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16

4 Installation

4.1 Hinweis zur Installation

Vor Inbetriebnahme muß das
Betriebsmittel in die Turbopumpe ein-
gefüllt werden.

– Vorgeschriebenes Betriebsmittel:

“F3” ca. 65 ml (muß separat bestellt
werden, Bestell Nr. - Abschnitt 10).

– Betriebsmittel-Einfüllschraube 38

(Fig.13) herausschrauben und 
ca. 65 ml Betriebsmittel mit Injekti-
onsspritze (Zubehör-Abschnitt 11)
einfüllen; auf O-Ring achten. 

– Vor dem Einschrauben der Einfüll-

schraube O-Ring leicht mit Betriebs-
mittel benetzen.

– Blindflansche an Hoch- und Vorvaku-

umanschluß erst unmittelbar vor der
Montage entfernen.

– Arbeiten die Turbopumpen in einem

Magnetfeld bei Feldstärken über 
3 mT, sind geeignete Abschirmmaß-
nahmen vorzusehen (Abschirm-
gehäuse auf Anfrage).

4.2 Hochvakuumanschluß

Fig. 6

– Alle UHV-Bauteile müssen bei größ-

ter Sauberkeit montiert werden.
Unsaubere Bauelemente verlängern
die Auspumpzeit durch eine erhöhte
Desorptionsrate.

– Wird ein Rezipient frei am Hochva-

kuumflansch der Turbopumpe befe-
stigt, darf kein Drehmoment übertra-
gen werden (einseitige Belastung).
Die axiale Belastbarkeit des Hochva-
kuumflansches beträgt max. 200 kg.

– Bei einer Verbindung Turbopumpe-

Rezipient über einen Federungskör-
per muß die Turbopumpe verankert
werden.

Achtung!
Bei verankerter Turbopumpe dürfen
keine Kräfte aus dem Rohrleitungs-
system auf die Pumpe einwirken.

– Die Turbopumpe muß entweder am

Rezipienten angeflanscht oder auf
der Standfläche bzw. dem Zwi-
schenstück verankert werden.

– Zur Verankerung der Turbopumpe

sind im Unterteil (Standfläche) bzw.
dem Zwischenstück vier Gewinde-
bohrungen M8 vorhanden (Fig. 2).

– Die Turbopumpe kann in horizonta-

ler bis vertikaler Einbaulage an 
den Rezipienten angeflanscht wer-
den.

4 Installation

4.1 Note concerning Installation

The turbo pump must be filled with
pump fluid before first time operati-
ons.

– The prescribed pump fluid is “F3”,

approx. 65 ml (must be ordered
separately, refer to Section 10 for
ordering details).

– Unscrew filler screw 38 (Fig. 13) and

fill in approx. 65 ml pump fluid “F3”
using the syringe provided (Acces-
sories, Section 11). Be careful with
the O-ring.

– Lightly moisten the O-ring with

pump fluid before screwing in the
filler screw.

– Only remove the blank flange on the

high and fore vacuum connection
immediately before fitting.

– If turbo pumps are operated in a

magnetic field with field intensities
exceeding 3.0 mT, suitable shielding
measures must be provided (shiel-
ding on request).

4.2 High Vacuum Connection

Fig. 6

– All UHV components must be fitted

with the utmost cleanliness. Unclean
components increase the pump-
down time owing to a higher
desorption rate.

– If a container is fitted to the high

vacuum flange of the turbo pump
without support, it must be ensured
that no torque is transmitted (lateral
stress). The maximum axial load of
the high vacuum flange is 200 kg.

– If the turbo pump is connected to

the container via a bellows, the
turbo pump must be anchored.

Caution:
When the turbo pump is anchored in
place, it must be ensured that forces
from the piping system do not act on
the pump.

– The turbo pump must either be flan-

ged on to the container or anchored
at its base/intermediate piece.

– The lower part (base)/intermediate

piece of the turbo pump contains
four M8 tap holes for anchoring the
pump (Fig. 2).

