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Model 6517A 

Electrometer

User’s Manual

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Содержание 6517A

Страница 1: ...Model 6517A Electrometer User s Manual A G R E A T E R M E A S U R E O F C O N F I D E N C E...

Страница 2: ...SIVE REMEDIES NEITHER KEITHLEY INSTRUMENTS INC NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT INDIRECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AN...

Страница 3: ...trometer User s Manual All references to the Model 6517 also apply to the Model 6517A 1996 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A Fourth Printing May 2003 Document Number 65...

Страница 4: ...ew Revision is created all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual Each new Revision includes a revised copy of this print hist...

Страница 5: ...that a shock hazard exists when voltage levels greater than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before...

Страница 6: ...electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instru ments Standard fuses with applicable...

Страница 7: ...ing or Scientific 2 4 2 3 2 Information messages 2 4 2 3 3 Status and error messages 2 5 2 3 4 Multiple displays 2 7 2 3 5 Navigating menus 2 8 2 4 Connections electrometer high resistance meter and V...

Страница 8: ...mbs ranges 2 56 2 11 5 Logarithmic currents 2 56 2 11 6 Non decade current gains 2 57 2 12 Range and resolution 2 57 2 12 1 Measurement range 2 57 2 12 2 Display resolution 2 57 2 13 Zero check relati...

Страница 9: ...128 2 21 9 Electromagnetic interference EMI 2 128 2 22 Relative humidity and external temperature readings 2 128 3 IEEE 488 Reference 3 1 Introduction 3 1 3 2 Connections 3 2 3 2 1 IEEE 488 bus connec...

Страница 10: ...uery 3 35 3 11 13 TRG trigger 3 36 3 11 14 TST self test query 3 36 3 11 15 WAI wait to continue 3 36 3 12 Signal oriented measurement commands 3 38 3 13 Calculate subsystems 3 62 3 13 1 CALCulate 1 3...

Страница 11: ...2 10 TSTamp commands 3 132 3 22 11 RNUMber RESet 3 133 3 22 12 Zero check and zero correct commands 3 133 3 22 13 A D Controls 3 134 3 22 14 RS 232 Interface Commands 3 135 3 22 15 Basic Trigger Comma...

Страница 12: ...232 Serial Interface 3 157 3 27 1 RS 232 Interface Configuration 3 157 3 27 2 RS 232 Operating Considerations 3 157 3 27 3 RS 232 Interface Error Messages 3 158 3 27 4 Downloading commands using ProCo...

Страница 13: ...vii E IEEE 488 Conformance Information Information E 1 F SCPI Conformance Information Introduction F 1 G Device Dependent Command Summary...

Страница 14: ...2 19 Hard wired interlock 2 18 Figure 2 20 Typical connections for unguarded voltage measurements 2 19 Figure 2 21 Typical connections for guarded voltage measurements 2 20 Figure 2 22 Meter loading 2...

Страница 15: ...2 81 Figure 2 60 Meter complete and asynchronous trigger link output pulse specifications 2 82 Figure 2 61 DUT test system 2 82 Figure 2 62 External trigger connections 2 82 Figure 2 63 Trigger link c...

Страница 16: ...data bits 3 76 Figure 3 21 IEEE754 double precision data format 64 data bits 3 77 Figure 3 22 Measurement Event Register 3 110 Figure 3 23 Questionable Event Register 3 111 Figure 3 24 Operation Even...

Страница 17: ...Table 2 17 Full range PREAMP OUT values 2 52 Table 2 18 Integration times set by resolution all functions 2 58 Table 2 19 Auto resolution all functions 2 58 Table 2 20 CONFIGURE SEQUENCE menu structur...

Страница 18: ...d summary 3 57 Table 3 16 TSEQuence command summary 3 58 Table 3 17 UNIT command summary 3 61 B Interface Function Codes Table B 1 Model 6517A interface function codes B 1 D IEEE 488 Bus Overview Tabl...

Страница 19: ...dings can be stored in the buffer and up to 10 instru ment setups can be stored in memory Test sequences Built in tests for the following appli cations device characterization resistivity high resis t...

Страница 20: ...electrically and mechanically before shipment After unpacking all items from the shipping carton check for any obvious signs of physical damage that may have occurred during transit Note There may be...

Страница 21: ...s These are low noise triax cables terminated at both ends with 3 slot male triax connectors The 3 model is 3 ft 0 9m in length the 10 model is 10 ft 3m in length and the 20 model is 20 ft 6m in lengt...

Страница 22: ...ay and measurement considerations for the ohms function 2 8 Charge measurements Provides the basic proce dure to measure charge Includes configuration infor mation multiple displays and measurement co...

Страница 23: ...rate ground wire for use with grounded outlets When proper connections are made instru ment chassis is connected to power line ground through the ground wire in the power cord Failure to use a grounde...

Страница 24: ...ed Zero Check dis played Power up error messages Error messages that may be displayed during power up are summarized in Table 2 3 These are shown when one of the checksum tests of Table 2 2 fails 2 2...

Страница 25: ...ll exponent mode selections are performed from the DIS PLAY option of the GENERAL menu which is part of the MAIN MENU see paragraph 2 19 7 for details 2 3 2 Information messages Press the INFO key to...

Страница 26: ...e sine wave will be clipped as shown in Figure 2 B Clipping occurs at 110 of full range 22nA on the 20nA range Because of clipping the measurement of the input signal is significantly less than 20nA T...

Страница 27: ...data error EE EE EE EE EE 128 124 123 Numeric data not allowed Too many digits in number Exponent too large EE EE EE 121 120 Invalid character in number Numeric data error EE EE 114 113 112 111 110 H...

Страница 28: ...tate lost Calibration data lost Calibration dates lost Calibration tolerances lost Calibration tables lost Voltage Offset lost Current Offset lost Installed option id lost Option card not supported Ca...

Страница 29: ...r graph multiple display 05 9577 50 50V 50 of range 25 of range 25 of range V 0 50 of range wise values greater than 1 such as 1 67 are shown rounded to the nearest integer percent Perform the followi...

Страница 30: ...ration menu is accessed by pressing CONFIG and then the desired function V I etc or operation TRIG STORE etc 2 A menu item is selected by placing the cursor on it and pressing ENTER Cursor position is...

Страница 31: ...le extra protection The resis tor must be large enough to limit the current through the diodes to 10mA or less It must also be large enough to with stand the supply voltage The protection circuit shou...

Страница 32: ...panel V SOURCE OUT HI and LO binding posts as shown in Figure 2 10A Using these terminals simply places the independent V Source in series with the external circuit RL as shown in Figure 2 10B The V S...

Страница 33: ...either end Model 7078 TRX 10 This is the same as the Model 7078 TRX 3 except that it is 10 feet in length Model 7078 TRX 20 This is the same as the Model 7078 TRX 3 except that it is 20 feet in length...

Страница 34: ...put and test circuit common This unique guard technique for float ing current measurements is explained in paragraph 2 6 3 Guarding and is shown in Figure 2 31 Safety shield A safety shield is require...

Страница 35: ...R3 A Voltage measurement B Current measurement Figure 2 14 Floating measurements WARNING The maximum voltage common mode between electrometer LO and chassis ground is 500V The maximum voltage between...

Страница 36: ...a dedicated test fixture to source voltage and measure current to a single DUT resis tance measurements The second is a multi purpose test fix ture that can be used to make any Model 6517A measuremen...

Страница 37: ...of the Model 6517A NOTE An Interlock Violation Error message will be displayed when the interlock is open The switch must be mounted inside the test box such that it will be closed when the lid of the...

Страница 38: ...nector Banana Jack A B C Guard Plate 1 2 3 A B C DUT or Test Circuit D To 6517A Common D 4 Figure 2 17 Multi purpose test fixture 6517A A Interlock Connection to Unit Side View View from inside of tes...

Страница 39: ...oltage measurements The Model 6517A can make unguarded or guarded voltage measurements from 1 V to 210V Guard should be used if re sponse time or leakage resistance is a consideration The con cepts of...

Страница 40: ...the display NOTE To disable zero correct enable zero check and press REL Red HI Black LO 6517A Shield Optional Vs Measured Voltage CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WIT...

Страница 41: ...RTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY 237 ALG 2 Cable INPUT 250V PEAK COMMON TRIGGER LINK IN OUT LINE RATING 90 134V...

Страница 42: ...the volts function In any other function guard is not used The fol lowing menu items are used to control GUARD ON Enable guard OFF Disable guard Table 2 7 CONFIGURE VOLTS menu structure Menu item Desc...

Страница 43: ...is parameter optimizes the integration time for the present resolution setting See Table 2 18 for the default integration times for the volts ohms amps and cou lombs functions FILTER Use this menu ite...

Страница 44: ...used for high impedance voltage mea surements and for voltage measurements that use long input cables The basic procedure to make guarded voltage mea surements is provided in paragraph 2 5 1 To under...

Страница 45: ...ion The Z CHK key toggles zero check between the on and off states NOTE The input circuit configuration changes with zero check enabled See paragraph 2 13 for details 2 To achieve optimum accuracy for...

