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6.5 Stillsetzen der Turbopumpe

Zum Stillsetzen über länger als ein
Jahr muß die Turbopumpe gemäß
Abschnitt 7.1.1 gereinigt werden (mit
Betriebsmittelwechsel!)

– Turbopumpe nach dem Evakuieren

mit N

2

oder trockener Luft fluten;

– Vorvakuum- und Flutanschluß ver-

schließen; 

– Turbopumpe 

senkrecht auf den

Kunststoffüßen abstellen und für
trockene Lagerung sorgen;

– In Räumen mit feuchter oder aggres-

siver Atmosphäre ist die Turbopum-
pe zusammen mit einem Beutel
Trockenmittel, z.B. Silicagel, in einen
Plastikbeutel einzuschweißen.

7 Instandhaltung

7.1 Reinigung der Turbopumpe

Achtung!
Wurde die Turbopumpe mit reaktiven
Medien kontaminiert, so muß die
Dekontamination unter Beachtung der
einschlägigen Sicherheitsvorschriften
durch den Kunden erfolgen. Sind
diese Einrichtungen kundenseitig
nicht vorhanden, so besteht die Mög-
lichkeit, die Dekontamination gegen
Berechnung im Herstellerwerk durch-
führen zu lassen.

Die Kennzeichnung und Rücksendung
von toxisch kontaminierten Pumpen
zum Herstellerwerk muß entspre-
chend den internationalen Vorschrif-
ten erfolgen. Verwenden Sie bitte bei-
gefügte Erklärung. Die Balzers-Vertre-
tungen sind über die einschlägigen
Vorschriften informiert und sind bei
der Abwicklung behilflich.

Ist die Turbopumpe 

nicht mit reaktiven

Medien verunreinigt, kann die Reini-
gung wie folgt durchgeführt werden:

Bei leichter Verschmutzung z.B. durch
Betriebsmittelniederschläge kann die
Turbopumpe in unzerlegtem Zustand
mit reinem Alkohol gereinigt werden.
Handelt es sich jedoch um schwerlös-
liche Medien oder liegt eine extreme
Verschmutzung vor, muß die Turbo-
pumpe vollkommen demontiert wer-
den. Hierzu sollte grundsätzlich der
“Balzers Service” herangezogen wer-
den, damit die Gewähr für einwand-
freie Funktion gegeben ist.

6.5 Shutting down the Turbo

Pump

When shutting down the turbo pump
for longer than a year the turbo pump
must be cleaned as per Section 7.1.1
(with pump fluid change).

– After evacuation, vent turbo pump

with N

2

or dry air;

– Close fore vacuum and venting

connection;

– Place the turbo pump 

vertically on

its synthetic legs and ensure dry sto-
rage conditions;

– In rooms with moist or aggressive

atmosphere, the turbo pump must
be sealed in a plastic bag together
with a bag of dessicant, e.g. silica-
gel.

7 Maintenance

7.1 Cleaning the Turbo Pump

Important:
If the turbo pump has been contami-
nated with reactive media, decontami-
nation must be carried out by the
customer in compliance with the
applicable safety regulations. If the
customer does not have such facili-
ties, it is possible to have decontami-
nation carried out by the manufactu-
rer against presentation of an invoice.

Marking and returning toxically conta-
minated pumps to the manufacturer
must be in conformity with internatio-
nal regulations. Please use the enclo-
sed certification. Balzers representati-
ves can advise you regarding the
applicable regulations and will assist
you in handling such cases.

If the turbo pump is 

not contaminated

with reactive media, cleaning can be
carried out as follows:

In case of slight contamination, e.g. by
pump fluid deposits, the turbo pump
can be cleaned in assembled conditi-
on. However, if contamination has
been caused by insoluble media or is
severe, the turbo pump must be com-
pletely dismantled. For this, “Balzers
Service” should always be called
upon, so as to ensure troublefree
functioning of the pump.

6.5 Immobilisation de la pompe

turbo

Afin d’assurer l’immobilisation de la
pompe turbo pour une période de
plus d’un an, celle-ci devra être net-
toyée suivant chapitre 7.1.1 (avec une
vidange du fluide moteur!)

– Remise à l’air de la pompe turbo

après l’évacuation avec N

2

ou de

l’air sec;

– Fermer les raccords de remise à l’air

et de vide primaire; 

– Placer la pompe turbo 

verticalement

sur les pieds en matière plastique et
assurer le stockage dans un endroit
sec;

– Dans des endroits avec de l’humidité

ou une atmosphère agressive, la
pompe turbo devra être protégée
par une enveloppe de plastique
scellée dans laquelle on placera un
agent siccatif par ex. Silicagel.

