INITIAL OPERATION 4-7
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Controller and then turn the Gas Adjust knob to 10 sccm.
• Turn the knob on the Filament power supply until 2.7 amps is indicat-
ed in the Emission Amps display. Note that the
fi
lament emission is
usually set equal to or up to 10% greater than the discharge current.
• Use the white Select button on the Discharge Power Supply to se-
lect Volts. Turn the knob on the Discharge Power Supply until the
discharge voltage is set to maximum as indicated on the Discharge
Volts display.
• Use the white Select button on the Discharge Power Supply to select
Amps. Turn the knob on the Discharge Power Supply until the dis-
charge current is set to 2.5 amps as indicated on the Discharge Amps
display.
• Press the white Enable/Standby button on the Auto Controller.
• Press the white Enable/Standby button on the Filament Power Sup-
ply.
• Press the white Enable/Standby button on the Discharge Power Sup-
ply.
• Adjust the gas
fl
ow using the Gas Adjust Knob on the Auto Controller
until the discharge voltage is approximately 120 V.
• Operate the ion source for at least 10 minutes to clean any contami-
nates from the ion source that may have been introduced while at
atmosphere.
• The discharge voltage will vary slightly during this time. Adjust the
gas
fl
ow after the 10 minutes to obtain a discharge voltage of ap-
proximately 120 V.
• At this point the operating conditions can be saved as a program to
be used later in the Auto Gas mode or the Manual Gas mode. To do
this,
fi
rst press the white Program Select Button repeatedly until the
desired program number is selected as indicated by the numbered
red LED’s Next press and hold the white Acquire Setpoints button
until the red numbered LED that was selected stops
fl
ashing.
