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23

5 Umlaufschmierung

Fig. 13

Die Betriebsmittelpumpe 30 fördert
das Betriebsmittel

1)

an die Spritzmut-

ter 49 (Fig. 30). Das überschüssige
Betriebsmittel fließt zurück.

Der Betriebsmittelumlauf wird durch
den Kontakt 33 überwacht, welcher
die Signale an die Antriebselektronik
liefert. Diese schaltet bei Betriebsmit-
telmangel die Turbopumpe ab.

Die Betriebsmittelüberwachung ist
erst ab 45 % der Enddrehzahl aktiv.
Wird bei Drehzahlen > 45 % der End-
drehzahl, z.B. durch Entgasen des
Betriebsmittels, der Kontakt 33 über
eine Zeit von 2 Minuten geöffnet, so
erkennt die Antriebselektronik einen
Betriebsmittelmangel und schaltet die
Turbopumpe ab.

Danach muß die Turbopumpe mit
“Reset” (Schalter S3 an der Antriebs-
elektronik) neu gestartet werden 
- Abschnitt 6.1.3.

1)

Erstfüllung bzw. Wechsel 

1)

- siehe Abschnitt 4.1 bzw. 7.2.

6 Betrieb

6.1 Einschalten der Turbopumpe

6.1.1 Vor dem ersten Einschalten:
– Prüfen ob das Betriebsmittel gemäß

Abschnitt 4.1 in die Turbopumpe
eingefüllt ist.

6.1.2 Vor jedem Einschalten:
– Sperrgaszufuhr öffnen - Abschnitt

4.6. Bei höherem Druck als 1000-
1400 mbar, Einstellung des Sperr-
gasventiles korrigieren - Abschnitt
4.6.1.

– Bei Kühlwasser vom Netz: Absperr-

hahn öffnen.

6.1.3 Einschalten: 
Mit Schalter S1 an der Antriebselek-
tronik. 
Bei Anschluß nach Schaltplan - siehe
Betriebsanweisung der Antriebselek-
tronik TCP 380 oder TCP 600 - wird mit
dem Einschalten der Turbopumpe
– das Flutventil geschlossen - Ab-

schnitt 4.5;

5 Circulatory Lubrication

Fig. 13

Pump fluid pump 30 supplies the
pump fluid

1)

to splash nut 49 (Fig. 30).

Surplus pump fluid flows back.

Pump fluid circulation is monitored by
contact 33 which transmits the signals
to the electronic drive unit. When
there is insufficient pump fluid, the
electronic drive unit is switched off.

Pump fluid monitoring is active from
45 % of the ultimate rotation speed. If
the rotation speed is > 45 % ultimate
rotation speed e.g. as a result of pump
fluid degassing, contact 33 opens for 2
minutes, the electronic drive unit reco-
gnises a pump fluid deficiency and
switches off the pump. 

The turbo pump must then be re-star-
ted with “reset” (push-button S3 on
the electronic drive unit) - see Section
6.1.3.

1)

Initial filling and changing - Section 4.1 

1)

and 7.2.

6 Operation

6.1 Switching on

6.1.1 Before the first Start:
– Check if the turbo pump has been fil-

led with pump fluid as per Section
4.1.

6.1.2 Before each Start:
– Open the sealing gas supply - Sec-

tion 4.6. Correction of the sealing
gas valve setting is necessary for
pressures in excess of 1000 - 
1400 mbar - Section 4.6.1.

– For mains cooling water; open stop

cock.

6.1.3 Switching on Procedure:
With push-button S1 on the electronic
drive unit.
When connected as shown in the
wiring diagram - see Electronic Drive
Unit TCP 380 or TCP 600 operating
instructions - switching on causes:
– The venting valve to close.

5 Lubrification par circulation

Fig. 13

La pompe de fluide moteur 30 amène
le fluide moteur

1)

à l’écrou de barbota-

ge 49 (Fig. 30). L’excédent de fluide
moteur est retourné.

