GENERAL OPERATION 5-1
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
5 GENERAL OPERATION
The quickest way to start operation of the KRI Ion Source and its Controller is to
follow the sequence described in Section 4, Initial Operation. This section gives a
general overview of the ion source power supplies and there interconnection with
the ion source.
5.1 Description of Ion-Source/Controller Components
The operation of the End Hall Ion Source with its Controller can be generally
understood by reference to the schematic block diagram of Fig. 5-1.
The important part of the ion source for electrical operation is the anode and
the
fi
lament cathode. The ion source body is grounded and no isolator is re-
quired in the gas line connection to the ion source. More complete descriptions
of the ion source, including the mechanical construction, can be found in the
manual for those components.
The commonly used symbols for the currents and voltages are also shown in
Fig. 5-1. The voltage and current of the Filament Power Supply are V
c
, I
c
, And
I
e
. The Discharge Pwer supply voltage is V
d
, it is the anode voltage relative to
ground. The current in this power supply is the discharge current, I
d
. The dis-
charge current and voltage has sometimes been given as I
a
and V
a
, but only the
symbols I
d
and V
d
will be used herein.
A Gas and Mass Flow Controller regulates the
fl
ow of gas to the ion source.
Because different gases can be used in different applications, the de
fi
nition of
this controller depends on the application.
