Inficon 550-300A, Operating Manual

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5-5
Working Modes
jinb
80
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-h
Op
er
at
in
g
M
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(1
50
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5.4.1 Design of a leak detector system
Design of a leak detector system with Modul1000- - -Commander function is mainly
the same as that of the conventional integrated leak test system.
The vacuum chamber is evacuated by the Modul1000, optionally also in partial flow
mode (
Fig. 5-1 Partial flow mode ). The test sample in the vacuum chamber is
connected to the helium filling station through the chamber walls and is filled with
helium after the chamber has been evacuated.
Due to the difference between the helium pressure in the test sample and the
vacuum in the vacuum chamber, the helium of a leaky part flows out of the leak into
the vacuum chamber and into the leak test device where it can be measured as gas
leak.
Fig. 5-2 Leak detector system
Item Description Item Description
V30 Valve evacuation (test sample) 1 Vacuum chamber
V31 Flood valve (test sample) 2 Test sample
V32 Valve for helium recovery 3 Pressure gauge
V33 Filling valve (test sample) 4 Vacuum valve (test sample)
V34
Emergency valve (de-energized
open)
5 Fore-pump (Modul1000)