Kaufman & Robinson eHF 3005A Скачать руководство пользователя страница 5 | Manualshive

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SAFETY 1-1

_______________________________________________________________________

Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com

1 SAFETY

Caution: High Voltage. Only technically quali

fi

ed personnel should install,

maintain, and troubleshoot the equipment described herein.

The Auto Controller and power supplies for the End Hall ion source must be
installed in a grounded 19-inch (483 mm) rack mount cabinet before opera-
tion.

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Содержание eHF 3005A

Страница 1: ...350 Internet www ionsources com Copyright 2011 by Kaufman Robinson Inc All rights reserved No part of this publication may be reproduced without written permission February 2011 VERSION 4 AUTOMATED CO...

Страница 2: ...2 3 4 Connections Between Controller Components 3 2 3 5 Connect Controller to Ion Source 3 5 4 INITIAL OPERATION 4 1 4 1 Gas 4 1 4 2 Power On 4 1 4 3 Operating Mode 4 1 4 3 1 Auto Gas Mode 4 1 4 3 1 1...

Страница 3: ...m Good on the DB 37 Connector 6 7 6 2 6 Description of the DB 37 pins 6 8 6 3 Interlock 6 11 6 4 RS 232 Serial Interface 6 12 6 4 1 Interface cable 6 11 6 4 2 Communication settings 6 11 6 4 3 Communi...

Страница 4: ...Controller Inventory List 3 1 3 2 Input Power Requirements 3 2 3 3 Pin descriptions for the rear panel DB 15 female MFC output connectors 3 4 6 1 Pin descriptions for the female DB 25 connector on th...

Страница 5: ...s CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com 1 SAFETY Caution High Voltage Only technically qualified personnel should install maintain and troubleshoot the equipment descr...

Страница 6: ...eight and dimensions of each controller are outlined in the following table This section gives a general overview of the Auto Controller package with more detailed information in the later sections of...

Страница 7: ...s flow controllers using cables that connect to the rear panel Four relay contacts are also available on the rear panel if additional positive shut off valves are desired for the gas feed system The A...

Страница 8: ...ty of mass flow controllers How ever the cables may vary depending on the mass flow controller provided in the order The pin descriptions for the female DB 15 connectors on the back of the Auto Contro...

Страница 9: ...S _______________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 I...

Страница 10: ...e Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com GENERAL DESCRIPTION AND SPECIFICATIONS 2 5 MFC Cable Auto Controller Filament Discharge Operating Cable Ope...

Страница 11: ...n addition to the shipping company to report the damage see Section 8 Retain packaging materials for any future shipments Table 3 1 is an inventory list for the controller package The inventory list i...

Страница 12: ...nt Power Supply 115 V 1 50 60 Hz 208 230 V 1 50 60 Hz 15 A 7 5 A Discharge Power Supply 115 V 1 50 60 Hz 208 230 V 1 50 60 Hz 15 A 15 A The discharge power supply output will be limited to 1500 watts...

Страница 13: ...the rear panel of the Discharge Power Supply and tighten the screw above the appropriate connector Attach the ground connections using the green striped Yellow wire with the three ring terminals as f...

Страница 14: ...r is used that cable can be attached at this time to either the female DB 25 connector the female DB 37 connec tor or the female DB 9 connector These remote interfaces require knowl edge of the ion so...

Страница 15: ...the Installation Inspection description in the ion source manual The ion source installation procedures cover installation of the ion source vacuum cables gas tubing inside the vacuum chamber as well...

Страница 16: ..._______________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com...

Страница 17: ...RS 232 Remote iMII Analog Remote KRI Analog Remote INSTALLATION 3 7 _______________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Dri...

Страница 18: ...act Kaufman Robinson Inc The bottle regulator and mass flow controller s should be installed and gas lines evacuated as described in Section 2 4 3 of the Ion Source manual 4 2 Power On Switch on the f...

Страница 19: ...moves to the next program etc Cycling around to the program that s currently running will continue operation without change Otherwise the parameters will be ramped to the newly selected program 4 3 1...

Страница 20: ...current setpoints can be adjusted using the Setpoint Adjust knob on the front of the discharge controller These adjustments can be made when the Auto Controller is in Standby or Enable The setpoint b...

