114
CHAPTER 5:
Advanced Operation
Model CRX-6.5K Probe Station
6. Supporting the bellows in one hand, carefully pull the probe arm out, guiding the
arm shield braids so they do not get stuck on the arm port (FIGURE 5-10).
7. Slide the stage back, and use the 3 mm hex driver to secure the stage to its hold-
ing location with two M4 screws (FIGURE 5-11). This is an optional step, and is
given to provide you with a convenient work space.
8. If another arm is not to be installed in this location, install a blank over the arm
port. Do not leave the chamber open to atmosphere.
5.3.3 Removing a Probe
Arm and Base
This procedure assumes that you have removed the micro-manipulated stage and
secured the stage to its holding location as directed in section 5.3.2. Follow this pro-
cedure to remove a probe arm and base.
1. Using a 3 mm hex driver, loosen and remove the four long M4 horizontal screws
that attach the bellows to the z-axis stage (FIGURE 5-12).
2. Grasp the square end flange of the bellows, and with a twisting motion, work the
bellows end flange off the probe arm base. This should be done slowly and with a
great deal of control.
3. Compress the bellows to make room to slide it carefully off the probe arm. When
you reach the end of the probe arm, you will need to tilt it up to remove it from
the probe arm (FIGURE 5-12). Place the bellows on a clean, lint-free cloth or wipe.
FIGURE 5-10
Left: Removing four screws from the stage base; Middle: Detaching the bellows from the chamber;
Right: Carefully remove probe arm, cables and thermal anchor from the chamber
FIGURE 5-11
Secure the micro-manipulated stage to
its holding location
Содержание CRX-6.5K
Страница 4: ...Model CRX 6 5K Probe Station ...
Страница 52: ...42 CHAPTER 2 System Overview Model CRX 6 5K Probe Station ...
Страница 92: ...82 CHAPTER 3 Installation and Setup Model CRX 6 5K Probe Station ...
Страница 162: ...152 CHAPTER 6 Maintenance and Troubleshooting Model CRX 6 5K Probe Station ...
Страница 166: ...156 INDEX Model CRX 6 5K Probe Station ...