– The turbo pump can be flanged to

the container in any position from
horizontal to vertical.

4 Installation

4.1 Remarque concernant l’instal-

lation

Avant la mise en marche la pompe
turbo doit être remplie avec du fluide
moteur.

– Fluide moteur prescrit: “F3” env. 

65 ml (doit être commandé séparé-
ment, commande no - chapitre 10).

– Dévisser la vis de remplissage du

fluide moteur 38 (Fig. 13) et remplir
avec env. 65 ml de fluide moteur à
l’aide d’une seringue d’injection
(Accessoires - chapitre 11); faire
attention au joint torique. 

– Avant de revisser la vis de remplis-

sage, imprégner le joint torique
légèrement avec du fluide moteur.

– N’enlever les brides d’obturation des

raccords de vide élevé et de vide pri-
maire que juste avant le montage.

– Si les pompes turbo fonctionnent

dans un champ magnétique dont les
intensités sont au-dessus de 3 mT, il
faudra prévoir des mesures de blin-
dage appropriées (carter de blindage
sur demande).

4.2 Raccord de vide élevé

Fig. 6

– Tous les composants d’ultra vide

doivent être montés dans un état
parfaitement propre. Les éléments
de montage sales prolongent le
temps de pompage en raison d’un
taux de désorption élevé.

– Si un récipient est fixé librement sur

la bride de vide élevé de la pompe
turbo, aucun couple ne doit être
transmis (charge unilatérale). La
charge axiale de la bride de vide
élevé est de 200 kg maximum.

– Pour un raccordement de la pompe

turbo sur un récipient avec un souf-
flet, la pompe devra être ancrée.

Attention!
Si la pompe turbo est ancrée, aucune
force provenant du système de con-
duites ne devra pas être exercée sur la
pompe.

– La pompe turbo doit être soit bridée

au récipient, soit ancrée sur la surfa-
ce de pose ou la pièce intermédiaire.

– Pour l’ancrage de la pompe turbo,

quatre alésages M8 sont prévus sur
la partie inférieure (surface de pose)
ou la pièce intermédiaire.(Fig. 2).

– La pompe turbo peut être bridée au

récipient de la position horizontale à
la position verticale.

Summary of Contents for TPH 1600

Page 1: ...rating Instructions Mode d emploi Turbomolekularpumpe f r die Korrosiv Gas Technik Turbomolecular Pump for Corrsosive Gas Processes Pompe turbomol culaire pour corrosif gaz processus TPH 1600 TPU 1600...

Page 2: ...1 Adjusting the Sealing Gas Flow 4 7 Electrical Connection of the Turbo Pump 5 Circulatory Lubrication 6 Operation 6 1 Switching on the Turbo Pump 6 1 1 Before the first Start 6 1 2 Before each Start...

Page 3: ...ring Replacement 7 2 Changing the Pump Fluid 7 3 Checking the Drive Motor 7 4 Turbo Pump Bearing Replace ment 7 4 1 Dismantling 7 4 2 Assembly 8 Service Information 8 1 Customer Training 8 2 Returning...

Page 4: ...4 Notizen Notes...

Page 5: ...sealing gas valve Pressure at sealing gas valve 1000 1400 mbar The setting of the sealing gas valve must be adjusted for higher pressures Electrical connection in compliance with local regulations X8...

Page 6: ...acuum and venting connection Stand turbo pump vertically on its synthetic legs and ensure dry storage conditions MAINTENANCE Permanent magnetic bearing high vacuum side maintenance free Ball bearing f...

Page 7: ...perform repair or maintenance work on units which have come into contact with substances which are detrimental to health please observe the relevant regulations If you return units to us for repair or...

Page 8: ...work to you if you have not attached the note Free from harmful substances to the unit or in the accompanying papers Harmful substances are defined in European Community Countries as materials and pr...

