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GB 04376 - Edition 03 - Dec.11

1/2

M

ANUAL

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/

N

:

119404

E

DITION

:

03 - December 2011

General contents

A100L Operating instructions

English original version

Chapter A

INTRODUCTION

A 10  Operating principle
A 20  Description
A 30  Monitoring system

A 40 Technical characteristics
A 50 Accessories

Chapter B

START UP

B 00  Safety instructions
B 10  Unpacking / Handling / Storage
B 20  Positioning the pump in the pumping installation
B 30  Connection to the cooling circuit
B 35   Inlet CDA or Nitrogen connection
B 40  Electrical connection
B 50  Connection to the pumping circuit
B 60  Remote control plug connection (dry contacts / 16 pin plug)
B 61  Remote control plug connection (dry contacts / 19 pin plug)
B 70  Anti earthquake square installation (accessory)

Chapter C

OPERATION

C 10  Operating modes
C 20  Starting mode definition «Autostart»
C 21  Starting mode definition «Remote control (dry contacts / 16 or 19 pin plug)»
C 30  Monitoring system parameters
C 40  Semiconductor process compatibilities

Chapter D

TROUBLESHOOTING

D 00  Safety instruction related to maintenance
D 10  Pump operating status information
D 20  Diagnosis and troubleshooting

Chapter E

MAINTENANCE INSTRUCTIONS

E 10  Standard exchange repair
E 12  Draining of the water cooling circuit
E 14  Disconnecting the pump from the installation
E 15  Shipping procedure

Chapter F

MAINTENANCE COMPONENTS

F 00 Spare parts - Instruction of use
F 10 First level of spare parts

Chapter G

APPENDIX

G 100 Declaration of conformity
G 120 Electrical schematic
G 200 Safety questionnaire

RS 232 / RS 485 Network interface

adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Содержание A100L31324

Страница 1: ...Operating instructions Operating instructions Original Original Betrieb Betrieb A100L Dry Pumps EN EN...

Страница 2: ...equipment we recommend that you study this manual before any intervention on your pump in particular the chapter on installation and start up This pumping component is designed to gererate vacuum by...

Страница 3: ...n Vacuum Products Specifications and information are subject to change without notice by adixen Vacuum Products Symbol Label Description Warning high temperature hazard Warning electrical shock hazard...

Страница 4: ...ke square installation accessory Chapter C OPERATION C 10 Operating modes C 20 Starting mode definition Autostart C 21 Starting mode definition Remote control dry contacts 16 or 19 pin plug C 30 Monit...

Страница 5: ...injury It may also be used to alert against unsafe practices Indicates a potentially hazardous situation which if not avoided could result in death or severe injury Indicates an imminently hazardous s...

Страница 6: ...L pumps A 30 Monitoring system Description Characteristics Main functions A 40 Technical characteristics A100L dimensions and interfacing Gravity center and weight distribution A100L stacking dimensio...

Страница 7: ...es The two rotors rotate without touching each other Exhaust Inlet High pressure stage exhaust stage Stage 4 Transfer stage Stage 3 Transfer stage Stage 2 Transfer stage Stage 1 Low pressure stage inl...

Страница 8: ...tlet quick connect Inlet CDA or Nitrogen connection Energy Saving option Exhaust and inlet flanges to connect the pump to the pumping circuit The control interface located at the rear panel A remote c...

Страница 9: ...ter inlet Water outlet Anti suckback valve Inlet Exhaust Electrical cabinet Motor Functional block Frequency converter Energy saving option The A100L includes an optional Energy Saving system featurin...

Страница 10: ...cabinet is located at the top of the machine It ensures the pump automatic operation and controls all sensors It is linked to the light indicators operating time meter electrical cabinet and motor G 1...

Страница 11: ...ure dbA dbA 55 58 52 55 Typical vibration level at inlet flange 10 1000 Hz G mm s 1 m 0 10 1 1 5 Water flow l h min 100 Water temperature C min 10 max 25 Gear box fluid capacity 2 cm3 150 Weight Kg Lb...