Страница 21: ...discharge current when the auto controller is enabled also adjusts the emission current In this case the emission becomes a fixed ratio of the emission current to discharge current based on the emissi...

Страница 22: ...ler is enabled or when it is in standby When the Auto Controller is in standby use the program select button to select the program number that will be overwritten Adjust the setpoints to the desired v...

Страница 23: ...function in the gas only mode which must be selected to clear the HLP 7 message from the display There will be no communication link if the power is switched off to either of the power supplies or if...

Страница 24: ...set to 2 5 amps as indicated on the Discharge Amps display Press the white Enable Standby button on the Auto Controller Press the white Enable Standby button on the Filament Power Sup ply Press the wh...

Страница 25: ...2 5 A 150 V discharge which is Constant Voltage Mode operation The following conditions are based on a vacuum pump speed of 1600 liters per second Operating parameters for other pump speeds and gases...

Страница 26: ...Manual Gas mode To do this first press the white Program Select Button repeatedly until the desired program number is selected as indicated by the numbered red LED s Next press the white Acquire Setp...

Страница 27: ...7 and 20 will put the unit into standby If this option was requested with the initial order then a male DB 25 pin connector with two wire pigtails or a user specified connector will be supplied Supply...

Страница 28: ...rge Power Limit The discharge power supply has a limit indicator LED This power limit LED in dicates possible overheating of the ion source components See the ion source manual for the power limit tha...

Страница 29: ...art of the ion source for electrical operation is the anode and the filament cathode The ion source body is grounded and no isolator is re quired in the gas line connection to the ion source More comp...

Страница 30: ...____________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Intern...

Страница 31: ...enable the system using the rear port These programs can be acquired using the front panel as described in the operation sections 4 and 5 of this manual or they can be acquired using the rear panel re...

Страница 32: ...esents full scale output from the MFC ref erenced to pin 10 2 Emission Current Actual 0 to 5V DC output where 0V DC represents 0A DC of emission current and 5V DC represents 7A of emission current ref...

Страница 33: ...n 12 No Connection 13 No Connection 14 Anode Current Actual 0 to 5V DC output where 0V DC rep resents 0A and 5V DC represents 5A DC referenced to pin 10 15 Cathode Filament Current Actual 0 to 5V DC o...

Страница 34: ...orts When using remote enable the programs can be acquired using the front panel as described in Operation sections 4 and 5 of this manual or the can be acquired remotely as described below in sec tio...

Страница 35: ...int using Manual Gas Mode The remote gas setpoints are not available when using the manual gas mode instead the starting gas flows are established by preprogramming them from the front panel for each...

Страница 36: ...n Reference for gas channel setpoints See section 6 2 3 1 below 22 Discharge Current Setpoint 0 5 volts corresponds with 0 to the maximum level of discharge current in amps for the Discharge Power Sup...

Страница 37: ...maximum output in sccm for the channel 1 MFC Refer enced to pin 27 10 Channel 3 Gas Flow Output 0 5 volt corresponds with 0 to the maximum output in sccm for the channel 3 MFC Referenced to pin 27 20...

Страница 38: ...ction gives a real time check of the operating param eters If the operating parameters are in range the two Beam Good pins are shorted together If the operating parameters are out of range then the be...

Страница 39: ...troller being used Referenced to pin 7 or 8 5 Auxiliary 12 volts Referenced to pin 7 or 8 6 Filament Voltage Output 0 5 volts corresponds with 0 50 volts for the Filament Power Supply Referenced to p...

Страница 40: ...h 0 to the maximum level of discharge voltage in volts for the Dis charge Power Supply that is being used 22 Discharge Current Setpoint 0 5 volts corresponds with 0 to the maximum level of discharge c...

Страница 41: ...Loc The red Open Interlock indicators on the front panels of the Fila ment Power Supply and the Discharge Power Supply are also on when the Auto Controller interlock is open if there is an RS 485 com...

Страница 42: ...appendix if another baud rate is required 6 4 3 Communication overview The acceptable command response behavior for the Auto Controller is described below The action reaction of the Auto Controller to...

Страница 43: ...ibed below in the Verbose Command section All commands are expected to be terminated with a CR LF indi cated by cr lf in the description below 6 4 4 1 VRB Verbose Command The VRB command sets a flag f...

