcs 2 Valves I max 1A 1 4 3 2 6 5 8 7 9 10 11 13 12 14 15 16 24V F1 GND F5 F6 1 V30 V31 V32 V33 V34 V35 V20 V37 V36 V22 V21 24V 2 24V ...

Page 109: ...21 jinb80e1 h Operating Manual 1501 9 5 5 Recorder Load resistance 10k Accuracy of the analogue output Final value 10V 1 2 of the final value Offset 1 of the final value Fig 9 12 1 4 3 2 Analog Out1 GND GND Analog Out2 ...

Page 110: ...9 22 Technical Data jinb80e1 h Operating Manual 1501 9 6 Installation diagram of the control unit for rackinstallation Fig 9 13 Cut out of the switch cabinet for the installation of the control unit ...

Page 111: ...Technical Data 9 23 jinb80e1 h Operating Manual 1501 9 7 Commander mode Fig 9 14 Flow Chart ...

Page 112: ...9 24 Technical Data jinb80e1 h Operating Manual 1501 9 8 CE Certificate Fig 9 15 ...

Page 113: ...opped pump 0Hz using the power switch ON OFF of the leak detector Replace TMH incl TC 600 E11 TMP wrong pump resistance characteristics Controller detects wrong pump resistance characteristics Replace TMH incl TC 600 Contact INFICON Service E12 TMP motor control defective Defect in motor output stage or motor control unit Replace TMH incl TC 600 Contact INFICON Service W13 TMP unknown TMP error Er...

Page 114: ...fuses F3 F4 AD 24 A 5 6 V Fuse F3 interface board SSK defective E27 Monitoring voltage F3 F4 Voltage monitoring for fuses F3 F4 AD 24 A 7 8 V Fuse F4 interface board SSK defective W28 Real time clock has been reset Please enter date and time Real time clock has been reset Battery at MC68 is discharged or faulty MC68 has been replaced E29 24V supply for fans is defective Power supply unit for fans ...

Page 115: ...uppressor potential is lower than U 297 V Short circuit in suppressor line MSV is faulty High impedance short circuit in the ion collector E40 The anode potential exceeds the target value by more than 10 The actual anode potential exceeds its nominal value by 10 The nominal value can be displayed in the service menu in Info MSV is faulty MC 68 is defective E41 The anode potential falls below the t...

Page 116: ...via the service menu Both cathods are defective Replace the ion source Defective ion source plug MSV board is defective W49 Several specimens in succession are defective Execute reference measurement Leak test device detects several defective specimens in succession Check the setting for which number of pieces the error is reported Background signal has been increased very high Repeat the referenc...

Page 117: ...n Fore pump is faulty Valve V2 does not open because the speed rate of 6 Hz for TMh 071 is not exceeded Pressure measurement is incorrect E61 Emission failed Emission should be switched on MSV subassembly indicates a fault MENB emission current not within range Both cathods are defective Replace the ion source Connector of ion source is not plugged in MSV board is defective W62 Flow through capill...

Page 118: ... after the intake valve has been closed the leak test device goes back to the stand by mode Air penetration during the measuring mode Polluted valves W75 Maximum of evacuation time of 100 mbar was exceeded The pressure limit of 10 mbar was not reached within the set evacuation time Test sample has got a GROSS leak The evacuation time is incorrectly adapted to the sample volume W76 The maximum evac...

Page 119: ...ectrometer is dirty and insensitive The conditions for calibration have not been maintained W83 All EEPROM parameter are lost Please check your settings EEPROM on wiring backplane is empty and was initialized with default values All customer parameters must be re entered or redefined If the warning appears again when switching on the EEPROM cannot be written on the wiring level EEPROM on wiring le...

Page 120: ...t smaller than p_A Pressure in the sample drops below the value of p_A although only the test chamber was pumped Sample was leaky Adaptation sample was leaky Wrong setting for p_A W92 Evacuation of sample takes too long Time t1 as the set evacuation time t_A Valve V30 does not open Fore pump defective Test sample was leaky Wrong time setting for t_A Wrong setting for the evacuation pressure p_B W9...

Page 121: ...leak t_E ventilation time Wrong setting of pressure p_A which has to be reached within specified flooding time p_A atmospheric pressure W98 Leak rate not stable enough during the zero delay time When reaching Ultra the readiness for measuring will be enabled for the function I ZERO activated when a stable leak rate signal appeared during the zero delay time depending on the selected trigger False ...

Page 122: ...10 10 Error Messages and Warnings jinb80e1 h Operating Manual 1501 ...

Page 123: ...nstallation 551 101 Connecting cable to control panel 1 m 551 103 Connecting cable to control panel 5 m 551 102 Sniffer line SL200 140 05 Remote control RC1000WL remote control wireless RC1000C remote control non wireless Wireless transmitter for the operation of a further leak test device 551 015 551 010 551 020 Test chamber TC1000 551 005 Set of plugs 551 110 ...

Page 124: ...11 2 Ordering Information jinb80e1 h Operating Manual 1501 ...

Page 125: ...mmander Funktionen 6 21 Commander mode 5 4 Connector kit 3 7 Contamination protection 6 29 Contrast 6 16 Control PLC Inputs and Outputs 4 2 Control location 6 23 Control panel graphical 4 3 Control Unit 4 3 6 2 Control units 3 3 Cycle 9 5 D Data internal view 6 30 recorded 6 30 Date 6 26 Declaration of contamination 8 1 Device PIN change 6 31 Dimensions 9 1 E Error list view 6 30 Evacuate 6 6 Evac...

Page 126: ...ment Autotune 1 6 Measure 9 7 Measuring 6 7 Measuring time 5 3 Menu 1 7 6 4 Menu PIN change 6 31 Mode 6 16 Monitoring 6 28 O Open Device Tools 7 6 Operating fluid reservoir 7 5 7 7 Ordering Information 11 1 P Parameter Save Load 6 27 Part number 5 3 Partial flow 6 9 Partial Flow Mode 5 2 Partnumber 6 27 PIN 6 31 Pin Assignments 9 13 Pinpoint 6 17 PLC in 9 13 out 9 15 PLC inputs define 6 25 6 26 PL...

Page 127: ...e 6 17 standby 6 6 START 6 3 Status line 6 6 STOP 6 3 Suction capacity 5 1 6 22 9 1 Supplied equipment 3 6 T Technical Data 9 1 Test equipment 4 6 Test Log 6 31 Test sample 4 6 Time 6 26 time axis 6 15 Touch Display 6 4 Transient time CAL 6 27 Trigger 6 6 Turbo molecular Refer to turbo molecular pump Turbo molecular pump 3 1 U Units 6 17 V Vacuum diagram 6 30 Vacuum mode 5 1 Vacuum settings 6 20 V...

Page 128: ... 498 D 50968 Cologne Germany UNITED STATES TAIWAN JAPAN KOREA SINGAPORE GERMANY FRANCE UNITED KINGDOM HONG KONG Visit our website for contact information and other sales offices worldwide www inficon com Dokument jinb80en1 j 1501 ...

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