Страница 46: ...ION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING WARNING NO INTERNAL...

Страница 47: ...UTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SA CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SA WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE...

Страница 48: ...for the amps function This option allows you to speed up the autoranging search process by eliminating upper and or low er measurement ranges For example if you know that read ings will not exceed 1 A...

Страница 49: ...Program a simple average filter 1 100 rdgs Program a simple average filter 1 100 rdgs with noise tolerance window 0 100 of range Select moving average or repeating average mode Configure median filter...

Страница 50: ...esistance of the DUT will affect the noise per formance of current measurements As the source resistance is reduced the noise gain of the ammeter will increase as we will now discuss Figure 2 28 shows...

Страница 51: ...ries resistance will increase the voltage burden by a factor of IIN RSERIES For example the range of resistance listed in Table 2 10 will result in voltage burden values in the range of 1mV to 1V A us...

Страница 52: ...el current then the 10nA leakage current will corrupt the measurement Figure 2 30B shows the guarded version of the same circuit Notice that the only difference is that the connections to the electrom...

Страница 53: ...lected from the VSOURCE item of CONFIGURE OHMS menu see paragraph 2 7 3 for details Ohms Ranges Each measurement range for the ohms function has a lower reading limit that is one decade below the sele...

Страница 54: ...hile Figure 2 32 shows connections using the Model 8002A High Resistance Test Fixture NOTE The connections in Figure 2 33 assume that V Source LO is internally connected to ammeter LO This internal co...

Страница 55: ...ND RATING CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTER...

Страница 56: ...AD WITH FRONT PANE PREAMP OUT 250V PEAK V SOURCE LO HI A Connections 8002A HIGH RESISTANCE TEST FIXTURE INTERLOCK Note Set fixture mode switch to picoammeter operation Warning Connect of fixture to sa...

Страница 57: ...ace resistivity measure ments from 103 to 1017 ohms and volume resistivity mea surements from 103 to 1018 ohm cm Typical resistivity test fixtures such as the Model 8009 use circular electrodes In ord...

Страница 58: ...applying a voltage poten tial across opposite sides of the insulator sample and measur ing the resultant current through the sample as shown in Figure 2 35 The Model 6517A automatically performs the...

Страница 59: ...el 8009 for surface and volume resistivity measurements 5 Select the ohms function by pressing R 6 If the manual V Source adjustment mode is selected use the and the VOLTAGE SOURCE and keys to set the...

Страница 60: ...NAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY METER SOURCE LID INTERLOCK TRIAX 250 MAX HI LO MAX INPUT 1100V INPUT 250V PEAK COMMON OUT LINE RATING 90 134VAC 180 250VAC 50 60 400HZ...

Страница 61: ...h noise tolerance window 0 100 of range Select moving average or repeating average mode Configure median filter Disable median filter Enable median filter and specify range 1 5 RESOLUTION AUTO 3 5d 4...

Страница 62: ...option to make surface resistivity measurements After the option is selected the following menu items are used to configure the resistivity measure ment MODEL 8009 Use this option if you are using the...

Страница 63: ...volt values To obtain consistent test re sults these resistors should always be biased at the same voltage The Model 6517A can be used to characterize such resis tance changes by measuring the resist...

Страница 64: ...Coulombs configuration The following information explains the various configura tion options for the coulombs function The configuration menu is summarized in Table 2 13 This menu is accessed by press...

Страница 65: ...ement ranges Red HI Black LO 6517A Shield Optional Qs Measured Charge Input low connected to shield CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION...

Страница 66: ...power line cycle 16 67msec for 60Hz 20msec for 50Hz and 400Hz Select 0 01 PLC Select 0 1 PLC Select 10 PLC Set integration time in PLC 0 01 10 Default to setting appropriate for resolution FILTER AVER...

Страница 67: ...t in oper ate The voltage source is in operate when the VOLTAGE SOURCE OPERATE indi Table 2 14 V Source ranges Range Maximum output Step size Voltage Current 100V 1000V 100V 1000V 10mA 1mA 5mV 50mV ca...

Страница 68: ...ON FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING WARNING NO INTERNAL O...

Страница 69: ...VA MAX LINE FUSE SLOWBLOW 1 2A 250V IEEE 488 CHANGE IEEE ADDRESS WITH FRONT PANEL MENU PREAMP OUT 250V PEAK V SOURCE LO HI Connections INTERLOCK RL Equivalent Circuit RL HI Triax Cable A Ammeter Note...

Страница 70: ...st 0V to change polarity Place the cursor on the polarity sign or and press or to toggle polarity 4 When finished the voltage source edit mode will cancel EDIT annunciator off after three seconds 2 9...

Страница 71: ...to be connected to a single pole interlock switch of a test fixture If connecting two or more Model 6517As to a single test fixture an isolated interlock switch for each instrument is required Connec...

Страница 72: ...ange Applied signal Nominal 2V analog output value 20pA 2 A 200V 20nC 10 4pA 1 65 A 35V 19nC 1 04V 1 65V 0 35V 1 9V Output values within 15 of nominal value RL Input Resistance of measuring device Inp...

Страница 73: ...17 CAUTION Connecting PREAMP OUT COM MON or 2V ANALOG OUTPUT to earth while floating input may damage the instrument Note that the PREAMP OUT output resistance is 1 The output resistance appears betwe...

Страница 74: ...CABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE...

Страница 75: ...r typically greater than 55 106 Note that the input impedance is ZIN 10M ZFB when zero check is enabled 6 The voltage at the PREAMP OUT terminal is given by the formula V IZFB 7 Any feedback elements...

Страница 76: ...Ranging Amp and A D 5 3 2 4 1 A Construction HI LO Shielded Fixture 237 ALG 2 Cable Feedback Element Parts List Item Description MFR Part Number 1 Shielded Fixture 2 Female Triaxial 3 Banana Jack 4 Tr...

Страница 77: ...rrents respectively The fac tor m introduces non linearities between those two extremes Because of these limitations most diodes have a limited range of logarithmic behavior A solution to these constr...

Страница 78: ...rument selects the optimum resolution for the present speed integration period setting See Table 2 19 See paragraphs 2 5 2 volts 2 6 2 amps 2 7 2 ohms and 2 8 2 coulombs to set display resolution and...

Страница 79: ...e current gains 2 13 Zero check relative and zero correct 2 13 1 Zero check When zero check is enabled on the input amplifier is re configured to shunt the input signal to low as shown in Fig ure 2 46...

Страница 80: ...be displayed and the rel operation will be cancelled Note that a bench or GPIB reset clears any stored rel values and disables rel for all functions Enabling rel From the normal reading display the R...

Страница 81: ...age Figure 2 49 shows the connections for this test A resistor and a diode are used to limit noise for the measurement For this test a fixed voltage BIASV is applied to the capac itor for specified ti...

Страница 82: ...EL ONLY 7078 TRX Cable INPUT 250V PEAK COMMON TRIGGER LINK IN OUT LINE RATING 90 134VAC 180 250VAC 50 60 400HZ 55VA MAX LINE FUS SLOWBLO 1 2A 250V IEEE 488 CHANGE IEEE ADDRESS WITH FRONT PANEL MENU PR...

Страница 83: ...ICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY 7078 TRX Cable INPUT 250V PEAK COMMON TRIGGER LINK IN OUT LINE RATING 90 134VAC 180 25...

Страница 84: ...SONNEL ONLY 7078 TRX Cable INPUT 250V PEAK COMMON TRIGGER LINK IN OUT LINE RATING 90 134VAC 180 250VAC 50 60 400HZ 55VA MAX LINE FU SLOWBL 1 2A 25 IEEE 488 CHANGE IEEE ADDRESS WITH FRONT PANEL MENU PR...

Страница 85: ...QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY 7078 TRX Cable INPUT 250V PEAK COMMON TRIGGER LINK IN OUT LINE RATING 90 134VAC 180 250VAC 5...

Страница 86: ...keys TheAlternating Polarity sequence will not autorange past the 2nA range If the resistance resistivity to be measured is high and a more sensitive range is required the user must set this range man...

Страница 87: ...agraph 2 14 2 for details The Staircase Sweep Test allows you to make measurements at staircased voltage levels When the test is configured you specify the START voltage the STEP voltage the STOP volt...

Страница 88: ...s HI Level 1V HI Time 1sec LO Level 1V LO Time 1sec Cycle Count 10 Cycle Measurements 1sec 1 2 3 10 1V 0V 1V 1 Test Parameters Start 1V Stop 10V Step 1V Step Time 1 sec Measurement 2 3 4 5 6 7 8 9 10...

Страница 89: ...discharge time bias voltage bias time measure voltage mea sure time and discharge time After entering these test param eters use the EXIT key to back out of the menu structure ALT POLARITY Use this m...

Страница 90: ...Specify number of readings Specify time interval Resistor Voltage Coefficient Test Specify 1st test voltage Specify 1st delay Specify 2nd test voltage Specify 2nd delay 1V 10V 1V 1sec 1V 10 1 sec 1V 5...

