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Vacuum Technology France - ATH 200 User’s Manual
Safety instructions
GB 04354 - Edition 03 - Dec 11
As loss of cooling water creates a significant risk, then the water flow
must be monitored externally by the process equipment.
Lock out/tag out (LO/TO) water and N2 supplies (on ES option).
The end user needs to provide a dedicated source of water and
Nitrogen/CDA equipped with a manual valves that can be locked out
within 10 feet of the tool.
Electric shock hazard on touching.
When the main isolator is switched to the «0» position, items located
between the mains connection and the isolator are still under mains
voltage. Disconnect the mains cable from all power sources before
commencing any maintenance work on the product.
Hazardous voltage enclosed.
Voltage or current hazard sufficient to cause shock. Disconnect and
lockout power before servicing. Any intervention must be done by trained
personnel only.
Risk of trips.
Route and secure cables, hoses and pipework during installation to avoid
any possible risk of trips.
Electric shock hazard.
Some components have capacitors charged to over 60VDC. When power
is switched off, they keep their charge for a time. Residual voltages from
the filter capacitors can cause electric shocks all the way back to the mains
plug. Wait 5 minutes after power-off before commencing any work on the
product.
Lock out/tag out (LO/TO) electrical device.
In order to properly secure the pump for installation and/or maintenance, it
is required to lock out/tag out the pump properly in accordance with OSHA
requirement 29 CFR.1910.147.
General (continued)
Emergency button
This pump is not equipped with an EMO device because it is designed
for use on process tools and integration with the process tool EMO.
The pump must be protected by an EMO provided by the user equipment/
host tool, located in a non hazardous area and within 3 m (10 ft) of the
pump.
If the pump is not installed on process tool (Remote location), or if the
pump is powered by an external source, EMO accessory is required for
safe operation (refer to A50). In this case, the EMO must be integrated with
process tool.
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions
