4-2 INITIAL OPERATION
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4.3.1.1 Program Select
The Auto controller is shipped with four programs stored. Pressing and
releasing the white Program Select button will increment to the next
program as indicated by the numbered red LED’s on the left side of the
Program Select button. The program values will be displayed on the front
panels for each program. Program 1 may already be selected when the
unit is powered on, if it is not, then press and release the program select
button until the red LED for program 1 is on for the initial operation.
The other programs can still be viewed after the Auto Controller is
enabled with one of the programs running.
When a program is running
and “Program Select” is pressed, the setpoint values of the next
program will be displayed for two seconds before switching to
that program.
This gives time to review the programs before deciding
which one to run. Pressing again within two seconds moves to the next
program, etc. Cycling around to the program that’s currently running will
continue operation without change. Otherwise, the parameters will be
ramped to the newly selected program.
4.3.1.2 Gas Setpoints
There are four gas channels. Pressing and releasing the Gas Channel
Select button will increment to viewing the gas setpoint in sccm, for the
next gas channel for each program. In the Auto Gas mode, the gas is
automatically adjusted to maintain constant discharge current and
voltage once the ion source is running. The setpoints act as the starting
point from which the gas is adjusted. When more than one gas is blended
together, a constant ratio of the gas is adjusted based on the initial gas
setpoints to maintain the discharge voltage and current.
The gas
fl
ow may be adjusted by selecting the gas channel and turning
the knob on the front panel of the gas controller before the auto controller
is enabled. For the initial operation, leave the gas at the programmed
setpoint(s).
4.3.1.3 Emission Setpoint
The setpoint for the emission current in amps is shown in the display
labeled Emission Amps on the Filament Power supply. Notice that the
yellow setpoint LED below the display is on to indicate that the setpoint
is being viewed. Once the Auto Controller is enabled, the run value will
be displayed and the green run LED will be on.