Страница 91: ...0V 1 sec 100V 1sec SWEEP SQUARE WAVE HI LEVEL HI TIME LO LEVEL LO TIME CYCLE COUNT STAIRCASE START STOP STEP STEP TIME Sweep Tests Square Wave Sweep Test Specify high level voltage Specify time at hig...

Страница 92: ...ained in the next paragraph Table 2 21 CONFIGURE TRIGGER menu structure Menu item Description BASIC MODE CONTINUOUS ONE SHOT SOURCE IMMEDIATE MANUAL GPIB EXT TIMER Select and configure basic triggerin...

Страница 93: ...e number of scans to be performed Repeat scanning indefinitely Specify count 1 99999 Select trigger control mode Enable Source Bypass Disable Source Bypass ARM SOURCE IMMEDIATE EXTERNAL MANUAL GPIB TR...

Страница 94: ...NFIGURE TRIGGER menu Control Sources With the one shot trigger mode selected a measurement de vice action does not occur until the selected control source event is detected The control sources are exp...

Страница 95: ...nabled Another Scan Scan Count No Yes Delay Scan Delay Measure Event Detection No Yes Measure Trigger Control Source Source Bypass Enabled Measure Count Measure Delay Device Action Output Trigger Cont...

Страница 96: ...ection is immediately satisfied on the initial pass through the layer Each subsequent de tection is satisfied when the programmed timer interval 1 to 999999 999 seconds elapses A timer resets to its i...

Страница 97: ...2 3 5 The BASIC TRIGGERING menu items are explained as fol lows MODE Use this menu item to select the trigger mode for basic trig gering CONTINUOUS Use this trigger mode to place the instru ment in t...

Страница 98: ...ection external triggers are used to control the measure source Each trigger stimulus applied to the Model 6517A performs a device action as defined by the trigger model In addition to a measurement t...

Страница 99: ...LECT MEASURE SRC menu by pressing the cursor on HOLD and pressing ENTER The instrument returns to the SETUP mea sure layer menu DELAY This delay is used to hold up operation in the measure layer After...

Страница 100: ...2 15 5 for details on using the Trigger Link NOTE The front panel TRIG key see MANU AL is active with the Trigger Link select ed Pressing the TRIG key passes operation into the measure layer After se...

Страница 101: ...MANUAL With this selection the front panel TRIG key controls the arm source Operation passes into the scan layer when the TRIG key is pressed NOTE The front panelTRIG key is active when EX TERNAL GPI...

Страница 102: ...can layer when the Model 6517A receives a trig ger over the Trigger Link See paragraph 2 15 5 for details on using the Trigger Link NOTE The front panel TRIG key see MANU AL is active with the Trigger...

Страница 103: ...Operation will instead start over from the top of the advanced trigger model OFF Use this option to disable continuous initiation After all advanced trigger model operations are done the instru ment w...

Страница 104: ...r 7002 Switch System The external trigger connections for this test are shown in Figure 2 62 Channel Ready output of the Model 7001 or 7002 is connected to External Trigger Input of the Model 6517A Me...

Страница 105: ...fter the Model 6517A completes the measurement it outputs a trigger from Meter Complete Output to Exter nal Trigger of the Model 7001 7002 which closes the next channel After Channel 1 2 settles a tri...

Страница 106: ...st also select input and output lines for the measure layer Input and output triggers can be set to any of the six lines but they cannot use the same line For example if you select line 1 for input tr...

Страница 107: ...WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION FOR CONTINUED PRO...

Страница 108: ...The scan ner s output pulse triggers the Model 6517A to take a read ing store it and send a trigger pulse The following explanation on operation is referenced to the operation mod el shown in Figure 2...

Страница 109: ...igger Scan Channel C Output Trigger Trigger D No Yes 7001or 7002 Make Measurement 6517A Press STEP to start scan Arm A Wait for Trigger Link Trigger E Output Trigger Trigger F No Yes Scanned 10 Channe...

Страница 110: ...MENU DIGITAL I O TRIG LINK 115V 1 2 Channel Ready External Trigger 7002 Scanner Figure 2 67 Connections using Trigger Link adapter 220 Current Source Model 6517A OUTPUT OUTPUT WARNING NO INTERNAL OPE...

Страница 111: ...C A R D 90 250V 50 400Hz 40VA MAX LINE RATING 2 TRIGGER LINK DIGITAL I O C A R D 1 MADE IN USA IN OUT External T rigger WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONL...

Страница 112: ...in effect The trigger pulse from the Model 7001 7002 triggers the Model 6517A to make a measurement of DUT 1 After the measurement is complete the electrometer outputs a Trigger Link trigger pulse poi...

Страница 113: ...annels This process continues until all channels are scanned and measured Semi synchronous Trigger Link example This example uses the same test system Figure 2 64 that was used for the Asynchronous Tr...

Страница 114: ...V 50 400Hz 40VA MAX LINE RATING 2 TRIGGER LINK DIGITAL I O C A R D 1 MADE IN USA WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICAB...

Страница 115: ...2 Press STEP on the Model 7001 7002 to start the scan The following explanation on operation is referenced to the operation model shown in Figure 2 74 Idle Bypass B Wait for Trigger Link Trigger Scan...

Страница 116: ...odel 6517A releases the trigger line point F and then loops back to point A where it waits for another input trigger A B C D E F When the Model 6517A releases the trigger line the leading positive goi...

Страница 117: ...1 1 1 1 0 0 0 0 1 1 1 1 0 0 0 0 1 1 1 1 0 0 1 1 0 0 1 1 0 0 1 1 0 0 1 1 0 0 1 1 0 0 1 1 0 0 1 1 0 0 1 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0...

Страница 118: ...pe Relative Time Real Time Format Absolute Delta Elements Display Select buffer size Enter number of readings to store Use finite measure count from trigger model Select type of buffer control Fill bu...

Страница 119: ...interrupted Pressing the STORE key changes NEVER to FILL AND STOP CLEAR ALL This action yes or no can be used at any time to clear the data buffer of all stored readings and buffer statistics TIMESTA...

Страница 120: ...AMP item of GENERAL menu see paragraph 2 19 7 Channel When selected the scanned channel number will be displayed on the primary display for each stored reading Note that if a scan was not performed a...

Страница 121: ...red continuous ON Rdg 00000 Time 003 903546 sec 100 rdgs stored continuous ON Rdg 00000 Time 067 709331 sec 100 rdgs stored continuous ON STORAGE INTERRUPTED Acquired 100 of 100 readings normal readin...

Страница 122: ...to calculate the standard deviation is where xi is a stored reading and n is the number of stored readings Note If n 1 the result is NAN not a number NOTE These statistics are invalid if the measure m...

Страница 123: ...ting filter takes a selected number of reading conver sions averages them and yields a reading It then flushes its stack and starts over This characteristic is useful when scan ning channels Filter mo...

Страница 124: ...A3 A2 A1 A1 A6 A6 A6 A6 A6 Conversions Type advanced Readings 5 Mode moving Noise level 1 of range A1 A1 A1 A1 A1 A2 A1 A1 A1 A1 A3 A2 A1 A1 A1 A4 A3 A2 A1 A1 A5 A4 A3 A2 A1 B1 B1 B1 B1 B1 B2 B1 B1 B1...

Страница 125: ...s 10 Mode Moving Conversion 11 10 9 8 7 6 5 4 3 Conversion 2 Reading 2 Conversion 12 11 10 9 8 7 6 5 4 Conversion 3 Reading 3 Conversion 10 9 8 7 6 5 4 3 2 Conversion 1 Reading 1 B Type Average Readin...

Страница 126: ...iltering performed Program a simple average filter 1 100 rdgs Program a simple average filter 1 100 rdgs with noise tolerance window 0 100 of range Select moving average or repeating average mode Conf...

Страница 127: ...e viewed with one of the multiple displays as described in paragraph 2 18 8 When necessary the resultingY value is displayed in scientific notation 2 18 2 Percent This operation lets you specify a tar...

Страница 128: ...on selected POLY Polynomial Percent calculation selected Ratio X Y DEV Percent deviation calculation selected DEV Deviation calculation selected RAT Ratio calculation selected LOG Logarithmic calculat...

Страница 129: ...the display and the result of the calculation on the top line This display is available by repeatedly pressing either the NEXT or PREVious DISPLAY key to scroll through the multiple displays for the p...

Страница 130: ...el printer Specify printing interval every reading to 1 out of 9999 Formfeeds menu Enable disable page breaks Set number line between form feeds 1 255 Select GPIB data elements reading units reading n...

Страница 131: ...MERIC FORMAT DECIMAL CHAR CLOCK TIME DATE FORMAT General menu Digital output menu Check change states of digital output lines Check change sense of digital output lines Display serial number memory op...

Страница 132: ...s into effect on power on The instrument can be set to power on to the factory bench defaults the factory GPIB defaults or to a user setup stored see SAVE at a specific memory location The POWERON opt...

Страница 133: ...printer setup Interface Interval Formfeed Page Size Elements RS 232 Control send receive or talk only Talk Only printer setup Interval Formfeed Page Size Baud Rate Data Bits Parity Stop Bits Elements...

