3 Product and Functional Description | 3.4 Software Description
ZEISS
User Privilege
Description
Gun Align
Enables the user to modify the alignment of the electron beam.
Gun Off
Enables the user to switch off the field emission filament.
Stage Initialise
Enables the user to initialize the motorized stage.
Supervisor
Enables the user to perform the following actions:
§
Start the Administrator, create and edit users
§
§
Modify the filament current
§
Set up, edit, and delete global stage coordinates
§
Save common macros and toolbars
§
Save common recipes
§
Activate
Partial Vent on Standby
,
Z Move on vent
,
Protect Z
,
Go to HV@Shutdown
,
EHT Off & Log Off
, and
Leave Gun
ON at Shutdown
.
§
Use the bakeout function
Vent
Enables the user to vent the specimen chamber.
3.4.4 SmartSEM Program Suite
The SmartSEM Program Suite comprises the EM server, which implements the internal communi-
cation between control software and microscope hardware, plus several programs and utilities.
The main purpose of the SmartSEM Program Suite is to access all necessary microscopy parame-
ters and software features to capture SEM data and optimize image acquisition.
Access:
Windows start menu > SmartSEM
Program
Description
ChamberScope
Enables you to display the chamberscope image and the detector im-
age at the same time.
Option, requires particular hardware.
OptiProbe Calibra-
tion
Calibration of OptiProbe after cathode replacement or realigning of
the electron optical column
ReadMe
Contains important information on the currently installed version.
Release Notes
Contains an overview of all SmartSEM versions including new devel-
opments and specific details.
RemCon32
Serial interface for remote operation via RS232, e.g. for EDX
License: REMCON
SampleHolder-
Gallery
Enables you to inspect the dimensions of all possible specimen holders
as well as to set the dimensions of the custom specimen holders.
Enables you to activate the available specimen holders for SmartSEM.
SEM Drift Correc-
tion
Enables you to compensate for the drift of the specimen by using a
reference image and by controlling the beam shift.
License: DRIFT-CORR
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006