REMOTE/AUTOMATED CONTROL 6-5
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
of zero also de-energizes the gas relay on the rear panel and sends the
valve off command to the mass
fl
ow controller. The gas relays are also de-
energized and the valve off commands are sent to the mass
fl
ow control-
lers when the Auto Controller is in standby.
The gas channel setpoints function differently depending on the operat-
ing mode selected. The Auto Gas, Manual Gas and Gas Only modes are
selected from the front panel. The functions of the gas setpoints are de-
scribed below for these three operating modes.
●
Remote Gas Channel Setpoints using Auto Gas Mode
The remote gas setpoints are not available when using the auto gas mode,
instead the starting gas
fl
ows are established by preprogramming them
from the front panel for each program.
●
Remote Gas Channel Setpoint using Manual Gas Mode
The remote gas setpoints are not available when using the manual gas
mode, instead the starting gas
fl
ows are established by preprogramming
them from the front panel for each program.
●
Remote Gas Channel Setpoints Using the Gas Only Mode
When the Gas Only mode is selected from the front panel, the Auto Con-
troller continuously responds to the applied gas setpoints once the Auto
Controller is enabled.
6.2.3 Remote Analog Setpoint Option on the DB-37 Connector
The remote analog setpoint option allows active control over the setpoints
while the Auto Controller is enabled. The four stored programs are not
available with the remote analog setpoint option.
Switch the front panel from local to remote and also connect Remote set-
point pin 17 to common pin 7 or 8 on the DB-37. This selects the remote
setpoint options for both the DB25 and the DB-37 ports. The remote analog
set points are applied to the analog pins described below in Table 6-3. To
enable the system, connect the remote enable pin 36 to common pin 7 or
8 on the rear panel DB-37 connector.
The starting gas setpoints are taken from the front panel when operating in
Auto Gas mode. The auto controller then automatically adjusts the gas to