Страница 134: ...1 0 0 Off 0 Off 1 0 0 1 0 0 Off 0 Math Function Percent Target Value Polynomial Constants a0 a1 a2 Deviation Reference Deviation Reference Ratio Reference Off Polynomial 1 0 0 0 1 0 0 0 1 0 1 0 1 0 On...

Страница 135: ...al Scan Channels Count Memory Scan Mode Settling Time Timer Interval V Source Limit External Scan External Inputs Trigger Source Scan Count Timer Interval Memory Internal All 10 Yes Voltage 0 0 sec No...

Страница 136: ...ge Measurement Time Discarded Readings Stored Readings SIR Bias Voltage Bias Time Measure Voltage Measure Time Square Wave Sweep High Level High Time Low Level Low Time Cycle Count Diode 1V 10V 1V 1 s...

Страница 137: ...0 sec Infinite Acceptor Immediate Line 2 Line 1 0 0 sec Infinite Acceptor Immediate Line 2 Line 1 1 Acceptor Continuous Immediate 0 1 sec Advanced idled Immediate Asynchronous Line 2 Line 1 0 0 sec 1...

Страница 138: ...17A ig nores commands from the bus and merely outputs data as re quested by the printer When the instrument is in the talk only mode the TALK annunciator turns on The options for TALK ONLY are explain...

Страница 139: ...U see paragraph 2 19 7 UNIT The units of the reading CH The channel number the reading was taken on HUM Relative humidity reading if the Model 6517 RH is being used The humidity sensor is enabled from...

Страница 140: ...s pass another programmable pattern is set Also see DIGOUT in para graph 2 19 7 LIMIT SET 1 and LIMIT SET 2 These menu items are similar in that you can enable or dis able either or both limit sets an...

Страница 141: ...between 90k and 99k meets 10 toler ance Values between 101k and 110k meets 10 toler ance Values between 99k and 101k meets 1 toler ance The desired test is shown in Figure 2 78 Use the following proc...

Страница 142: ...NTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION FOR CONTINUED PROTECTION AGAIN...

Страница 143: ...ernal voltage supply Each output can be operated from external voltage supplies voltage range from 5V to 30V applied through the exter nal device being driven Refer to Figure 2 80 for a simplified sch...

Страница 144: ...r TTL or CMOS inputs 1 Connect the Model 6517A digital outputs to the logic in puts 2 Connect the digital grounds 3 Using the STATE menu check output state setting of the Model 6517A output lines The...

Страница 145: ...W To change the sense place the cursor on the alternate selection and press ENTER SERIAL This item displays the serial number SCPI version and firm ware revision levels of the instrument The following...

Страница 146: ...time clock and provide the current time 24 hour format and date for each reading Timestamp type for bus readings is coupled to timestamp type for buffer readings Thus if you change timestamp type fro...

Страница 147: ...open indi vidual channels or scan through the channels Detailed operating instructions for internal scanning are pro vided in the instruction manual for that particular scanner card For example to us...

Страница 148: ...elect NO 11 The next message will ask if you wish to store the read ings in the buffer If you selectYES the number of read ings that will be stored in the buffer will be displayed Note that the buffer...

Страница 149: ...clean and free of contamination Paragraph 2 4 6 provides general cleaning tips 2 21 5 Humidity Excess humidity can reduce insulation resistance on PC boards and in test connection insulators Reductio...

Страница 150: ...special precautions may be required in the measurement setup Sources of EMI include Radio and TV broadcast transmitters Communications transmitters including cellular phones and handheld radios Device...

Страница 151: ...ed enabled or dis abled from the A D CONTROLS DATA STAMP item of the GENERAL MENU Measurement units C F or K are selected from the DISPLAY TEMP UNITS item of the GENERAL MENU The GENERAL MENU is cover...

Страница 152: ...mands Covers the IEEE 488 2 com mon commands used by the Model 6517A 3 12 SCPI Signal oriented measurement commands Covers the signal oriented commands used by the Model 6517A 3 13 3 26 SCPI command s...

Страница 153: ...s Earlier versions had different screws which were sil ver colored Do not attempt to use these type of connectors on the instrument which is designed for metric threads A typical connecting scheme for...

Страница 154: ...9 8 7 6 RS232 lers are also given a primary address so do not use that address either Most frequently controller addresses are 0 or 21 but you should consult the controller s instruction manual for de...

Страница 155: ...r must first be installed From DOS execute the following command to install the driver cechp If you include the CECHP command in your AUTOEX EC BAT file the driver will automatically be installed ever...

Страница 156: ...e the instrument is in remote You can restore normal front panel operation by pressing the LOCAL key Table 3 1 General bus commands and associated statements Command Programming statement Effect on Mo...

Страница 157: ...y the same function as the DCL command Howev er since each device must be individually addressed the SDC command provides a method to clear only selected in struments instead of clearing all instrumen...

Страница 158: ...t is placed in the talker idle state by sending it an UNT Untalk command addressing it to listen or with the IFC Interface Clear command LSTN This indicator is on when the Model 6517A is in the listen...

Страница 159: ...quence Condition Register Always Zero 0 3 4 5 6 7 8 9 10 11 12 13 15 Sequence Transition Filter 0 3 4 5 6 7 8 9 10 11 12 13 15 Sequence Event Register 0 3 4 5 6 7 8 9 10 11 12 13 15 Sequence Event Ena...

Страница 160: ...g B5 B4 B3 OR Seq Sequnce Test Running Calc Calculating Reading Idle Idle Arm Waiting in an Arm Layer Trig Waiting in Trigger Layer Cal Calibrating Logical AND OR Logical OR B2 B1 B0 B15 B12 Idle B10...

Страница 161: ...arm layer of Sequence 1 Logical AND OR Logical OR PTR Positive Transition Register NTR Negative Transition Register 0 Seq1 B14 B2 B15 B1 B0 0 Seq1 B14 B2 B15 B1 B0 0 Always Zero Seq1 PTR NTR Arm Tran...

Страница 162: ...Lay2 Layer 2 Set bit indicates that 6517 is in arm layer 2 Logical AND OR Logical OR PTR Positive Transition Register NTR Negative Transition Register 0 Lay2 Lay1 B14 B3 B15 B2 B1 B0 0 Lay2 Lay1 B14 B...

Страница 163: ...t the 6517A is in the trigger layer of Sequence 1 Logical AND OR Logical OR PTR Positive Transition Register NTR Negative Transition Register 0 Seq1 B14 B2 B15 B1 B0 0 Seq1 B14 B2 B15 B1 B0 0 Always Z...

Страница 164: ...9 B8 B7 B6 RAV B5 B4 B3 B2 LL1 B1 B0 Measurement Condition Register BFL HL2 HL1 ROF BFL HL2 HL1 ROF BFL HL2 ROF BHF BAV LL2 BHF BAV LL2 LL2 HL1 SRA B10 B9 BHF B8 BAV B7 B6 RAV B5 B4 B3 B2 LL1 B1 B0 BF...

Страница 165: ...Event Register B14 B8 B15 To Questionable Summary Bit QSB of Status Byte Register See Figure 3 13 B7 B5 B7 B5 B7 B5 B7 B5 Warn Cal Warn Cal B4 Temp B4 Temp B4 Temp B4 Temp Warn B13 B13 B13 B13 B12 B1...

Страница 166: ...ars the following enable registers Operation Event Enable Register Questionable Event Enable Register Measurement Event Enable Register STATus PRESet sets all bits of the following enable registers Tr...

Страница 167: ...B5 MAV B4 QSB B3 EAV B2 B1 B0 OR SRE SRE Status Byte Register Service Request Enable Register OSB Operation Summary Bit MSS Master Summary Status RQS Request for Service ESB Event Summary Bit MAV Mess...

Страница 168: ...r a pa rameter n value of zero is sent with the SRE command SRE 0 Serial poll and SRQ Any enabled event summary bit that goes from 0 to 1 will set RQS and generate a service request SRQ The user s tes...

Страница 169: ...d when a bus trigger GET or TRG is received by the Model 6517A TIMer Event detection is immediately satisfied on the initial pass through the layer Each subsequent de tection is satisfied when the pro...

Страница 170: ...Rection SOURce Source Bypass Enabled ARM LAYer2 IMMediate ARM LAYer2 SIGNal Another Scan ARM LAYer2 COUNt n INFinite No Yes Delay ARM LAYer2 DELay num Measure Event Detection No Yes TRIGger SOURce IMM...

Страница 171: ...ce is set for EXTernal IMMediate MANual BUS or TIMer the out put trigger pulse is available at the METER COMPLETE connector If the TLINk control source is selected output trigger action occurs on the...

Страница 172: ...the pro gram message For example INITiate IMMediate The brackets indicate that IMMediate is implied optional and does not have to be used Thus the above command can be sent in one of two ways INITiat...

Страница 173: ...the command with the ON or 1 parameter as follows SOURce TTL2 ON or SOURce TTL2 1 2 Query commands This type of command requests queries the currently programmed sta tus It is identified by the questi...

