GB 03636 - Edition 03 - Dec 11
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Alcatel Vacuum Technology France - ATH 200 User’s Manual
Safety instructions for pump relocation
- Wear gloves, protective glasses, breathing mask or any appropriated
safety equipment.
- Ventilate the premises well.
- Do not eliminate maintenance waste via standard disposal channels. Have
it destroyed by a qualified company if necessary.
- Install the inlet and exhaust blanking plates, thus delivered with
the pump.
During pump removal, operator could be in contact with process residues
on the exhaust which could cause severe injury or death. Ask your safety
department for instructions according to the local regulations.
Chemical supplies coming from the tool, as well as the water and the
nitrogen need also to be locked out / tagged out.
Users are advised:
Protection against
corrosive gases
Maintenance must be performed by a skilled maintenance operator trained
in the relevant health and safety aspects (EMC, electrical hazards, chemical
pollution, etc.).
Isolate the product from all energy sources (mains electricity, compressed air,
water, gas, etc.) before starting work.
Continue by Draining of the water cooling circuit
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Remaining process gases in the pump may cause severe injury or death.
Before removing the pump, continue N2 flow from the process tool for
30
min. Nitrogen pressure and flow rate should be identical to the
programmed values during process.
These safety instructions regarding corrosive gases normally aren’t applicable
for loadlock pumping system. But, in case of accidental presence of corrosive
gases, users are advised to observe the following precautions during any
maintenance operation and, more especially, any operations requiring the
disassembly of sub-assemblies.
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions
