6-22 REMOTE/AUTOMATED CONTROL
_______________________________________________________________________
Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
Example: P1:DSV 200 – Set the Discharge voltage for program 1
to 200 volts.
If the auto controller is in the ‘Auto Gas’ mode, then the setpoint cur-
rent (DSI) will be the setpoint Discharge current. The gas
fl
ow will
be the starting
fl
ow. Once enabled, the gas
fl
ow will be automatically
adjusted to maintain the discharge current.
If the auto controller is in the “Manual Gas’ mode; either the Dis-
charge current (DSI) or Discharge voltage (DSV) should be set to
maximum, while the other is set to the desired operating value. The
gas
fl
ow determines the discharge parameter that has been set to
maximum.
If the Auto Controller is in the ‘Gas Only’ mode, all the setpoints
and queries will still be valid, but only the gas will be enabled when
issuing the OUT:1 command. Issuing the OUT:0 command will dis-
able the gas. In using the ALL parameter to set targets, the list of
values must be comma delimited and appear in the order shown
below. Any value that is to remain unchanged can be omitted, but
the comma delimiter between parameters must be included in the
input string. In the second example, GS2 remains unchanged in
the target program. In ‘Gas Only’ mode, the supply targets are still
active, so that a series of eight comma delimiters will need to follow
the command if the ALL parameter is used.
Example: P1:ALL GS1, GS2, GS3, GS4, , , , , <cr><lf>
Example: P1:ALL GS1, , GS3, GS4, , , , ,<cr><lf>
The Auto Controller does not know what (values) are acceptable for
the power supply <parameters>. If (values) larger than the output
for the power supplies are programmed, the auto controller will set
those (values) to the maximum value.
However, this is not true for the
gas channel values. If a gas channel (value) is larger than the de
fi
ned
maximum, the auto controller will respond with:
“Target value greater than de
fi
ned max”.
If a gas channel maximum is set to 0 or off, then sending a (value) to that
gas channel will generate the following response:
“Gas Channel x disabled” where x is the gas channel number.