3 Product and Functional Description | 3.2 Main Components
ZEISS
CAUTION
Closing the chamber door
Fingers can be pinched when closing the chamber door.
4
Use the door handle to close the chamber door.
4
Ensure not to get your fingers caught in the chamber door gap.
Purpose
The 5-axes motorized Cartesian specimen stage is used to navigate the specimen inside the speci-
men chamber.
Position
The specimen stage is mounted on the chamber door. If the chamber door is closed, the speci-
men stage is inside of the specimen chamber.
2
1
1
2
Fig. 40: Specimen stage with dovetail fitting for precise fitting
1
Specimen holder
2
Specimen stage
Function
The stage can be operated using the dual joystick or using the SmartSEM software.
Axis
Description
Movement
X-axis
Movement towards or away from the cham-
ber door (horizontal movement in the image)
Y-axis
Movement to the left or right seen from the
chamber door (horizontal movement in the
image)
Height
Vertical movement (movement towards or
away from the focal plane of the image)
Rotation
Stage rotation parallel to the X-Y plane
Tilt
Stage tilt about an axis parallel to the X axis
The focus on the stage is not maintained when the specimen is tilted. This can be compensated
for by using the
Compucentric
function in SmartSEM.
54
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
