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CHAPTER 4:
Basic Operation
Model CRX-6.5K Probe Station
4.2 Operating the
Probe Arm
Translation Stages
Each probe assembly includes a micro-manipulated translation stage with three axes
of motion that are described in this section. All six available probes can be positioned
in a 25 mm (1 in) diameter probe area in the center of the sample holder
(FIGURE 4-1). The Model CRX-6.5K can accommodate 32 mm (1.25) and 51 mm (2 in)
sample holders, but the probe area is the same for both sizes. Individual probes can
land outside the probe area in line with the probe arm. Due to translation limitations,
individual probes cannot be landed on either side of the defined probe area. The
sample should be positioned and aligned on the sample holder to take best
advantage of the probe area (see section 4.3.3.1 for alignment).
Before evacuating the vacuum chamber or making significant temperature changes, use
the z-axis micrometers to raise all probes up 3 mm to 4 mm above the sample. Failure to
do so will potentially cause damage to the probe tip or scratch the sample surface.
Normal motion of the translation stages remains smooth with constant turning force
throughout the usable range. It is normal, however, for additional tension to occur
when the system is under vacuum as compared to when it is open. Restrictions in
motion are normally caused by the stage coming to the end of its travel. Restriction
can sometimes also be caused by interference inside the chamber. In either case,
never force one of the controls or damage to the probe or sample cooling assembly
may result. Instead, remove the vacuum chamber lid and radiation shield
(section 4.3.1), and identify the restriction before proceeding.
The probe arm translation stage has a greater range of motion than is accommodated by
the Model CRX-6.5K sample stage and radiation stage. When moving the probe beyond
the sample holder, take precautions to ensure nothing interferes with the probe, or you
may risk damaging the probe tip.
The following translation stage controls are used to position the probe. Please note
that these instructions apply only to stages like the one pictured in FIGURE 4-2. Other
probe station models will operate differently.
The
x-axis
hand dial is used to move the probe in and out (in the probe arm axis) with a
total travel of 51 mm (2 in). Turning the hand dial clockwise moves the probe toward
the sample. The graduated scale on the side of the stage shows 1 mm divisions. The
graduated scale on the hand dial shows 0.02 mm divisions.
The
y-axis
micrometer is used to move the probe from side to side (along the plane of
the sample perpendicular to the probe axis) with a total travel of 25 mm (1 in).
Turning the micrometer clockwise moves the probe to the left. One complete
revolution of the micrometer moves the probe 0.5 mm. The graduated scale on the
outside of the micrometer shows 0.01 mm divisions.
FIGURE 4-1
Probe area indicated with dark circle
Содержание CRX-6.5K
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Страница 52: ...42 CHAPTER 2 System Overview Model CRX 6 5K Probe Station ...
Страница 92: ...82 CHAPTER 3 Installation and Setup Model CRX 6 5K Probe Station ...
Страница 162: ...152 CHAPTER 6 Maintenance and Troubleshooting Model CRX 6 5K Probe Station ...
Страница 166: ...156 INDEX Model CRX 6 5K Probe Station ...