La circulation de fluide moteur sera
surveillée par le contact 33, celui-ci
transmet les signaux à l’électronique
d’entraînement. L’électronique d’ent-
raînement arrête la pompe turbo en
cas de manque de fluide moteur.

La surveillance du fluide moteur est
active seulement à partir de 45 % de la
vitesse de rotation finale. En cas
d’ouverture du contact 33 au-dessus
d’une période de 2 minutes, et si la
vitesse de rotation est > 45 % de la
vitesse de rotation finale, l’électroni-
que d’entraînement arrête la pompe
turbo pour cause de manque de fluide
moteur (par ex. pour le procédé de
dégazage du fluide moteur).

Ensuite la pompe turbo doit être de
nouveau remise en marche avec
“Reset” (Interrupteur S3 à l’électroni-
que d’entraînement). Chapitre 6.1.3.

1)

Premier remplissage ou vidange d’fluide 

1) 

moteur - chapitre 4.1 ou 7.2.

6 Fonctionnement

6.1 Mise en marche de la pompe

turbo

6.1.1 Avant la première mise en 

marche:

– Contrôler si la pompe turbo est rem-

plie de fluide moteur suivant le cha-
pitre 4.1.

6.1.2 Avant chaque mise en marche:
– Ouvrir l’alimentation en gaz de bloc-

age - chapitre 4.6. Pour des pressi-
ons plus élevées que 1000 - 
1400 mbar, corriger le réglage de la
valve de gaz de blocage - chapitre
4.6.1.

– Pour de l’eau de refroidissement

venant du réseau: ouvrir le robinet
de fermeture.

6.1.3 Procédé de mise en marche: 
Avec l’interrupteur S1 à l’électronique
d’entraînement. 
– Si le branchement est suivant le

schéma électrique - voir les instruc-
tions de service de l’électronique
d’entraînement TCP 380 ou 
TCP 600, avec la mise en marche de
la pompe turbo les actions suivants
s’effectueront:

– La soupape de remise à l’air sera fer-

mée - chapitre 4.5;

Summary of Contents for TPH 1600

Page 1: ...rating Instructions Mode d emploi Turbomolekularpumpe f r die Korrosiv Gas Technik Turbomolecular Pump for Corrsosive Gas Processes Pompe turbomol culaire pour corrosif gaz processus TPH 1600 TPU 1600...

Page 2: ...1 Adjusting the Sealing Gas Flow 4 7 Electrical Connection of the Turbo Pump 5 Circulatory Lubrication 6 Operation 6 1 Switching on the Turbo Pump 6 1 1 Before the first Start 6 1 2 Before each Start...

Page 3: ...ring Replacement 7 2 Changing the Pump Fluid 7 3 Checking the Drive Motor 7 4 Turbo Pump Bearing Replace ment 7 4 1 Dismantling 7 4 2 Assembly 8 Service Information 8 1 Customer Training 8 2 Returning...

Page 4: ...4 Notizen Notes...

Page 5: ...sealing gas valve Pressure at sealing gas valve 1000 1400 mbar The setting of the sealing gas valve must be adjusted for higher pressures Electrical connection in compliance with local regulations X8...

Page 6: ...acuum and venting connection Stand turbo pump vertically on its synthetic legs and ensure dry storage conditions MAINTENANCE Permanent magnetic bearing high vacuum side maintenance free Ball bearing f...

Page 7: ...perform repair or maintenance work on units which have come into contact with substances which are detrimental to health please observe the relevant regulations If you return units to us for repair or...

Page 8: ...work to you if you have not attached the note Free from harmful substances to the unit or in the accompanying papers Harmful substances are defined in European Community Countries as materials and pr...

Page 9: ...on with the turbo pump Personnel must be able to recognize dangers and take preventive measures Any use by unauthorized personnel or careless handling may increase the potential danger The switch off...

