Zeiss SIGMA Series, Инструкция по эксплуатации

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7 Troubleshooting | 7.2 Column ZEISS
Procedure
1. Carefully open the chamber door.
2. On the inside of the chamber door, remove the chamber door O-ring.
NOTICE If you use a metal tool to remove the O-ring, then you may damage the
sealing surface. If necessary, then only use a plastic or wooden tool to remove
the O-ring.
3. Inspect the groove that holds the O-ring and remove any contamination.
4. Insert the new chamber door O-ring.
5. Close the chamber door.
7.2 Column
7.2.1 Baking out the Gun Head
The gun vacuum deteriorates with time. It is possible to perform a bake-out operation as a regular
maintenance procedure to restore the vacuum.
The procedure consists of the following steps:
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Switching off the Gun [
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Starting the Bakeout [
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Switching on the Gun [
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7.2.1.1 Switching off the Gun
NOTICE
Schottky field emitter
If the Schottky field emitter is switched on and off too frequently or inappropriately, its lifetime
is reduced.
4
Avoid switching off the gun during the working week.
4
Use Standby mode for the weekend or a break of up to a week.
4
When using the Standby mode, activate the Partial Vent on Standby function.
138 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006