Страница 12: ...ction Outlet Water Connection Exhaust NW25 Inlet NW50 2xM10 Wheel Inlet C D A or N Connection ES option 14 65 190 5 2xM10 230 25 420 4 x 3 2 85 605 50 NW25 21 39 65 14 24 280 208 5 73 5 300 53 30 14 7...

Страница 13: ...Gravity center and weight distribution WEIGHT Kg Lb CG X mm inch CG Y CG Z FOOT DISTRIBUTION WEIGHT Kg Lb 1 2 3 4 103 227 135 5 31 325 12 79 152 5 98 22 48 5 24 52 91 29 63 93 28 61 73 A100L CG and We...

Страница 14: ...chnology France ATH 200 User s Manual Technical characteristics GB 04352 Edition 03 Nov 11 A100L stackIing dimensions and interfacing 23 2 2 11 23 7 2 9 11 20 1 14 8 adixen Vacuum Products A100L Dry P...

Страница 15: ...0L Stacking Center of Gravity and Weight Distribution WEIGHT Kg Lb CG X mm inch CG Y CG Z FOOT DISTRIBUTION WEIGHT Kg Lb 1 2 3 4 206 454 135 5 3 325 12 8 302 11 9 44 97 48 105 8 58 127 9 56 123 4 mm i...

Страница 16: ...23 140 70 280 73 23 348 426 34 1 1 24 23 11 9 23 2 0 31 23 6 5 5 2 7 11 2 9 0 9 13 7 16 8 1 3 0 4 0 9 0 9 MAXIMUM LOADS ON GROUND SEISMIC FIXATIONS SEMI S2 0200 Section 19 Newton 1 2 3 4 1 x A100 X 6...

Страница 17: ...intented to switch off the pump power It also has one relay contact 1 normally open for external use Description P N Emergency stop 107849 32 L1 L2 L3 43 31 T1 T2 T3 44 1 2 3 4 1 2 3 4 206430 1 AMP 2...

Страница 18: ...ine in case of cycle pumping at atmospheric pressure Description P N Anti noise device DN25 110868 RS232 RS485 Network interface This interface can be used to control the pump and communicate with the...

Страница 19: ...en connection ES option B 40 Electrical connection Protective earth connection Process tool electrical protection High voltage electrical connection B 50 Connection to the pumping circuit Preliminary...

Страница 20: ...rference use shielded cables and connections on interfaces Ensure that the product is connected to an electrical installation in compliance with the local and national safety requirements equipped wit...

Страница 21: ...ation to avoid any possible risk of trips Electric shock hazard Some components have capacitors charged to over 60VDC When power is switched off they keep their charge for a time Residual voltages fro...

Страница 22: ...recommendations to prevent injury Consult the responsible department for instructions and safety information Hazardous gases through the pump can cause serious injury or death It s mandatory by regula...

Страница 23: ...ntentional flow or liquid gas or solids exist an additional hardwired stop circuit is required to remove input power It is never required to override this interlock during installation use or maintena...

Страница 24: ...the pump before any intervention or to properly lock out and tag out the equipment breaker before any intervention on the pump Located on the upper cover this label informs the user that moving parts...

Страница 25: ...s indicate the location of the fixing holes of the anti earthquake square accessories Located on the upper cover this label indicates the weight of the pump Pump operating status information For more...

Страница 26: ...29 to 87 psig 2 6 bars relative pressure Min pressure differential inlet outlet 29 psi min 2 bar Water temperature 10 to 25 C Connection inlet type outlet type material 1 4 NPT female connector 1 4 N...

Страница 27: ...e Max Pressure 0 to 7 bar absolute 0 to 101 psi 2 bar 7 bar absolute 15 87 psig Consumption 30 slm min Connection 1 8 Swagelock Compressed dry air or N2 specifications N2 78 09 O2 20 93 H2 0 01 2 2 B...

Страница 28: ...eets EEC safety regulations topple angle 10 it is advisable to guard against the risk of tilting during handling installation and use Refer to chapter A of the operating instruction manual for locatio...

Страница 29: ...washer Hoist Hook Sling Shackle Unit Weight A100L Kg 100 lbs 220 Prepare the pump Lower the pump on the wheels To prevent humidity from entering the pump during transport the unit has been pressurized...

