Kaufman & Robinson eHF 3005A, Руководство пользователя

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CONTENTS iiI
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
FIGURES
2-1 Front view of controller for End Hall ion source . . . . . . . . . . . . . . . . . . . . . .2-4
2-2 Rear view of controller for End Hall ion source . . . . . . . . . . . . . . . . . . . . . . 2-5
3-1 Front view of controller for End Hall ion source . . . . . . . . . . . . . . . . . . . . . . 3-6
3-2 Rear view of controller for End Hall ion source . . . . . . . . . . . . . . . . . . . . . . 3-7
5-1 Schematic block diagram of ion source and controller . . . . . . . . . . . . . . . . . 5-2
TABLES
2-1 Controller Speci fi cations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
2-2 Controller Speci fi cations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
3-1 Controller Inventory List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3-2 Input Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3-3 Pin descriptions for the rear panel DB-15 female MFC output connectors . .3-4
6-1 Pin descriptions for the female DB-25 connector on the Auto Controller . . . 6-2
6-2 Remote program selection using pins 16 and 34 on the DB-37 . . . . . . . . . . 6-4
6-3 Pin descriptions for the analog inputs on the DB-37 connector . . . . . . . . . . 6-6
6-4 Pin descriptions for the analog outputs on the DB-37 connector . . . . . . . . . .6-6
6-5 Run Fault and Beam Good pin descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-7
6-6 Pin descriptions for the female DB-37 connector on the Auto Controller . . . 6-8
6-7 Interlock connections for the auto controller . . . . . . . . . . . . . . . . . . . . . . . . . . .6-11
7-1 Help codes and error messages for the auto controller . . . . . . . . . . . . . . . . 7-1
7-2 Help codes and error messages for the Filament Power Supply . . . . . . . . . 7-7
7-3 Help codes and error messages for the Discharge Power Supply . . . . . . . . 7-9