INSTALLATION 3-5
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
Pin
Number
Description
12
Not used.
13
Not used.
14
Chassis Ground.
15
Not used.
3.5 Connect Controller to Ion Source
If the Ion Source has not been installed in the vacuum chamber, do so now,
using the Installation/Inspection description in the ion source manual. The ion
source installation procedures cover installation of the ion source, vacuum
cables, gas tubing inside the vacuum chamber, as well as electrical and gas
feedthroughs in the wall of the vacuum chamber. Once installed, connect the
operating cable to the electrical feedthrough.
• As the
fi
nal installation step, turn off the front panel power switches on the
Auto Controller, Filament Power Supply and Discharge Power Supply and
then plug the power cables of the individual controllers into appropriate in-
put power sources. See table 3-1 above for input power requirements.
