ZEISS
3 Product and Functional Description | 3.3 Optional Components and Accessories
3.3.1.5 SCD Detector
Purpose
The specimen current detector (SCD) detects the current absorbed in the specimen.
Function
A highly sensitive amplifier is connected to the sample, measuring the sum of incoming PEs and
outgoing SEs and BSEs for each image pixel.
Fig. 57: Silicon chip
3.3.1.6 CL Detector
Purpose
The Cathodoluminescence (CL) detector is an inclined detector that allows efficient visible or ultra-
violet light collection. The CL detector is ideal for use in geology, mineralogy, and materials sci-
ence applications where it can help in internal structural examination of rocks, ceramics, and
semiconductors.
1
2
3
4
5
Fig. 58: Schematics of the
1
Preamplifier
2
Photomultiplier
3
Objective lens
4
Light guide with collector electrode
5
Specimen
Function
The prerequisite for using this detector is that the specimen emits light when interacting with the
primary electron beam. Differences in crystal structure or the presence of impurities in a cathodo-
luminescent material result in variations in the energy gap between the filled valence bands and
the empty conduction bands, and consequently a change in the CL emission.
The light (photons) emitted by the specimen is collected by the CL detector and converted into a
signal for imaging.
The CL detector is fully integrated into the automatic brightness and contrast control of the micro-
scope and can be used simultaneously with any of the detectors without degrading their perfor-
mance.
The detector can be used during energy-dispersive X-ray spectrometer (EDS) measurements and
wavelength-dispersive spectrometer (WDS) measurements at any valid magnification.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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