
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<3. Name of Each Part/Starting and Shutting Down the Equipment >
IM 80J01A01-01E
(7) Sub Cover
Sub cover is opened when pouring distilled water into bath. Also,
sub cover is opened when service maintenance.
(8) Illumination Setting Part
In case of transmission Illumination option, illumination unit is set
on this part.
(9) Fiber Port
Port to connect the fiber to CQ1 Main Unit
(10) USB Connector
Connector for USB cable connection with the Workstation cable
(11) Gas Inlet Port
Port to connect the tube from Gas Mixer (option)
(12) Camera Cable Port
Inlet port to insert camera link cable to CQ1
(13) Power Cable Connector
Port to connect the power cable from Utility Box
(14) Gas Outlet Port
Port to exhaust the gas from chamber on XY stage when using
Gas Mixer
(10)
(11)
(13)
(12)
(14)
(9)
Summary of Contents for CQ1
Page 2: ...This document corresponds to the following versions of software Measurement software R1 04 ...
Page 8: ...vi IM 80J01A01 01E Right Side of Utility Box Aperture label ...
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Page 177: ... 5 Functions of CQ1 Software 5 81 IM 80J01A01 01E Drag tab to move the window ...
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Page 252: ...7 14 7 Trouble Shooting IM 80J01A01 01E Set sub cover and tighten 2 screws ...
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