ZEISS
9 Technical Data and Conformity | 9.2 Performance Data and Specifications | Sigma 500 and Sigma 500 VP
Parameter
Description
Analytical working
distance
8.5 mm
Specimen stage
Type:
5-axes motorized eucentric controlled via the SmartSEM user
interface or operated by a dual joystick control box
Mounting:
Drawer-type door
Movements:
§
§
Z = 50 mm
§
T = −4° to 70°
§
R = 360° continuous
INFO:
The movements may be reduced by specimen size, operating
conditions, and accessories attached.
Accessory ports:
Two accessory ports on the stage door are pro-
vided
Specimen weight:
Up to 0.5 kg
Specimen current monitor
with integrated
Touch Alarm
(audible
touch alarm warning with on-screen message)
Specimen mounts:
One carousel 9x specimen holder for 13 mm di-
ameter stubs included in base tool configuration, various specimen
holders available as option
Plasma cleaner
(optional)
Integrated plasma cleaner:
Chamber mounted plasma cleaner for
removal of hydrocarbon contamination from both specimen and
chamber; integrated software control for user defined cleaning cycles
without user interaction after starting the cleaning process
Vacuum Modes
§
High vacuum
§
Variable pressure (optional) 10–133 Pa
Detection System
Parameter
Description
InLens detectors
InLens SE detector:
High efficiency annular scintillator detector mounted in Gemini col-
umn with optically coupled photomultiplier.
InLensDuo detector
(optional):
Column-mounted scintillator detector and optically coupled photo-
multiplier with energy filtering grid adjustable from 0 V to −1.5 kV.
Enables two detection modes:
SE detection mode: high efficiency InLens SE detection with filtering
grid disabled.
BSE detection mode: high efficiency InLens detection of energy and
angle selective BSE using the energy filtering grid.
Simultaneous usage of the two detection modes is not possible. VP
range is limited to 50 Pa.
Chamber detectors
SE detector:
Everhart-Thornley SE detector with optically coupled photomultiplier;
collector bias adjustable from −250 to +400 V
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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