Страница 30: ...e handle from its support under the frame as follows Pull the handle along the frame rail up 1 to remove it 1 1 Install the handle on the upper part of the front panel as follows Pull manually the spr...

Страница 31: ...nt at an ambient temperature between 10 C and 60 C for a period of 1 year maximum If the inlet and exhaust blanking plates have been removed there is a risk of internal part corrosion We advise to pre...

Страница 32: ...y of the mechanical connections such as the pump fittings As these pumps are typically used in a corrosive atmosphere their reliability will depend on proper installation and maintenance When assembli...

Страница 33: ...ce the product on a tilted surfaces it can drag the operator along due to its heavy weight use castors to move it on short distances locate it on flat hard ground do not push it sideways adjust the le...

Страница 34: ...per pump screw jacks are positioned in the four provided bases located on the lower pump cover Lock the upper pump by adjusting these jacks so that all four feet are resting solidly on the lower pump...

Страница 35: ...If the solid particle size and solid pollution water characteristics values can not be reached install a filter on the cooling connection Risk of water leak In case of water fitting leak or water lin...

Страница 36: ...nect connectors see F10 Water inlet marked IN 1 4 inch NPT quick female connector Water outlet marked OUT 1 4 inch NPT quick male connector Separately packaged Pump 1 4 NPT quick female connector 1 4...

Страница 37: ...absolute 0 to 101 psi Min pressure 2 bar 7 bar absolute 15 87 psig Connection Connect the gas line on the N2 CDA connector Rear panel Swagelok for tube 6 35 mm Smooth pipe external diameter 6 35 mm Cu...

Страница 38: ...roduct or removing the cover This main isolator has an interrupting short circuit current of 10kA Take care items located between the mains connection and the isolator are still under mains voltage di...

Страница 39: ...ircuit current of 10kA This protection device must be in close proximity to the pump no further than 7m 25 ft easily accessible by an operator within line of sight of the pump Besides mark it visibly...

Страница 40: ...ice because it is designed for use on process tools and integration with the process tool EMO The pump must be protected by an EMO provided by the user equipment host tool located in a non hazardous a...

Страница 41: ...mm2 wires Connect the green lead to the ground on the plug Connect the other 3 leads to the 3 phases U V and W The pump will automatically correct with autophase correction fixture Main power plug at...

Страница 42: ...ated in your system Connection Exhaust connection DN 25 ISO KF At the pump inlet Make sure that the parts or chambers connected to the inlet of our products can withstand a negative pressure of 1 bar...

Страница 43: ...ctions Monitor pump warnings and hazards on the remote control plug These contacts can be monitored or used by a system external to the pump Remote control connector location The remote control connec...

Страница 44: ...lve interlock feedback Pump On Off common Pump On Off control signal Pump running feedback signal Pump running common Pump warning signal Pump warning common Pump alarm signal hazard Pump alarm common...

Страница 45: ...ug Pump working conditions with main power on Pump status Remote control plug 3 4 7 8 9 10 11 12 13 14 Pump running Close Close Close Close Close Pump stopped Open Close Close Close Open Pump running...

Страница 46: ...on allows Control of pumping functions START STOP and variable rotation speed Remote monitoring of pump status through auxiliary dry contacts 50 V DC 1 A These contacts can be used to control automati...

Страница 47: ...stomer s connection Final valve interlock feedback Pump On Off common Pump On Off control signal Pump running feedback signal Pump running common Pump warning signal Pump warning common Pump alarm sig...

Страница 48: ...with main power on Pump status Remote control plug C D E F G H J K L M N P Q R Pump running Close Close Close Close Close Close Close Pump stopped Open Close Close Close Close Open Close Pump running...

Страница 49: ...ly by the customer Pump anchorage According to the earthquake standards the pump or stacked pumps must be fixed with the ground The manufacturer proposes four anti earthquake squares Accessories A 50...

Страница 50: ...ontrol mode Selection of the pump control mode Selection of the pump starting mode C 20 Starting mode definition Autostart Pump start up Pumping shut down C 21 Starting mode definition Remote control...

