ZEISS
5 Commissioning and First Operating Steps | 5.6 Finding Appropriate Detector Settings
5.6.9 Setting up the Manually Insertable BSD Detector
This procedure applies to all manually insertable BSD detectors apart from the YAG BSD detector.
Procedure
1. Pull up the pin at the detector.
2. Carefully push in the detector while checking with the chamber scope camera to make sure
there is nothing in the way.
3. Release the pin.
4. In the
Detectors
tab of the
SEM Controls
panel, select the respective detector from the
Signal A
drop-down list.
5. Open the
Panel Configuration Bar
.
6. Double-click
BSD Control
to open the
BSD
Control
panel.
INFO:
The
BSD Control
panel allows you to
change the polarity of the segments, select BSD
modes and set the BSD gain.
7. Click a segment symbol to change its status between on (white), inverted (black), or off
(gray).
8. To select compositional mode, click
BSD: COMPO
.
9. To select topography mode, click
BSD: TOPO
.
10. Select the
BSD Gain
from the drop-down list.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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