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ZEISS
7 Troubleshooting |
7 Troubleshooting
The following table provides hints for solving common problems. If you cannot solve the problem
or if you are unsure about a certain technical difficulty, contact your local ZEISS service represen-
tative.
Symptom
Cause
Measure
Drift: Specimen seems to
be moving
§
Charging effects
§
Nonconductive specimen
§
Ensure proper conduction
of the specimen
§
Optimize specimen prepa-
ration
§
Apply a charge compensa-
tion method
Stub not correctly fixed by
screw.
Fix the stub correctly.
Gun is switched off auto-
matically
Gun has been switched off for
safety reasons since gun vac-
uum is worse than
2 × 10⁻⁸ mbar
Refer to
Image is bad at low EHT
(e.g. 1 kV)
Working distance is too long
Reduce the working distance
to a maximum of 7 mm
Image is noisy. Noise re-
duction methods do not
help
Field emission gun is used up
Contact your local ZEISS ser-
vice representative to have the
field emission gun replaced
Image quality degrades,
but there is no change in
total emission current
Field emission gun has been
damaged due to arcing
Contact your local ZEISS ser-
vice representative to have the
field emission gun replaced
InLens image is noisy
Working distance is too long
Reduce the working distance
to a maximum of 7 mm
No InLens image
Reduce the EHT to a maximum
of 20 kV
Microscope is dead
Circuit breaker is tripped
(lower position)
Check the circuit breakers
Refer to
Stored position of the
specimen stage cannot be
approached correctly
Stage needs to be driven to a
well-defined position
Refer to
After a power failure, the
stored stage position can-
not be approached cor-
rectly
Stage needs to be initialized
Refer to
Scintillator is used up
Contact your local ZEISS ser-
vice representative to have the
scintillator replaced
Specimen current is low
Field emission gun is used up
Contact your local ZEISS ser-
vice representative to have the
field emission gun replaced
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
133