Страница 174: ...version Example auto auto B The following rules apply to words that exceed four letters a If the fourth letter of the word is a vowel delete it and all the letters after it Exam ple immediate imm Not...

Страница 175: ...ach of the above program messages the path pointer starts at the root command stat and moves down the command levels until the command is executed 2 Multiple command messages Multiple commands can be...

Страница 176: ...Using common commands and SCPI commands in same message Both common com mands and SCPI commands can be used in the same message as long as they are separated by semicolons A common command can be exe...

Страница 177: ...by commas The following example shows the response message for a program message that contains four single item query commands 0 1 1 0 RS 232 Interface Instead of commas a CR LF will separate each re...

Страница 178: ...Recall command Reset command Save command Service request enable command Service request enable query Read status byte query Trigger command Self test query Wait to continue command Clears all event r...

Страница 179: ...tandard event bits see paragraph 3 11 3 The Status Byte Register is described in para graph 3 8 6 A cleared bit 0 in the enable register prevents masks the ESB bit in the Status Byte Register from set...

Страница 180: ...4 B3 B2 B1 B0 0 1 0 1 0 1 Bit Position Event Decimal Weighting Value Value 1 Enable Standard Event 0 Disable Mask Standard Event PON URQ CME DDE EXE QYE OPC 0 1 0 1 0 1 0 1 2 7 2 6 2 5 2 4 2 3 2 2 2 0...

Страница 181: ...error has occurred Com mand errors include 3 IEEE 488 2 syntax error Model 6517A received a message that does not follow the defined syntax of the IEEE 488 2 standard 4 Semantic error Model 6517A rec...

Страница 182: ...re not considered finished until the instrument goes into the idle state NOTE The INITiate POFLag command see paragraph 3 24 1 is used to include or exclude the No Operation Pending flag in the intern...

Страница 183: ...Tinuous ON command an ASCII 1 will not be sent to the Output Queue and the MAV bit will not set until the Model 6517A goes back into the idle state The initiate operations are not considered finished...

Страница 184: ...o 9 Specify memory location This command is used to return the Model 6517A to a setup configuration stored at a memory location The SAV command is used to store a setup configuration at a memory locat...

Страница 185: ...by an appropriate event For details on register structure refer to paragraph 3 8 The Service Request Enable Register is shown in Figure 3 17 Notice that the decimal weight of each bit is included in...

Страница 186: ...measurement event has occurred The event can be identified by reading the Measurement Event Status Register using the STA Tus MEASurement command see paragraph 3 20 for details Bit 1 Not used Bit 2 E...

Страница 187: ...for buffer operation 3 11 14 TST self test query Run the self test and acquire the Result Description This query command is used to perform a checksum test on ROM and places the coded result 0 or 1 i...

Страница 188: ...r for the Trigger Model has finished moving in response to TRG and has settled at its next state Program fragment PRINT 1 output 27 syst pres Select defaults PRINT 1 output 27 init cont off abort Plac...

Страница 189: ...tion RESistance Ohms function CHARge Coulombs function Query CONFigure Query the selected function Description This command is used to configure the instrument for subsequent measurements on the speci...

Страница 190: ...ment mode Every time the READ command is then sent a mea surement conversion will occur and the reading will be acquired When this command is sent the following commands will be executed in the order...

Страница 191: ...ps function RESistance Ohms function CHARge Coulombs function This command combines all of the other signal oriented measurement commands to perform a one shot measurement and acquire the reading When...

Страница 192: ...control display readings and messages 3 16 FORMat subsystem Use to select the data format for transferring instrument read ings over the bus 3 17 Output subsystems Use to control the V Source and sel...

Страница 193: ...ult parameter SCPI Ref CALCulate 1 FORMat name FORMat KMATh MA0Factor NRf MA0Factor MA1Factor NRf MA1Factor MA2Factor NRf MA2Factor PERCent NRf PERCent REFerence NRf REFerence STATe b STATe DATA LATes...

Страница 194: ...clear Query auto clear Path to control LIMIT 2 test Path to configure upper limit Set upper limit 9 999999e35 to 9 999999e35 Query upper limit Set digital output 0 to 15 Query source digital output v...

Страница 195: ...essage mode Query text message state Read data on top portion of display Path to locate message to bottom display Query attributes of display characters 1 blinking character 0 other Path to control us...

Страница 196: ...mmary Command Description Default Parameter SCPI OUTPut1 STATe b STATe TTL 1 LSENse name LSENse TTL2 LSENse name LSENse TTL3 LSENse name LSENse TTL4 LSENse name LSENse Enable operate or disable standb...

Страница 197: ...nnels Query the internal scan list Specify external scan list 1 to 400 channels Query the external scan list Select scan operation INTernal EXTernal or NONE Query scan operation Specify settling time...

Страница 198: ...lower limit for auto range 0 to 210 Query lower limit Query auto range Specify reference 210 to 210 Enable or disable reference Query state of reference 0 or 1 Use input signal as reference Query refe...

Страница 199: ...to 21e 3 Query upper limit Set lower limit for auto range 0 to 21e 3 Query lower limit Query auto range Specify reference 21e 3 to 21e 3 Enable or disable reference Query state of reference Use input...

Страница 200: ...for auto range 0 to 100e18 Query upper limit Set lower limit for auto range 0 to 100e18 Query lower limit Query auto range Path to configure Manual V Source ohms Path to configure measurement range Se...

Страница 201: ...Path to control median filter Enable or disable median filter Query state of median filter Specify range 1 to 5 Query rank Enable or disable damping Query state of damping Select ohms V Source mode MA...

Страница 202: ...Enable or disable reference Query state of reference Use input signal as reference Query reference value Specify measurement resolution 4 to 7 Enable or disable auto resolution Enable and then disabl...

Страница 203: ...or disable line 4 Query state of line 4 Path to set V Source level Set V source level 0 to 1000 volts Query V source level Select V source range 100 selects 100V range 100 selects 1000V range Query V...

Страница 204: ...e negative transition register Read the negative transition register Read the condition register Path to control arm event registers Read the event register Program the enable register Read the enable...

Страница 205: ...essages Clears all messages from Error Queue Note 2 Note 3 Note 4 Note 5 Note 6 Note 7 Note 7 3 21 1 3 21 2 3 21 3 3 21 4 3 21 5 3 21 6 3 21 7 Notes 1 Commands in this subsystem are not affected by RS...

Страница 206: ...estamp Reset relative timestamp to 0 sec Path to reset reading number Reset reading number to zero Enable or disable zero check Query state of zero check Path to control zero correct Enable or disable...

Страница 207: ...l Feed commands Path to configure pre trigger storage Path to specify number of pre trigger readings Specify 0 to 100 of buffer Query percentage Specify as a number Query number of readings Select pre...

Страница 208: ...Query control source Loop around control source Path to configure Triggers Enable SOURce or disable ACCeptor Query direction Path to configure asynchronous Trigger Link Select input line 1 to 6 Query...

Страница 209: ...nchronous Trigger Link Select trigger line 1 to 6 Query trigger line Note 3 0 IMMediate 0 1 ASYNchronous ACCeptor 2 1 1 Note 2 3 24 3 3 24 4 3 24 5 3 24 6 3 24 7 3 24 8 3 24 9 Notes 1 Defaults for con...

Страница 210: ...ltage 1000 to 1000 Query bias voltage Number points 1 to Max Buffer Query number of points Interval between points 0 to 99999 9 sec Query interval Resistor voltage coefficient test path Specify source...

Страница 211: ...ecify number of readings to store See paragraph 3 25 19 Query number of readings to store Surface Insulation Resistance test path Specify bias voltage 1000 to 1000 Query bias voltage Specify bias time...

Страница 212: ...IEEE 488 Reference 3 61 Table 3 17 UNIT command summary Command Description Power up defaults UNIT TEMPerature name TEMPerature Select temperature units C CEL F FAR K Query temperature units C...

Страница 213: ...ion Query FORMat Query programmed math format Description This command is used to specify the format for the CALC 1 math calculation With NONE se lected no CALC 1 calculation is performed With one of...

Страница 214: ...ation and percent deviation Parameters NRf 9 999999e35 to 9 999999e35 Specify reference value Query REFerence Query reference value Description This command is used to specify the reference value for...

Страница 215: ...allows you to re process the current input data to reflect a new calculation For example assume the instrument is in a non continuous measurement mode and requires a manual trigger to cause the next r...

Страница 216: ...ormed every time the IMMe diate or IMMediate command is executed Details on MEAN SDEV MAX and MIN are provided in paragraph 2 16 3 PKPK MAX MIN where MAX is the largest reading in the buffer MIN is th...

Страница 217: ...nd CALC 2 is enabled PRINT 1 output 27 calc2 form max Select MAX format PRINT 1 output 27 calc2 imm Perform math and query result PRINT 1 enter 27 Get response message from 6517A DATA CALCulate2 DATA...

Страница 218: ...These commands are used to set the upper and lower limits for LIMIT 1 and LIMIT 2 The ac tual limit depends on which measurement function is currently selected For example a limit value of 1 is 1 A f...