Страница 44: ...n Once Enabled the RS 232 remote control locks out all front panel controls except for the ON OFF switch and Gas Select The Gas Select button is left active to allow monitoring of individual gas flow...

Страница 45: ...emote control Example COM 1 cr lf Enable RS232 remote control Example COM cr lf Get present output state If COM is not Enabled then the response to commands will be Comm Inactive in both Terse and Ver...

Страница 46: ...ault 6 4 4 5 TST Self Test Query The TST command performs a unit self test and report results A non zero return value will correspond to the associated front panel error message as outlined below If m...

Страница 47: ...Standby Example OUT 1 cr lf Enable the unit Example OUT cr lf Get present state of output If the unit is in Verbose the response will be Standby or Enabled If the unit is in Terse the response will be...

Страница 48: ...as or Gas Only If the unit is in Terse the response is 0 1 or 2 6 4 4 8 BEAM Beam Good Query The BEAM query Indicates if a stable operating point has been achieved Command BEAM Response is 1 if beam g...

Страница 49: ...ere the appears as outlined below Set or query the active program number P program cr lf Set active program to program P cr lf Get active program number Acceptable program numbers would be 1 to 4 Any...

Страница 50: ...will be truncated Example P4 GS1 10 cr lf Set program 4 channel 1 gas flow to 10 sccm Example P1 DSV cr lf Get program 1 Discharge voltage value Example response in Terse or Verbose mode 200 000 Set...

Страница 51: ...mple P1 ALL GS1 GS2 GS3 GS4 DSV BEI cr lf When using the ALL command in Terse mode to get all the program values they will be returned as a comma delimited string of values in the same order as those...

Страница 52: ...mmand Issuing the OUT 0 command will dis able the gas In using the ALL parameter to set targets the list of values must be comma delimited and appear in the order shown below Any value that is to rema...

Страница 53: ...rameters as those described above for the P command except that there is no program number required and the character is not used R parameter Get the current running value of parameter Values are repo...

Страница 54: ...RN flag Setting the LRN flag with COM in active is ignored Setting the LRN mode using the serial command temporarily overrides the LRN mode setting established in setup The value in setup is restored...

Страница 55: ...ntroller The auto controller front panel display has an additional function of displaying help codes and error messages If it becomes necessary to display a help code or an error message the Auto Cont...

Страница 56: ...ror Message Description Possible Causes And Corrective Action HLP 8 RS 232 Interface Serial Common Error High current flowing in the ground connection of the serial interface between the unit and the...

Страница 57: ...signal to clear the code The unit remains in STANDBY until STANDBY ENABLE is pressed again or the remote enable signal is reap plied Anode has an insulating coating and needs to be cleaned Filament i...

Страница 58: ...signal to clear the code The unit remains in STANDBY until STANDBY ENABLE is pressed again or the remote enable signal is reap plied Filament is broken and needs to be replaced In this case HLP 3 is d...

Страница 59: ...ze during the start up se quence Press and release the STAND BY ENABLE button or remove the remote enable signal to clear the code The unit remains in STANDBY until STANDBY ENABLE is pressed again or...

Страница 60: ...turned on Int LOC Open Interlock An open interlock prevents the Auto Controller from go ing to the ENABLE state and holds it in STANDBY This is a user defined fault in remote operation Review the inte...

Страница 61: ...d off to prevent a failure Switch off the power until the display is dark and then switch the power back on to reset HLP 2 Thermal Failure Open or shorted thermistor detected Contact KRI HLP 3 Broken...

Страница 62: ...the power supply turned on until the Hot message is cleared Make sure there is no blockage of the vents on the rear panel Ambient temperature is too high Reduce ambient temperature below 40 C Not Rdy...

Страница 63: ...t Check connection of the RS 485 cables Make sure Auto Controller has input power and is turned on HLP 8 RS 232 Interface Serial Common Error High cur rent flowing in the ground connection of the seri...

Страница 64: ...over ordinary wear and tear or expendable components KRI s obligation under this Limited Warranty is at KRI s option to repair or replace any defective equipment or parts of the equipment without char...

Страница 65: ...epairs or replacement during Warranty or repairs there after please contact Kaufman Robinson Inc 1306 Blue Spruce Dr Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsour...

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