Kaufman & Robinson eHF 3005A, Руководство пользователя

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GENERAL DESCRIPTION AND SPECIFICATIONS 2-3
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
Additional information can be found in the individual manual for the Discharge
Power Supply.
2.4 Mass Flow Controller(s)
The mass fl ow controller or controllers are supplied when ordered as a com-
plete system. The controllers are connected to the gas feed for the ion sources
as close as possible to the gas feedthrough on the vacuum system. Up to four
mass fl ow controllers can be attached to the Auto Controller. The gas fl ows can
be set as a constant ratio or they can be set independently.
The Auto Controller can be used with a variety of mass fl ow controllers. How-
ever, the cables may vary depending on the mass fl ow controller provided in
the order. The pin descriptions for the female DB-15 connectors on the back of
the Auto Controller are given below in table 2-2.
Table 2-2. Pin descriptions for the DB-15 MFC connectors on the
Auto Controller.
Pin
number Description
1 Command Common. Return for 0-5 volt output to MFC on pin 8.
2 Mass fl ow read back from MFC. 0-5 volt signal from the MFC
referenced to pin 10.
3 No contact.
4 Valve off. Connected to common when MFC setpoint is set to
zero or when unit is in the standby mode, otherwise fl oated.
5 +15 volts DC for MFC supply voltage, referenced to pin 9.
6 - 15 volts DC for MFC supply voltage, referenced to pin 9.
7 No contact.
8 Setpoint out to MFC. 0-5 volts, referenced to pin 1.
9 Common for MFC supply voltages on pins 5 and 6.
10 Read back common. Reference for the 0-5 volt mass fl ow read-
back from the MFC on pin 2.
11 No contact.
12 No contact.
13 No contact.
14 Chassis ground
15 No contact.