Page 9: ...on with the turbo pump Personnel must be able to recognize dangers and take preventive measures Any use by unauthorized personnel or careless handling may increase the potential danger The switch off...

Page 10: ...nnecting lines between the turbomolecular pump and the backing pump when the system is at standstill so as to avoid any contact with vacuum Before you remove the turbomole cular pump from the system t...

Page 11: ...a the TCP 380 or TCP 600 Electronic Drive Unit TPH 1600 high vacuum flange DN 200 ISO K or DN 250 ISO K with out heating jacket TPU 1600 high vacuum flange DN 200 CF F or 250 CF F with hea ting jacket...

Page 12: ...zontal Section 4 2 Rotor stator and magnetic settings and balancing are not altered when bearings are replaced All parts which come into contact with the media are manufactured in corrosion proof mate...

Page 13: ...e turbomol culaire TPH TPU 1600 TPH TPU 1600 Anschlu nennweite Nominal connection Diam tre nominal des of diameter raccords Eingang Inlet Entr e DN 200 ISO K DN 250 ISO K DN 200 CF F DN 250 CF F Ausga...

Page 14: ...vide lev DN 250 Fig 2 Hochvakuumanschlu Vorvakuumanschlu Flutanschlu K hlwasseranschlu Anschlu Antriebselektronik Sperrgasanschlu High vacuum connection Fore vacuum connection Venting connection Cooli...

Page 15: ...s must be determined accordingly We recommend our two stage DUO 120 A Rotary Vane Vacuum Pump with integrated HV safety valve as the standard backing pump 2 3 Pression finale On entend par pression fi...

Page 16: ...e utmost cleanliness Unclean components increase the pump down time owing to a higher desorption rate If a container is fitted to the high vacuum flange of the turbo pump without support it must be en...

Page 17: ...pprox 15 20 Fit splinter shield 3 with clamping ring 4 as per Fig 7 in the hollow of high vacuum flange 1 and clamp the clamping ring in the high vacuum flange with the three set screws 27 Si la posit...

Page 18: ...d during heating air coo ling is not permissible Two PTC resistors provide thermal protection for the pump One PTC resistor is located in the motor win dings and the other in the pump hou sing If the...

Page 19: ...essure max 7 bar No aggressive carbon dioxide and ammonia should be detectable If the actual values are above or below the levels indicated above and as a result problems arise with or dama ges occur...

Page 20: ...reils comme ci dessous la soupape de remise l air peut tre ouverte imm diatement ou avec temporisation apr s une coupure de courant ou la mise l arr t Branchement lectrique du dispositif de remise l a...

Page 21: ...ise l air Fig 10 D visser la vis d a ration du raccord de remise l air 14 G 1 8 Visser la soupape de remise l air 16 avec le raccord G 1 8 1 dans le raccord de remise l air 14 Les soupapes de remise l...

Page 22: ...required the turbo pump must also be earthed Earthing the Turbo Pump When the turbo pump is separated from the pumping unit and operated with a longer cable an extra cable to the site ground must be...

Page 23: ...6 Operation 6 1 Switching on 6 1 1 Before the first Start Check if the turbo pump has been fil led with pump fluid as per Section 4 1 6 1 2 Before each Start Open the sealing gas supply Sec tion 4 6 C...

Page 24: ...13 may open due to degassing of the pump fluid In this case the electronic drive unit switches off the turbo pump It must be restarted by Reset push button S3 on the Electronic Drive Unit TCP 380 or T...

Page 25: ...throttle the volume flow rate must be fitted This can be achieved either by connecting a conductance control unit or by using a TCP 600 with variable rotation speed option In the latter case a reducti...

Page 26: ...rive unit If the pump is connected as shown in the wiring diagram see the Elec tronic Drive Unit TCP 380 or TCP 600 Operating Instructions the follo wing operations are performed on switching off the...

Page 27: ...er does not have such facili ties it is possible to have decontami nation carried out by the manufactu rer against presentation of an invoice Marking and returning toxically conta minated pumps to the...

