REMOTE/AUTOMATED CONTROL 6-23
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
It is very important to understand the operating limits of the Ion
Source to prevent damage. Review the ion source manual to
determine appropriate operating conditions. Contact KRI for
assistance in establishing operating conditions if necessary.
6.4.4.10 R - Monitor Command for Reading the Actual Feedback Values
The R command is used to get the actual feedback values from the auto
controller. It uses the same parameters as those described above for the
P command, except that there is no program number required and the ?
character is not used.
R:<parameter> – Get the current running (value) of <parameter>
Values are reported in Amps, Volts or sccm, appropriate for
the selected parameter(s).
Example: R:GS2<cr><lf> – Get current value of Gas Channel
2 feedback.
Example: R:ALL<cr><lf>
Example response in ‘Verbose’ mode:
“Gas Channel 1 = 18.300
Gas Channel 2 = 0.000
Gas Channel 3 = 0.000
Gas Channel 4 = 10.000
Discharge Volts = 200
Discharge Amps = 3.000
Emission Amps = 3.000
Filament Volts = 22.000
Filament Amps = 19.200”
In ‘Terse’ mode the response will be a comma delimited
string of values only in the same as order shown above for
the ‘Verbose’ mode.
6.4.4.11 CFG? – Query current system con
fi
guration
The CFG? Command is a query of what the Auto-Controller thinks the
current con
fi
guration is based on the initial setup.
