4-8 INITIAL OPERATION
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• Put the Discharge and Filament power supplies into Standby in that
order by pressing the white Enable/Standby button on each control-
ler.
• Put the gas
fl
ow into Standby by pressing the white Enable/Standby
button on the auto controller.
Restarting the ion source in the gas only mode consists of, enabling the
Auto Controller, Filament Power Supply and Discharge Power supply
in that order. Slight variations in discharge voltages may be seen while
the source is reaching operating temperature. The variations should be
acceptable for most cleaning or ion-assist applications.
4.3.2.2 Constant Voltage Mode
The operating condition selected for this demonstration is with a 2.5
A, 150 V discharge which is Constant Voltage Mode operation. The
following conditions are based on a vacuum pump speed of 1600 liters
per second. Operating parameters for other pump speeds and gases can
be found in the Ion Source Manual.
Note that the operating range of the ion source may be limited by the
vacuum facility pump speed or other process that take place while the
ion source is running.
• Select Gas 1 using the white Gas Channel Select button on the Auto
Controller and then turn the Gas Adjust knob to 15 sccm.
• Turn the knob on the Filament power supply until 2.7 amps is indi-
cated in the Emission Amps display.
• Use the white Select button on the Discharge Power Supply to select
Volts. Turn the knob on the Discharge Power Supply until the dis-
charge voltage is set to 150 volts as indicated on the Discharge Volts
display.
• Use the white Select button on the Discharge Power Supply to se-
lect Amps. Turn the knob on the Discharge Power Supply until the
discharge current is set to maximum current as indicated on the Dis-
charge Amps display.
• Press the white Enable/Standby button on the Auto Controller.