Страница 51: ...remote controlled by the opening or closing of different dry contacts wired on remote control connector B 60 or B 61 Selection of the pump control mode The selection of the pump control mode local or...

Страница 52: ...l safety of this product are guaranteed provided it is used normally in the operating conditions defined in this operating instruction manual It is the customer s task to train operators to use the pr...

Страница 53: ...mp is ready The performance and operational safety of this product are guaranteed provided it is used normally in the operating conditions defined in this operating instruction manual It is the custom...

Страница 54: ...e voltage on the remote control connector B 60 or B 61 The following operation will perform automatically Pump stops When the stop is caused by a failure of power restart is automatic after power retu...

Страница 55: ...of the sensors Sensor Function Warning water temperature Indicates to the user that a temperature warning is present Hazard motor temperature The pump is stopped immediately when the hazard threshold...

Страница 56: ...mp overhaul D 10 Pump operating status information Operation monitoring Maintenance operations D 20 Diagnosis and troubleshooting Pump does not start and light indicators are not lit up Pump does not...

Страница 57: ...nce must be performed by a skilled maintenance operator trained in the relevant health and safety aspects EMC electrical hazards chemical pollution etc Electric shock hazard on touching When the main...

Страница 58: ...waste electrical and electronic equipment Any obligation of the manufacturer to take back such equipment shall apply only to complete not amended or modified equipment using Adixen original spare par...

Страница 59: ...on pump is running and no problems Yellow and green on warning Red on hazard Pumping is stopped when an hazard threshold is reached The fault contacts on the remote control connector at the rear of th...

Страница 60: ...rom 380 460 VAC high voltage 200 208 VAC low voltage Check the voltage of the installation Other problem Call the customer service center Pump does not start and light indicators are not lit up INCIDE...

Страница 61: ...e LOC REM switch The LOC REM switch is in local mode position Place the switch in remote mode C 10 Voltage sent between pin 1 and 2 of the J4 connector is 15 to 24 VDC Check that the voltage between t...

Страница 62: ...ts E E 11 Safety instructions for pump releocation E 12 Draining of the water cooling circuit Draining E 14 Disconnecting the pump from the installation Turning off the pump Disconnecting the faciliti...

Страница 63: ...on against corrosive gases Maintenance must be performed by a skilled maintenance operator trained in the relevant health and safety aspects EMC electrical hazards chemical pollution etc Isolate the p...

Страница 64: ...le connector Disconnect IN and OUT water quick connect connectors on the pump Connect pipe A at location of IN and connect the other end to a compressed air circuit 2 to 5 bars Connect pipe B on the p...

Страница 65: ...pump B 40 Disconnecting the facilities Disconnect the remote control connector dry contacts 16 or 19 pin plug Disconnect the water inlet and outlet quick connectors Disconnect the pump from the inlet...

Страница 66: ...with the connecting accessories provided Disconnect the nitrogen supply Fill the safety questionnaire G 200 and join it with the pump Located on the upper cover this label warns the user against possi...

Страница 67: ...dition 02 Dec 11 1 1 Maintenance components A100L Operating instructions Detailed contents F F 00 Spare parts Instruction of use Replacement of parts and use of non genuine parts F 10 First level of s...

Страница 68: ...enuine jeopardizes the initial safety conditions of the equipment In such cases the EC declaration of conformity becomes null The manufacturer withdraws responsibility for such operations Besides coun...

Страница 69: ...ick connect clamp DN 20 25 Outlet blank off flange 1 1 1 1 1 1 1 Injector 1 106859 High voltage power cable L 2 5m 1 A331224 Low voltage power cable L 2 5m 1 A328840 Female quick connector 1 4 NPT S S...

Страница 70: ...GB 04379 Edition 03 Dec 11 1 1 Appendix A100L Operating instructions Detailed contents G G 100 Declaration of conformity G 120 Electrical schematic G 200 Safety questionnaire...

Страница 71: ...GB 04372 Edition 02 Feb 02 1 1 G 100 Alcatel Vacuum Technology France ATH 200 User s Manual adixen Vacuum Products A100L Dry Pump Operating Instructions...

