5.21 SEMI F47 Function
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5.21
SEMI F47 Function
The SEMI F47 function detects an A.971 warning (Undervoltage) and limits the output current if
the DC main circuit power supply voltage to the SERVOPACK drops to a specified value or
lower because the power was momentarily interrupted or the main circuit power supply voltage
was temporarily reduced.
This function complies with the SEMI F47 standards for semiconductor manufacturing equip-
ment.
You can combine this function with the allowable momentary power interruption hold time
(Pn509) to allow the Servomotor to continue operating without stopping for an alarm or without
recovery work even if the power supply voltage drops.
Execution Sequence
This function can be executed either with an instruction from the SVD or with the Servo Sec-
tion. Use Pn008 = n.
X
(Function Selection for Undervoltage) to specify whether the func-
tion is executed by the SVD or by the Servo Section.
The default setting (Pn008 = n.
0
) disables detection of an A.971 warning (Undervoltage).
Execution with the SVD (Pn008 = n.
1
)
The SVD limits the torque in response to an A.971 warning (Undervoltage).
The SVD removes the torque limit after the Undervoltage warning is cleared.
Parameter
Meaning
When Enabled
Classification
Pn008
n.
0
(default setting)
Do not detect undervoltage.
After restart
Setup
n.
1
Detect undervoltage warning and limit
torque in the SVD.
n.
2
Detect undervoltage warning and limit
torque with Pn424 and Pn425 (i.e., only in
the Servo Section).
280 V
200 V
Torque limit
S
ervo
S
ection
S
VD
0%
0%
The output torque i
s
limited to
s
uppre
ss
the
drop in the main circuit bu
s
voltage.
Torque limit end
s
.
Torque limit
s
tart
s
.
Undervoltage
warning
s
tatu
s
Torque limit
reference
A.971 warning
(Undervoltage)
Main circuit
bu
s
voltage
Main circuit input
power
s
upply
Main circuit power interruption time
The torque i
s
limited when
the Undervoltage warning
i
s
received.
The main circuit bu
s
voltage
increa
s
e
s
when the main
circuit power
s
upply recover
s
.