Page 10: ...nnecting lines between the turbomolecular pump and the backing pump when the system is at standstill so as to avoid any contact with vacuum Before you remove the turbomole cular pump from the system t...

Page 11: ...a the TCP 380 or TCP 600 Electronic Drive Unit TPH 1600 high vacuum flange DN 200 ISO K or DN 250 ISO K with out heating jacket TPU 1600 high vacuum flange DN 200 CF F or 250 CF F with hea ting jacket...

Page 12: ...zontal Section 4 2 Rotor stator and magnetic settings and balancing are not altered when bearings are replaced All parts which come into contact with the media are manufactured in corrosion proof mate...

Page 13: ...e turbomol culaire TPH TPU 1600 TPH TPU 1600 Anschlu nennweite Nominal connection Diam tre nominal des of diameter raccords Eingang Inlet Entr e DN 200 ISO K DN 250 ISO K DN 200 CF F DN 250 CF F Ausga...

Page 14: ...vide lev DN 250 Fig 2 Hochvakuumanschlu Vorvakuumanschlu Flutanschlu K hlwasseranschlu Anschlu Antriebselektronik Sperrgasanschlu High vacuum connection Fore vacuum connection Venting connection Cooli...

Page 15: ...s must be determined accordingly We recommend our two stage DUO 120 A Rotary Vane Vacuum Pump with integrated HV safety valve as the standard backing pump 2 3 Pression finale On entend par pression fi...

Page 16: ...e utmost cleanliness Unclean components increase the pump down time owing to a higher desorption rate If a container is fitted to the high vacuum flange of the turbo pump without support it must be en...

Page 17: ...pprox 15 20 Fit splinter shield 3 with clamping ring 4 as per Fig 7 in the hollow of high vacuum flange 1 and clamp the clamping ring in the high vacuum flange with the three set screws 27 Si la posit...

Page 18: ...d during heating air coo ling is not permissible Two PTC resistors provide thermal protection for the pump One PTC resistor is located in the motor win dings and the other in the pump hou sing If the...

Page 19: ...essure max 7 bar No aggressive carbon dioxide and ammonia should be detectable If the actual values are above or below the levels indicated above and as a result problems arise with or dama ges occur...

Page 20: ...reils comme ci dessous la soupape de remise l air peut tre ouverte imm diatement ou avec temporisation apr s une coupure de courant ou la mise l arr t Branchement lectrique du dispositif de remise l a...

Page 21: ...ise l air Fig 10 D visser la vis d a ration du raccord de remise l air 14 G 1 8 Visser la soupape de remise l air 16 avec le raccord G 1 8 1 dans le raccord de remise l air 14 Les soupapes de remise l...

Page 22: ...required the turbo pump must also be earthed Earthing the Turbo Pump When the turbo pump is separated from the pumping unit and operated with a longer cable an extra cable to the site ground must be...

Page 23: ...6 Operation 6 1 Switching on 6 1 1 Before the first Start Check if the turbo pump has been fil led with pump fluid as per Section 4 1 6 1 2 Before each Start Open the sealing gas supply Sec tion 4 6 C...

Page 24: ...13 may open due to degassing of the pump fluid In this case the electronic drive unit switches off the turbo pump It must be restarted by Reset push button S3 on the Electronic Drive Unit TCP 380 or T...

Page 25: ...throttle the volume flow rate must be fitted This can be achieved either by connecting a conductance control unit or by using a TCP 600 with variable rotation speed option In the latter case a reducti...

Page 26: ...rive unit If the pump is connected as shown in the wiring diagram see the Elec tronic Drive Unit TCP 380 or TCP 600 Operating Instructions the follo wing operations are performed on switching off the...

Page 27: ...er does not have such facili ties it is possible to have decontami nation carried out by the manufactu rer against presentation of an invoice Marking and returning toxically conta minated pumps to the...