Страница 72: ...1 3 G 120 Alcatel Vacuum Technology France ATH 200 User s Manual Electrical schematic General electrical schematic A100L Low voltage see section B61 see section B60 adixen Vacuum Products A100L Dry P...

Страница 73: ...chnology France ATH 200 User s Manual Electrical schematic GB 04370 Edition 03 Dec 11 General electrical schematic A100L High voltage see section B60 see section B61 adixen Vacuum Products A100L Dry P...

Страница 74: ...120 Alcatel Vacuum Technology France ATH 200 User s Manual Electrical schematic General electrical schematic A100L Eco Saving Low voltage see section B61 see section B60 adixen Vacuum Products A100L...

Страница 75: ...taminate and recycle such material without risk to the safety of our staff Please contact us before sending the product to the Service center Radioactive In case of contamination our Service Center is...

Страница 76: ...o Combustible Combustible Oui Yes Yes on No No No Corrosive Corrosive Oui s Yes Non on No Explosive Explosive ui Oui Y Yes Non Non No Biologique Biologica Biological Ou Oui Yes Y Non N No Radioactive...

Страница 77: ...RS 232 RS 485 Network interface for A100 A180L dry pumps OPTION ACCESSORY adixen Vacuum Products A100L Dry Pump Operating Instructions...

Страница 78: ...ce installation B 95 RS 232 RS 485 link wiring Chapter C OPERATION C 55 Use of the RS 232 serial link According to the product configuration this fonctionality could be in option or accessory availabl...

Страница 79: ...he network blank off plate Connect the pump interface supply cable plug on the RS 232 RS 485 Network interface connector Insert this connector interface instead of the network blank off plate 3 Tighte...

Страница 80: ...al link connected with network communication application The syntax of commands and messages is dealt with in a separate chapter C 55 Study the preliminary precautions B 00 Presentation The RS 232 RS...

Страница 81: ...serial link with a single monitoring system 6 7 8 9 2 3 4 5 1 6 7 8 9 2 3 4 5 1 Monitoring RS 485 serial link 8 9 8 9 8 9 RS 485 interface box 1 2 ON 1 2 ON 1 2 ON Parallel type connection communicat...

Страница 82: ...meter see list see list Heading character Message and character ASCII code 13 The character LF is not taken account by the unit R e s p o n s e The response Example of dialog E 000SYSON CR R 000OK CR...

Страница 83: ...endable Customer Friendly Customer Friendly You are looking for a You are looking for a perfect vacuum solution perfect vacuum solution Please contact us Please contact us Pfeiffer Vacuum Products Gmb...

Страница 84: ...Operating instructions Operating instructions Original Original Betrieb Betrieb A100L Dry Pumps EN EN...

Страница 85: ...software edition zz 25 Carriage return LEV None Returns the state of the parameters defined by SET Example adr A001 A002 B001 B002 C001 C002 D001 D002 E001 E002 F001 F002 G000 H0000 I0000 K0000 L0000...

Страница 86: ...STA None Returns the status of the internal dynamic parameters for RS232 and RS485 Example adr ABCDEFGHIJK L123 M123 N12 O12 P12 Q123 R1 abcdefghijklmnopqrstu S123 CR 0 Header 1 3 Address 000 to 9999...

Страница 87: ...Separator character 47 Reserved 0 OK 48 Reserved 0 OK 49 Reserved 0 OK 50 Reserved 0 OK 51 Reserved 0 OK 52 Reserved 0 OK 53 Frequency control defect 0 OK 2 hazard 54 Reserved 0 OK 55 Reserved 0 OK 5...

Страница 88: ...1 Full overhaul 02 Reserved 03 Reserved 04 Reserved 05 Reserved 06 Reserved YYYY Time value x 100h TPS None Returns the time of maintenance Example adr A1234 B1234 C1234 D1234 E1234 F1234 G1234 CR 0 H...

Страница 89: ...endable Customer Friendly Customer Friendly You are looking for a You are looking for a perfect vacuum solution perfect vacuum solution Please contact us Please contact us Pfeiffer Vacuum Products Gmb...

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