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Alcatel Vacuum Technology France - ATH 200 User’s Manual
Description
GB 04350 - Edition 02 - Dec 11
Internal equipment of
the A100L pumps
The A100L pumps include a cooling circuit (water circuit).
The A100L are designed for clean applications such as load lock
pumping, cryopump regeneration and backing of turbopumps on non-
corrosive processes.
Cooling circuit (principle
schematic)
Water inlet
Water outlet
Anti-suckback valve
Inlet
Exhaust
Electrical cabinet
Motor
Functional
block
Frequency
converter
Energy saving option
The A100L includes an optional Energy Saving system, featuring up to
50% power consumption reduction.
Fully integrated into the pump, the Energy Saving option is automatically
self-activated, providing the maximum Energy Saving depending on
pump operating conditions, without any external control required.
0
Power consumption
at ultimate pressure
Time
Without ES option
With ES option
50 %
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions
