ZEISS
5 Commissioning and First Operating Steps | 5.4 Acquiring an Image
7. Deactivate the
Focus Wobble
checkbox.
8. Refocus the image.
5.4.7.5 Selecting the Scan Speed
Procedure
1. In the
Toolbar
, from the
Faster/Slower
drop-down list, select
Scan Speed = 7
.
Alternatively, in the SEM Controls panel, select the Scanning tab, and from the
Scan Speed
drop-down list, select
Scan Speed = 7
.
à
The scan speed is set to
Scan Speed = 7
.
2. Bring the image into focus.
3. Toggle between Coarse and Fine mode in the
Status Bar
, as appropriate.
5.4.7.6 Correcting Astigmatism
Procedure
1. Ensure that the
Reduced Raster
function is active.
2. Select a detail (e.g. a mark or an edge) on the specimen surface.
Ensure that the selected detail is in the raster. You can move the stage or shift the beam for
this purpose.
3. In the SEM Controls panel, select the Apertures tab.
4. Click Stigmation.
5. In the
Stigmation
navigation box, use the
scroll bars or the red marker to obtain the
sharpest possible image.
INFO:
The specimen detail should just be pul-
sating without shifting.
INFO:
To obtain optimum results, alternately
correct focus and astigmatism.
6. To deactivate the reduced raster, in the
Toolbar
, click the REDUCE icon.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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