REMOTE/AUTOMATED CONTROL 6-9
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Pin
Number
Description
1
Emission Current Output. 0-5 volts corresponds with 0 to
the maximum emission current in amps for the Filament
Power Supply. Referenced to pin 7 or 8.
2
Filament Current Output. 0-5 volts correspond with 0-40
amps of
fi
lament heating current for the Filament Power
Supply. Referenced to pin 7 or 8.
3
Discharge Voltage Setpoint. 0-5 volts corresponds with 0 to
the maximum output voltage for the Discharge Power Sup-
ply. Referenced to pin 7 or 8.
4
Emission Current Setpoint. 0-5 volts corresponds with 0 to
the maximum emission current in amps for the
fi
lament con-
troller being used. Referenced to pin 7 or 8.
5
Aux 12 volts. Referenced to pin 7 or 8.
6
Filament Voltage Output. 0-5 volts corresponds with 0-50
volts for the Filament Power Supply. Referenced to pin 7 or
8.
7
Common.
8
Common.
9
Channel 1 Gas Flow Output. 0-5 volts corresponds with 0 to
the maximum output in sccm for the channel 1 MFC. Refer-
enced to pin 27.
10
Channel 3 Gas Flow Output. 0-5 volt corresponds with 0 to
the maximum output in sccm for the channel 3 MFC. Refer-
enced to pin 27.
11
Channel 1 Setpoint. 0-5 volts corresponds with 0 to the
maximum output for the MFC connected to Channel 1. Ref-
erenced to pin 13.
12
Channel 3 setpoint. 0-5 volts corresponds with 0 to the max-
imum output for the MFC connected to Channel 3. Refer-
enced to pin 13.
13
Setpoint Common.
16
Program Select 0. This pin is the 0 bit for selecting programs
1 through 4 using negative logic levels of 0 and 5 volts
17
Remote Setpoint Select. When this pin is connected to com-
mon pin 7 or 8, the remote setpoints are enabled and the
four programs are not used.
