Inficon 550-300A, Operating Manual

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Technical Data
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9 Technical Data
9.1 Technical data of components
9.1.1 Power supply
9.1.2 Weight / dimensions
9.1.3 Characteristics
Mains voltage and frequencies 100 V…240 V, 50/60 Hz
Power consumption < 400 VA
Protective system - basic device IP20
Protective system - control panel IP40
Dimensions (L x W x H) 535 x 350 x 339 mm
Weight 30 kg
Noise level dB(A) < 70
Noise level dB(A) < 56
Noise level dB (A) 0.5 m distance < 56
Audio alarm dB(A) 90
Contamination level (to IEC 60664-1) 2
Overvoltage category (to IEC 60664-1) II
Mains connection line 3 m
Max. inlet pressure (Modul1000)
Max. inlet pressure (Modul1000b)
0.4 mbar
3.0 mbar
Minimum detectable Helium leak rates
in vacuum mode (ULTRA) < 5 × 10
-12
mbar l/s
Minimum detection limit in sniff mode < 5 × 10
-8
mbar l/s
Maximum allowed gas flow in the sniffer line 25 sccm
Maximum Helium leak rate which can be displayed
0.1
mbar l/s
Measurement range 12 decades
Maximum pumping speed (helium) at inlet
ULTRA mode 2.5 l/s
Time constant of leak rate signal (63% of the final value) < 1 s
Detectable masses
2, 3 and 4
Run-up time (after starting)
d
3 min.
Mass spectrometer 180° magn. Sector range
Ion source (2-cathodes) Iridium/Yttrium oxide
Inlet Port DN25 KF
Valves solenoid