Страница 219: ...used to enable or disable LIMIT 1 and LIMIT 2 tests When enabled the test sequence for limits will be performed every time the instrument performs a measurement Testing is performed in the following...

Страница 220: ...SOURce NRf Specify pass pattern Parameters NRf 0 to 15 Specify digital pattern for output port Query SOURce Query programmed source value Description This command is used to specify which line s of t...

Страница 221: ...ee lines of the output port the 10 sec strobe pulse is asserted on line 4 The strobe is used to inform your external binning circuit that the output port lines 1 2 and 3 is ready to be read IMMediate...

Страница 222: ...Rotected VOFFset Null voltage burden Description This action command is used to null voltage burden Before sending this command connect a short to the input triax connector Function changes and measur...

Страница 223: ...in the program message or the last com mand in the program message If you include a command after an indefinite block message on the same line it will be treated as part of the message and is displaye...

Страница 224: ...0000000000 The response message for disp wind2 attr secondary display will display 1s at the character positions for SAVESETUP as follows 11111111100000000000000000000000 DATA DISPlay WINDow 1 DATA Re...

Страница 225: ...splay circuitry 1 or ON Enable display circuitry Query ENABle Query state of display Description This command is used to enable and disable the front panel display circuitry When disabled the instrume...

Страница 226: ...readings over the bus For every reading conversion the data string sent over the bus contains the elements specified by the EL EMents command The specified elements are sent in a particular order The...

Страница 227: ...O Overflow U Underflow R Reference Rel L Out of Limit Time Date Units 000 No Channel 001 to 400 Channel number Units extchan External Channel intchan Internal Channel Units C C F F K K Units Units Re...

Страница 228: ...olution of this reading tracks the display resolution of the instrument An overflow and out of limit read as 9 9E37 zero check reads as 9 91E37 un derflow reads as 0 00E00 CHANnel Corresponds the inst...

Страница 229: ...mat real time timestamp is expressed as the days hours minutes and seconds between each reading while the relative timestamp is expressed as seconds between each reading When using the absolute format...

Страница 230: ...element is sent as follows Byte 1 Byte 2 Byte 3 Byte 4 Single precision Byte 1 Byte 2 ooo Byte 8 Double precision For reverse byte order the data format for each element is sent as follows Byte 4 Byt...

Страница 231: ...ee paragraph 3 19 6 Ohms ranges OUTPut2 Subsystem LSENse name OUTPut2 TTL 1 LSENse name Set polarity of line 1 OUTPut2 TTL2 LSENse name Set polarity of line 2 OUTPut2 TTL3 LSENse name Set polarity of...

Страница 232: ...st 2 Single channel 2 4 6 Multiple channels separated by commas 1 10 Range of channels 1 though 10 Range limits separated by a colon 1 5 7 Range entry and single entry separated by a comma After sendi...

Страница 233: ...arameters list scanlist where scanlist is the specified list of channels 1 to 10 to be scanned Query INTernal Query programmed scan list Description This command is used to define the scan list for th...

Страница 234: ...is used to measure channels that are controlled by an external switch system When EXTernal is selected the Model 6517A scans the channels of the external scanner card The ROUTe SCAN EXTernal command...

Страница 235: ...VSLimit b ROUTe SCAN VSLimit b Control 200V V Source Limit Parameters b 0 or OFF Disable 200V V Source Limit 1 or ON Enable 200V V Source Limit Query VSLimit Query state of 200V V Source limit Descrip...

Страница 236: ...p configuration such as range speed resolution filter and rel This eliminates the need to re program setup conditions every time you switch from one function to another 3 19 3 DATAcommands The data co...

Страница 237: ...Program Fragment 2 shows how to use OPC with the FRESh command Program Fragment 1 Demonstrates FRESh using a specified delay period Comments PRINT 1 output 27 syst pres 1 PRINT 1 output 27 syst zch o...

Страница 238: ...t aperture for Coulombs Parameters n 166 6666666667e 6 to 200e 3 Integration period in seconds DEFault Power line cycle integration 16 67msec for 60Hz power line 20msec for 50Hz and 400Hz power line M...

Страница 239: ...0 or OFF Disable auto aperture ONCE Enable and then disable auto aperture Query AUTO Query state of auto aperture Description These commands are used to enable or disable auto aperture for the specifi...

Страница 240: ...line synchronization is enabled see LSYNc command in SYSTem subsystem the in tegration period will not start until the beginning of the next power line cycle For example if a reading is triggered at t...

Страница 241: ...Nimum Query lowest measurement range RANGe UPPer MAXimum Query highest measurement range Description This command is used to manually select the measurement range for the specified measurement functio...

Страница 242: ...ange When a valid RANGe n command is sent autoranging disables When using auto range upper and lower range limits can be established to keep the instrument from autoranging to ranges that are not goin...

Страница 243: ...mA let the pa rameter n 0 001 or 1e 3 The lowest most sensitive range that can measure 1mA is the 2mA range Thus the 2mA range is selected as the upper range limit With this upper limit the instrument...

Страница 244: ...uery autorange on or off Description These commands are used to control autoranging With autoranging enabled the instrument au tomatically goes to the most sensitive range to perform the measurement s...

Страница 245: ...maximum expected reading is approximately 1G let the pa rameter n 1e9 The lowest most sensitive range that can measure 1G is the 2G range Thus the 2G range is selected as the upper range limit With t...

Страница 246: ...mit will set the amplitude to that limit The MINimum and MAXimum parameters are also affected by range and voltage limit Setting the V Source to the MINimum or MAXimum amplitude selects the greatest n...

Страница 247: ...EFerence query com mand returns the acquired reference value STATe b SENSe 1 VOLTage DC REFerence STATe b Control reference for Volts SENSe 1 CURRent DC REFerence STATe b Control reference for Amps SE...

Страница 248: ...Typically amps reference represents the leakage current in a test fixture Thus this command allows you to eliminate this leakage current for the resistance calculation 3 19 9 DIGits n SENSe 1 VOLTage...

Страница 249: ...DIGits n changes to the automatically selected resolution value Thus when auto resolution is disabled the instrument remains at the automatically selected resolution 3 19 10 AVERage commands The AVERa...

Страница 250: ...count for Ohms SENSe 1 CHARge AVERage COUNt n Specify filter count for Coulombs Parameters n 1 to 100 Specify filter count DEFault 10 MINimum 1 MAXimum 100 Query COUNt Query filter count COUNt DEFaul...

Страница 251: ...ecified function The ADVanced STATe commands are used to enable or disable the advanced filter The noise tolerance level is expressed as a percent of the last averaged reading In general if the noise...

Страница 252: ...12 DAMPing b SENSe 1 CURRent DC DAMPing b Control damping for Amps SENSe 1 RESistance DAMPing b Control damping for Ohms Parameters b 0 or OFF Disable damping 1 or ON Enable damping Query DAMPing Quer...

Страница 253: ...bs level for auto discharge Charge will reset when the charge reading reaches the specified level 3 19 15 XFEedback b SENSe 1 VOLTage DC XFEedback b Parameters b ON or 1 Enable external feedback OFF o...

Страница 254: ...efer to paragraph 2 7 2 FSELect name SENSe 1 RESistance RESistivity FSELect name Specify test fixture Parameters name M8009 Model 8009 Resistivity Test Fixture USER User supplied test fixture Query FS...

Страница 255: ...r test fixture Parameters name SURFace Surface resistivity VOLume Volume resistivity Query RSELect Query programmed resistivity measurement type Description This command is used to specify the resisti...

Страница 256: ...ing a user supplied test fixture This command is not needed when using the Model 8009 test fixture Kv is the effective area of the guarded electrode for the particular electrode arrangement em ployed...

Страница 257: ...ne is high when it is set to be true 1 or ON and low when it is set to be false 0 or OFF Conversely if polarity is active low the line is low when it is set to be true and high when it is set to be fa...

Страница 258: ...ange RANGe DEFault Query RST default range RANGe MINimum Query minimum range RANGe MAXimum Query maximum range Description This command is used to select the optimum range for the V Source Specifying...

Страница 259: ...bled V Source LO is connected to Ammeter LO This connection simplifies the connection requirements for ohms measurements and source voltage measure current measurements When disabled this connection i...

Страница 260: ...mmed for a positive tran sition PTR the corresponding bit in this register sets when the event occurs If the event is in stead programmed for a negative transition NTR the bit sets when the event beco...

Страница 261: ...for more information Bit B13 Fixture Lid Closed Set bit indicates that a fixture using the interlock cable is closed If no interlock cable is connected to the 6517A bit is also set If the interlock ca...

Страница 262: ...asurement has occurred PTR or a subsequent valid ohms measurement has occurred NTR Bits B11 Coulombs Summary Coul Set bit indicates that an invalid Coulombs measure ment has occurred or a subsequent v...

Страница 263: ...strument is calculating a reading PTR or that the calculation is completed NTR Bit B10 Idle Set bit indicates that the instrument is in the idle state PTR or has left the idle state to perform an oper...

