2
CHAPTER 1:
Introduction
Model CRX-6.5K Probe Station
1.3 Specifications
General specifications about the Model CRX-6.5 K probe station are provided in the
table below.
SAMPLE COOLING ASSEMBLY
Type
2-stage ( radiation shield)
Radiation shielding
Radiation shield with top viewport surrounds sample
Cooling source
2-stage closed cycle refrigerator (CCR) with 3 W cooling power at 10 K
MAGNET FIELD
Not an option
TEMPERATURE
1
Base temperature
Control range
Configuration
8 K
8.5 K to 350 K
2 probe arms installed
9 K
9.5 K to 350 K
4 probe arms installed
10 K
10.5 K to 350 K
6 probe arms installed
20 K
20 K to 675 K
with PS-HTSTAGE option
1
Base temperature assumes heat load for probes thermally anchored as listed in the Probing section, below.
CONTROL STABILITY
Sample stage temperature
Stability
Base temperature (no heater control)
Not specified
<10 K
±25 mK
11 K to 350 K
±10 mK
Cooling source
±50 mK
VACUUM
Room temperature
<5 × 10
-4
Torr
Base temperature
<1 × 10
-5
Torr
Maximum temperature
<5 × 10
-5
Torr
CYCLE TIME (LHe)
6.25 h
Pump down
0.5 h
Station cool down
3.5 h
Station warm up
2.25 h
VIBRATION AT SAMPLE
<2 µm
SAMPLE
Maximum sample size
51 mm (2 in) diameter
Sample backside optical access
Not an option
Sample rotation
Not an option
PROBING CONFIGURATIONS
Maximum probes
6
Probe arm sensor
Included for monitoring probe temperature
Cooled probe mounts
<20 K with sample at base temperature
Probe mount
Thermally anchored to sample stage
Probe arm
Thermally anchored to radiation shield
DC/RF probes
Electrical isolation >100 G
)
for low leakage measurements
TABLE 1-1
Model CRX-6.5K probe station specifications
Содержание CRX-6.5K
Страница 4: ...Model CRX 6 5K Probe Station ...
Страница 52: ...42 CHAPTER 2 System Overview Model CRX 6 5K Probe Station ...
Страница 92: ...82 CHAPTER 3 Installation and Setup Model CRX 6 5K Probe Station ...
Страница 162: ...152 CHAPTER 6 Maintenance and Troubleshooting Model CRX 6 5K Probe Station ...
Страница 166: ...156 INDEX Model CRX 6 5K Probe Station ...