
Chapter
3
29
ML-7 Series/ML-9001A
3.2 Connections
•
Do not bundle twinax cables, head control connecting cables, and RF connecting cables with
other electric cables. Wrap the Guard Earth around them. (See the following figure.) Additionally,
be sure to connect the Guard Earth's grounding line (green) the Terminal Earth on the back of the
Head Unit. Electromagnetic noise from bundling the cables may cause malfunctions.
■
ML-7064A
Guard Earth
Twinax cable
Head control connecting cable
RF connecting cable
To the Head Unit
To the Control Unit
Head
Control Unit
Control Unit
RF Unit
(Head interface)
(Head interface)
(Coordinate data)
LD-PS
(Coordinate data)
LD Chamber Unit
Head ground cable
RF cable
LD cable
Head interface cable
Q switch
SW-PS
Coolant
filter
Chiller Unit
Computer
Hose (red/blue wires inside)
Head power cable
Chiller power cable
Chiller alarm cable
Hose (no wire)
OUT
OUT
CN4
CN1
CN2
USB
CN7
CN2
ANODE
CATHODE
CN4
CN3
CN1
CN1
I/F OUT
SCANNER
SCANNER
To Head
FG
FG
FG
RF-IN
RF-
OUT
USB
IN
IN
Twinax cable (*)
Summary of Contents for ML-7 Series
Page 4: ......
Page 8: ...4 ML 7 Series ML 9001A Contents...
Page 82: ...Chapter 4 78 ML 7 Series ML 9001A Chapter 4 Maintenance...
Page 83: ...Appendix...