Страница 264: ...q1 Set bit indicates that the instrument is in an arm layer PTR or that the instrument has exited from the arm layers NTR Bits B2 through B14 Not used Bit B15 Always zero Figure 3 25 Trigger Event Reg...

Страница 265: ...lear register NRf 128 Set bit B7 1 Set bit B0 256 Set bit B8 2 Set bit B1 512 Set bit B9 4 Set bit B2 1024 Set bit B10 8 Set bit B3 2048 Set bit B11 16 Set bit B4 4096 Set bit B12 32 Set bit B5 8192 S...

Страница 266: ...riggered SRA Sequence Reading Available BFL Buffer Full BHF Buffer Half Full BAV Buffer Available RUF Reading Underflow RAV Reading Available HL2 High Limit 2 LL2 Low Limit 2 HL1 High Limit 1 LL1 Low...

Страница 267: ...3 B2 B1 B0 2 10 1024 2 6 2 5 2 0 64 32 0 1 0 1 0 1 Bit Position Event Decimal Weighting Value Cal 1 0 1 Seq B11 10 11 2048 0 1 Calc 2 9 512 0 1 B15 B2 B1 B0 2 1 2 0 1 Bit Position Event Decimal Weight...

Страница 268: ...n the condition register Thus when an event is programmed for a positive transition the appropriate bit in the corresponding event register sets when the cor responding bit in the condition register c...

Страница 269: ...1 B0 2 9 2 8 2 7 2 5 2 4 2 3 2 2 2 1 2 0 32 0 1 Bit Position Event Decimal Weighting Value Value 1 Enable Positive Transition 0 Disable Positive Transition LL1 2 0 1 Events VSC V Source Compliance FLC...

Страница 270: ...ng Value Value 1 Enable Positive Transition 0 Disable Positive Transition Amp 2 0 1 Events Warn Command Warning Cal Calibration Summary Seq Sequence Test Summary Temp Temperature Coul Coulombs Amp Amp...

Страница 271: ...a sequence test is running Figure 3 36 Operation Transition Filter Value 1 Enable Positive Transition 0 Disable Positive Transition A Positive Transition PTR Register Value 1 Enable Negative Transitio...

Страница 272: ...igger Layer B15 B2 B1 B0 2 1 2 0 1 Bit Position Event Decimal Weighting Value Value 1 Enable Positive Transition 0 Disable Positive Transition A Positive Transition PTR Register Seq1 B15 B2 B1 B0 0 1...

Страница 273: ...er B15 B2 B1 B0 2 1 2 0 1 Bit Position Event Decimal Weighting Value Value 1 Enable Positive Transition 0 Disable Positive Transition Seq1 A Positive Transition PTR Register B15 B2 B1 B0 2 1 2 0 1 Bit...

Страница 274: ...yer 2 Lay2 B15 B3 B2 B1 B0 2 2 4 2 1 2 0 1 0 1 Bit Position Event Decimal Weighting Value Value 1 Enable Positive Transition 0 Disable Positive Transition Lay1 A Positive Transition PTR Register Lay2...

Страница 275: ...to program the negative transition NTR registers A negative tran sition is defined as a 1 to 0 state change in the condition register Thus when an event is pro grammed for a negative transition the a...

Страница 276: ...fixture lid is opened V source compliance Sets B14 when V source comes out of compliance Effects of negative transitions on the Questionable Event Register Negative transition effect on Questionable e...

Страница 277: ...current operating status of the instrument See EVENt for register bit descriptions Note from the status structure paragraph 3 8 that the condition registers precede the transition filters Thus only th...

Страница 278: ...command performs the same function as the SYS Tem ERRor query command see System subsystem ENABle list STATus QUEue ENABle list Enable messages for Error Queue Parameters list numlist where numlist is...

Страница 279: ...occur Sta tus messages are not enabled and will not go into the queue This command is used to specify which messages you want disabled Disabled messages are prevented from going into the Error Queue M...

Страница 280: ...t conditions are listed in the SCPI tables Tables 3 4 through 3 16 With one of the SAV parameters selected the instrument powers on to the setup that is saved in the specified memory location using th...

Страница 281: ...ycle the integration period will not start until that power line cycle is completed The integration period starts when the positive going sine wave crosses zero With line synchronization disabled the...

Страница 282: ...lows syst key 8 key 8 The queue for the KEY query command can only hold one key press When KEY is sent over the bus and the Model 6517A is addressed to talk the key press code number for the last key...

Страница 283: ...ime results in an error and the pre vious time is retained TIME returns the time to the nearest hundredth of a second 3 22 10 TSTamp commands The following commands are used to configure and control t...

Страница 284: ...ect STATe b SYSTem ZCORrect STATe b Control Zero Correct Parameters b 0 or OFF Disable Zero Correct 1 or ON Enable Zero Correct Query ZCORrect Query state of Zero Correct Description This command is u...

Страница 285: ...to include the temper ature reading in the data string See paragraphs 3 17 FORMat ELEMents and 3 23 TRACe ELEMents HSControl b SYSTem HSControl b Control humidity readings Parameters b 0 or OFF Disabl...

Страница 286: ...b Enable or disable front panel keys Parameters b 0 or OFF Disable local lockout 1 or ON Enable local lockout Query LLOCkout Query state of local lockout Description This command is used to enable or...

Страница 287: ...e each event will cause a single reading to occur With IMMediate selected the trigger event will be satisfied immediately In IMMediate readings will be made continuously With MANual selected the trigg...

Страница 288: ...mmarized in Table 3 14 See paragraph 2 16 for more information about the buffer TRACe DATA The bar indicates that TRACe or DATA can be used as the root command for this subsystem From this point on th...

Страница 289: ...size to that value If the TRIGger COUNt is greater than the maximum buffer size the buffer is adjusted to the maximum size and the following message is displayed 314 Buffer sizing error sized to MAX...

Страница 290: ...igger event oc curs subsequent readings will then be stored starting at buffer location 26 and continue until buffer location 100 is filled Storage stops after buffer location 100 is filled The result...

Страница 291: ...l TRIG key provides the pre trigger event CONTrol name TRACe FEED CONTrol name Specify buffer control Parameters name NEVer Disables buffer storage NEXT Fills buffer and stops ALWays Continuously stor...

Страница 292: ...trol source event to start the test sequence 3 23 6 TSTamp FORMat name TRACe TSTamp FORMat name Select timestamp format Parameters name ABSolute Reference to first buffer reading DELTa Time between bu...

Страница 293: ...ken out of the idle state At the conclusion of all programmed operations the instrument returns to Arm Layer 1 POFLag name INITiate POFLag name Control No Operation Pending flag Parameters name INCLud...

Страница 294: ...ount to 99999 Query COUNt Queries programmed count COUNt DEFault Queries RST default count COUNt MINimum Queries lowest allowable count COUNt MAXimum Queries largest allowable count Description These...

Страница 295: ...eration continues when a GPIB trigger GET or TRG is sent With TLINk selected operation contin ues when an input trigger via the Trigger Link is received With EXTernal selected operation continues when...

Страница 296: ...output triggers With SSYNchro nous selected a single trigger line is used for both input and output triggers Note that the arm and scan layers only use the asynchronous Trigger Link mode and therefore...

Страница 297: ...e Query programmed input line Description These commands are used to select an input line for the asynchronous Trigger Link of the spec ified layer Keep in mind that asynchronous Trigger Link input an...

Страница 298: ...1994 to 2093 Specify year mo 1 to 12 Specify month day 1 to 31 Specify day Query DATE Query the date Description This command is used to set the date for the RTCLock control source Setting an invalid...

Страница 299: ...e programmed source event occurs see TSOurce When using this command for the Alternating Polarity High Resistance Resistivity Measurements wait at least 0 3 seconds before using the TRG trigger comman...

Страница 300: ...he bus With EXTernal selected the test will start when an external trigger is received via the EXT TRIG IN connector on the rear panel With TLINk selected the test will start when an external trigger...

Страница 301: ...test Parameters NRf 100 0 to 100 0 Volts 100V range 1000 to 1000 Volts 1000V range Query STEP Query step voltage Description This configuration command is used for the following tests Diode Leakage T...

Страница 302: ...istance Test Resistor Voltage Coefficient Test Surface Resistivity Test Volume Resistivity Test Surface Insulation Resistance Test This command is used to specify the bias voltage for the specified te...

Страница 303: ...99 9 seconds Query PDTime Query pre discharge time Description This configuration command is used for the following tests Surface Resistivity Test Volume Resistivity Test This command is used to speci...

Страница 304: ...quare wave sweep test Parameters NRf 100 0 to 100 0 Volts 100V range 1000 to 1000 Volts 1000V range Query HLEVel Query high level voltage Description This configuration command is used for the followi...

Страница 305: ...arameters NRf 1000 to 1000 Offset voltage Query OFSVoltage Query offset voltage Description This command is used to specify the offset voltage for the Alternating Polarity Resistance Resistivity test...