Page 28: ...vacuum side Place the turbo pump vertically with the high vacuum flange pointing downward in a suitable vessel Fill cleaning agent pure alcohol into the vessel up to the backing pump flange Fig 12 Im...

Page 29: ...pump Vent the turbo pump and disconnect from the backing pump Fill the turbo pump with pump fluid Section 7 1 2 The turbo pump is now ready for operation and can be re fitted in the system Initial ev...

Page 30: ...paliers de la pompe de fluide moteur Fig 13 En cas de d rangement de l alimenta tion de fluide moteur la pompe turbo sera mise l arr t par le contact 33 on peut voir par le hublot 36 si la pompe de f...

Page 31: ...found replace the bearing as per Fig 13 Clean new bearing 35 in pure alcohol and then moisten with pump fluid F3 and push onto the shaft manually Re fit the complete pump fluid pump in reservoir 43 ta...

Page 32: ...est adapter and external mains unit DC power supply Feed the Hall probes with a constant current of 40 mA at contacts G and F positive pole at G Check Hall probes by turning the rotor by hand 7 2 Chan...

Page 33: ...lpumpe mit Betriebsmittel sensor 33 33 Kontakt 83 Interne Steckverbindung Motor Betriebsmittelpumpe 1 bei TCP 600 wei Wiring diagram TCP 380 25 Drive motor with auxiliary motor winding Hall probes and...

Page 34: ...our customers on a regular basis If you are interested please contact our agencies or subsidiaries Spare parts pack I contains all parts needed for bearing housing replace ments see Section 9 The pump...

Page 35: ...pposing of the four screws 82 SW 3 from bearing hou sing 51 screw in 2 studs B Fig 20 onto which the two knurled nuts D should be screwed tight Fig 20 Screw out the other two screws 82 SW 3 Screw off...

Page 36: ...move compensating ring 81 Enlever l anneau de compensation 81 Fig 25 Austauschteile Exchange parts Pi ces de rechange L gende Fig 17 30 31 Bride de vide lev 32 Bride de vide primaire 38 Raccord d eau...

Page 37: ...up to the stop point Fig 28 Screw in splash nut 49 left hand thread and tighten with the SW 4 Allan key Fig 29 Screw in the two knurled nuts D evenly until bearing housing 51 is pulled against the ax...

Page 38: ...er part 31 Introduire le ch ssis de palier 51 dans la partie inf rieure 31 Fig 28 Lagerfassung 51 aufschieben Push bearing housing 51 up to the stop Monter le ch ssis de palier 51 Fig 29 Spritzmutter...

Page 39: ...39 Fig 31 1 48 8 31 68 66 81 83 51 82 49 43 80 32...

Page 40: ...zers Service Center should pro blems arise All repair orders are carried out on the basis of our General Terms of Delivery only For repairs the warranty period is 6 months Repair work is performed wit...

Page 41: ...M 053 531 U 61 Quad Ring Quad ring Joint en Quad VI 10 82 x 1 78 1 P 4081 630 C 63 USIT Ring USIT ring Joint en USIT MS NBR U12 7 18 x 1 5 4 P 3529 142 64 O Ring O ring Joint torique VI 36 x 2 2 P 407...

Page 42: ...42 Fig 32 Fig 33 78 77 65 72 71 76 75 51 36 30 79 49 70 68 74 73 61...

Page 43: ...ting en cas de montage en rack Eingang Input Entr e PM 001 164 T Ausgang Output Sortie PM 001 165 T Flutventil TSF 0122 Venting Valve TSF 0122 Vanne de remise l air TSF 0122 G 1 8 PM Z01 106 DN 10 ISO...

Page 44: ...ungsk rper TPU Vibration compensator TPU Amortisseur TPU DN 250 CF F PM 006 671 X Zentrierring Vi f r TPH Centering ring Vi for TPH Anneau de centrage Vi pour TPH DN 250 ISO BP 213 207 T DN 200 ISO BP...

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