Page 28: ...vacuum side Place the turbo pump vertically with the high vacuum flange pointing downward in a suitable vessel Fill cleaning agent pure alcohol into the vessel up to the backing pump flange Fig 12 Im...

Page 29: ...pump Vent the turbo pump and disconnect from the backing pump Fill the turbo pump with pump fluid Section 7 1 2 The turbo pump is now ready for operation and can be re fitted in the system Initial ev...

Page 30: ...paliers de la pompe de fluide moteur Fig 13 En cas de d rangement de l alimenta tion de fluide moteur la pompe turbo sera mise l arr t par le contact 33 on peut voir par le hublot 36 si la pompe de f...

Page 31: ...found replace the bearing as per Fig 13 Clean new bearing 35 in pure alcohol and then moisten with pump fluid F3 and push onto the shaft manually Re fit the complete pump fluid pump in reservoir 43 ta...

Page 32: ...est adapter and external mains unit DC power supply Feed the Hall probes with a constant current of 40 mA at contacts G and F positive pole at G Check Hall probes by turning the rotor by hand 7 2 Chan...

Page 33: ...lpumpe mit Betriebsmittel sensor 33 33 Kontakt 83 Interne Steckverbindung Motor Betriebsmittelpumpe 1 bei TCP 600 wei Wiring diagram TCP 380 25 Drive motor with auxiliary motor winding Hall probes and...

Page 34: ...our customers on a regular basis If you are interested please contact our agencies or subsidiaries Spare parts pack I contains all parts needed for bearing housing replace ments see Section 9 The pump...

Page 35: ...pposing of the four screws 82 SW 3 from bearing hou sing 51 screw in 2 studs B Fig 20 onto which the two knurled nuts D should be screwed tight Fig 20 Screw out the other two screws 82 SW 3 Screw off...

Page 36: ...move compensating ring 81 Enlever l anneau de compensation 81 Fig 25 Austauschteile Exchange parts Pi ces de rechange L gende Fig 17 30 31 Bride de vide lev 32 Bride de vide primaire 38 Raccord d eau...

Page 37: ...up to the stop point Fig 28 Screw in splash nut 49 left hand thread and tighten with the SW 4 Allan key Fig 29 Screw in the two knurled nuts D evenly until bearing housing 51 is pulled against the ax...

Page 38: ...er part 31 Introduire le ch ssis de palier 51 dans la partie inf rieure 31 Fig 28 Lagerfassung 51 aufschieben Push bearing housing 51 up to the stop Monter le ch ssis de palier 51 Fig 29 Spritzmutter...

Page 39: ...39 Fig 31 1 48 8 31 68 66 81 83 51 82 49 43 80 32...

Page 40: ...zers Service Center should pro blems arise All repair orders are carried out on the basis of our General Terms of Delivery only For repairs the warranty period is 6 months Repair work is performed wit...

Page 41: ...M 053 531 U 61 Quad Ring Quad ring Joint en Quad VI 10 82 x 1 78 1 P 4081 630 C 63 USIT Ring USIT ring Joint en USIT MS NBR U12 7 18 x 1 5 4 P 3529 142 64 O Ring O ring Joint torique VI 36 x 2 2 P 407...

Page 42: ...42 Fig 32 Fig 33 78 77 65 72 71 76 75 51 36 30 79 49 70 68 74 73 61...

Page 43: ...ting en cas de montage en rack Eingang Input Entr e PM 001 164 T Ausgang Output Sortie PM 001 165 T Flutventil TSF 0122 Venting Valve TSF 0122 Vanne de remise l air TSF 0122 G 1 8 PM Z01 106 DN 10 ISO...

Page 44: ...ungsk rper TPU Vibration compensator TPU Amortisseur TPU DN 250 CF F PM 006 671 X Zentrierring Vi f r TPH Centering ring Vi for TPH Anneau de centrage Vi pour TPH DN 250 ISO BP 213 207 T DN 200 ISO BP...

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