Страница 306: ...rval NRf TSEQuence CIResistance SPINterval NRf Parameters NRf 0 to 99999 9 sec Interval between measurement points Query SPINterval Query interval Description This command specifies the time interval...

Страница 307: ...EQ ARM status Wait for SRQ buffer full WaitSRQ IF NOT srq THEN GOTO WaitSRQ CALL spoll 27 poll status IF poll AND 64 0 THEN GOTO WaitSRQ Dump buffer readings to computer CRT CALL send 27 TRACE DATA st...

Страница 308: ...t SEND RECEIVE to send and receive commands or select TALK ONLY to send readings directly to a listener i e serial printer Select CONTROL Select SEND RECEIVE or TALK ONLY 8 Set the BAUD rate number of...

Страница 309: ...received before previous data can be read 803 RS 232 Break detected Message indicates that a Break occurred device clear occurs 804 RS 232 Noise detected Noisy signals could corrupt the data 805 Inval...

Страница 310: ...A Specifications...

Страница 311: ...A Specifications...

Страница 312: ...T BIAS CURRENT 3fA at TCAL Temperature coefficient 0 5fA C INPUT BIAS CURRENT NOISE 750aA p p capped input 0 1Hz to 10Hz bandwidth damping on Digital filter 40 readings INPUT VOLTAGE BURDEN at TCAL 1...

Страница 313: ...ale of the current range used Using Keithley 8002A or 8009 fixture REPEATABILITY IBG R VALT 0 1 1 instrument temperature constant 1 C ACCURACY VSRCErr IMEASErr R VALT where IBG is a measured typical b...

Страница 314: ...nd Ohms modes inverting when measuring Amps or Coulombs Output impedance 10k PREAMP OUTPUT Provides a guard output for Volts measurements Can be used as an inverting output or with external feedback i...

Страница 315: ...ac curacy for both Auto V Source Ohms and Manual V Source Ohms Auto V Source ohms From the specifications Auto V Source Ohms accuracy is calculated as follows Accuracy rdg counts The following exampl...

Страница 316: ...me programmed under normal measurement conditions 1 PLC same range filters off etc VALT is the alternating polarity voltage used VSRCErr is the accuracy in volts of the volt age source using VALT as t...

Страница 317: ...No Extended Talker capability No Extended Listener capability T Talker Function The ability of the instrument to send data over the bus to other devices is provided by the T func tion Instrument talk...

Страница 318: ...3 4 5 6 7 00 01 02 03 04 05 06 07 NUL SOH STX ETX EOT ENQ ACK BEL GTL SDC PPC 16 17 18 19 20 21 22 23 10 11 12 13 14 15 16 17 DLE DC1 DC2 DC3 DC4 NAK SYN ETB LLO DCL PPU 8 9 10 11 12 13 14 15 08 09 0...

Страница 319: ...MTA 7 MTA 8 MTA 9 MTA 10 MTA 11 MTA 12 MTA 13 MTA 14 MTA 15 48 49 50 51 52 53 54 55 30 31 32 33 34 35 36 37 0 1 2 3 4 5 6 7 MLA 16 MLA 17 MLA 18 MLA 19 MLA 20 MLA 21 MLA 22 MLA 23 80 81 82 83 84 85 86...

Страница 320: ...0 71 72 73 74 75 76 77 p q r s t u v w MSA 16 PPD MSA 17 PPD MSA 18 PPD MSA 19 PPD MSA 20 PPD MSA 21 PPD MSA 22 PPD MSA 23 PPD 104 105 106 107 108 109 110 111 68 69 6A 6B 6C 6D 6E 6F h i j k l m n o M...

Страница 321: ...ta on the bus and indi cates that the data is available to the listener 3 The listener aware that the data is available accepts the data and then indicates that the data has been accepted 4 The talker...

Страница 322: ...Secondary addresses lie in the range of 60 7F Note however that many devices including the Model 6517A do not use secondary addressing Once a device is addressed to talk or listen the appropriate bus...

Страница 323: ...D have the correct status If the source is a controller NRFD and NDAC must be stable for at least 100nsec after ATN is set true Because of the possibility of a bus hang up many con trollers have time...

Страница 324: ...arks end of transmission Clears interface Defines data bus contents Controlled by external device Multiline Universal LLO Local Lockout DCL Device Clear SPE Serial Enable SPD Serial Poll Disable Low L...

Страница 325: ...e actual command byte is ob tained by ORing the primary address with 20 TAG Talk Address Group The talk commands are de rived from the primary address by ORing the address with 40 Talk commands are us...

Страница 326: ...0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 NUL SOH STX ETX EOT ENQ ACK BEL BS HT LF VT FF CR SO SI GTL SDC PPC GET TCT DLE DC1 DC2 DC3 DC4 NAK SYN ETB CAN EM SUB ESC FS GS RS US LLO DCL PPU SPE SPD SP 0 1...

Страница 327: ...ypical addressed command sequence Table D 4 Typical common command sequence Step Command ATN state Data bus ASCII Hex Decimal 1 2 3 4 UNL LAG SDC Set low Stays low Stays low Returns high EOT 3F 3B 04...

Страница 328: ...the instrument is being ad dressed but it is set high while sending the common com mand string IEEE command groups Command groups supported by the Model 6517A are listed in Table D 5 Common commands...

Страница 329: ...unit Queries that generate a response when parsed Queries that generate a response when read Coupled commands Functional elements required for SCPI commands Buffer size limitations for block data Synt...

Страница 330: ...r overlapped commands Operation complete messages See paragraph 3 11 4 Not applicable Not applicable See paragraphs 3 11 9 3 11 8 3 11 10 and Tables 3 4 through 3 16 See paragraph 3 11 14 See paragrap...

Страница 331: ...AMO READ OFF NEV TRAC POIN TRAC FEED PRET AMO PERC 100 TRAC FEED PRET AMO PERC TRAC FEED PRET AMO READ TRAC FEED CONT TRAC POIN TRAC FEED PRET AMO PERC 100 NEV TRAC FEED PRET AMO READ TRAC FEED PRET...

Страница 332: ...N CURR DC AVER ADV STAT CURR DC AVER ADV NTOL 12 OFF varies per function varies per function varies per function varies per function varies per function CURR DC METH is ICIR CURR DC METH is ICIR CURR...

Страница 333: ...SEL NONE ROUT OPEN ROUT SCAN LSEL NONE the command actually opens a channel ROUT OPEN ALL ROUT SCAN LSEL NONE ROUT SCAN INT ROUT SCAN LSEL INT Valid function command words i e VOLT DC RESistance etc T...

Страница 334: ...Conformance Information F 1 Introduction The Model 6517A complies with SCPI version 1991 0 Ta bles 3 4 through 3 16 list the SCPI confirmed commands and the non SCPI commands implemented by the Model...

Страница 335: ...20pA 200T 2nC 2V 2V 20pA 20T 2nC 2V 20V 200pA 2T 20nC 20V 200V 2nA 200G 200nC 200V 200V 20nA 20G 2 C 200V 200V 200nA 2G 2 C 200V 200V 2 A 200M 2 C 200V 200V 20 A 20M 2 C 200V 200V 200 A 2M 2 C 200V 2...

Страница 336: ...Reading with prefix NDCV 1 23456E 00 Reading without prefix 1 23456E 00 Reading with prefix and buffer suffix if in B1 NDCV 1 23456E 00 012 Trigger Mode T0 T1 T2 T3 T4 T5 T6 T7 Continuous trigger by t...

Страница 337: ...tored Top display data Bottom display data Attributes of top display characters Attributes of bottom display characters YY LFCR CRLF 0 LF 0 CR 00 None 1 blinking character 0 other Hit Key Hn Hit front...

Страница 338: ...NABle NRf 3 114 ERRor 3 129 ESE NRf event enable 3 28 ESE event enable query 3 28 ESR event status register query 3 29 EVENt 3 109 FEED Commands 3 139 FORMat subsystem 3 75 FREE 3 137 FUNCtion name 3...

Страница 339: ...ls 3 134 Accuracy calculations A 4 Advanced trigger configuration 2 77 Amps configuration 2 27 Analog outputs 2 50 ASCII Character Codes and IEEE 488 Multiline Interface Command Messages C 1 B Basic m...

Страница 340: ...88 bus connections 3 2 IEEE 488 Bus Overview D 1 IEEE 488 Conformance Information E 1 IEEE 488 primary address 2 4 IEEE 488 Reference 3 1 IEEE 488 status indicators 3 7 IFC interface clear 3 5 Informa...

Страница 341: ...e construction 2 54 Signal oriented measurement commands 3 38 Sourcing options 2 46 SPE SPD serial polling 3 6 Specifications 1 2 A 1 Status and error messages 2 5 Status byte and service request SRQ...

Страница 342: ...stable Will not read applied input Overload Calibration only Certificate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measurement system...

Страница 343: ...de Great Britain Theale 0118 929 7500 Fax 0118 929 7519 www keithley co uk India Bangalore 91 80 2212 8027 Fax 91 80 2212 8005 www keithley com Italy Milano 02 48 39 16 01 Fax 02 48 39 16 28 www keith...

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