7 Entretien

7.1 Nettoyage de la pompe turbo

Attention!
Si la pompe turbo a été contaminée
par des agents réactifs, une déconta-
mination selon les prescriptions léga-
les en vigueur doit être préalablement
effectuée par le client. Si ces installati-
ons n’existent pas côté client, la
décontamination pourra être effectuée
dans nos usines et vous sera facturée.

Le retour et la signalisation des pom-
pes toxiquement contaminées doivent
être effectués conformément aux pre-
scriptions internationales. Veuillez uti-
liser les formulaires ci-joints à cet
effet. Les agences Balzers sont infor-
mées au sujet des prescriptions et
vous aideront dans les démarches.

Si la pompe turbo 

n’est pas salie avec

des agents réactifs, le nettoyage peut
s’effectuer de la façon suivante:

Pour des salissures légères par ex.,
par des dépôts de fluide moteur, la
pompe turbo, non démontée, peut
être nettoyée avec de l’alcool pur.
Mais s’il s’agit d’agents difficilement
solubles ou de fortes salissures, la
pompe turbo devra être complète-
ment démontée. Dans ce cas, il faudra
absolument faire appel au service
après-vente Balzers, afin de garantir
un parfait fonctionnement.

Summary of Contents for TPH 1600

Page 1: ...rating Instructions Mode d emploi Turbomolekularpumpe f r die Korrosiv Gas Technik Turbomolecular Pump for Corrsosive Gas Processes Pompe turbomol culaire pour corrosif gaz processus TPH 1600 TPU 1600...

Page 2: ...1 Adjusting the Sealing Gas Flow 4 7 Electrical Connection of the Turbo Pump 5 Circulatory Lubrication 6 Operation 6 1 Switching on the Turbo Pump 6 1 1 Before the first Start 6 1 2 Before each Start...

Page 3: ...ring Replacement 7 2 Changing the Pump Fluid 7 3 Checking the Drive Motor 7 4 Turbo Pump Bearing Replace ment 7 4 1 Dismantling 7 4 2 Assembly 8 Service Information 8 1 Customer Training 8 2 Returning...

Page 4: ...4 Notizen Notes...

Page 5: ...sealing gas valve Pressure at sealing gas valve 1000 1400 mbar The setting of the sealing gas valve must be adjusted for higher pressures Electrical connection in compliance with local regulations X8...

Page 6: ...acuum and venting connection Stand turbo pump vertically on its synthetic legs and ensure dry storage conditions MAINTENANCE Permanent magnetic bearing high vacuum side maintenance free Ball bearing f...

Page 7: ...perform repair or maintenance work on units which have come into contact with substances which are detrimental to health please observe the relevant regulations If you return units to us for repair or...

Page 8: ...work to you if you have not attached the note Free from harmful substances to the unit or in the accompanying papers Harmful substances are defined in European Community Countries as materials and pr...

Page 9: ...on with the turbo pump Personnel must be able to recognize dangers and take preventive measures Any use by unauthorized personnel or careless handling may increase the potential danger The switch off...

Page 10: ...nnecting lines between the turbomolecular pump and the backing pump when the system is at standstill so as to avoid any contact with vacuum Before you remove the turbomole cular pump from the system t...

Page 11: ...a the TCP 380 or TCP 600 Electronic Drive Unit TPH 1600 high vacuum flange DN 200 ISO K or DN 250 ISO K with out heating jacket TPU 1600 high vacuum flange DN 200 CF F or 250 CF F with hea ting jacket...

Page 12: ...zontal Section 4 2 Rotor stator and magnetic settings and balancing are not altered when bearings are replaced All parts which come into contact with the media are manufactured in corrosion proof mate...

Page 13: ...e turbomol culaire TPH TPU 1600 TPH TPU 1600 Anschlu nennweite Nominal connection Diam tre nominal des of diameter raccords Eingang Inlet Entr e DN 200 ISO K DN 250 ISO K DN 200 CF F DN 250 CF F Ausga...

Page 14: ...vide lev DN 250 Fig 2 Hochvakuumanschlu Vorvakuumanschlu Flutanschlu K hlwasseranschlu Anschlu Antriebselektronik Sperrgasanschlu High vacuum connection Fore vacuum connection Venting connection Cooli...

Page 15: ...s must be determined accordingly We recommend our two stage DUO 120 A Rotary Vane Vacuum Pump with integrated HV safety valve as the standard backing pump 2 3 Pression finale On entend par pression fi...

Page 16: ...e utmost cleanliness Unclean components increase the pump down time owing to a higher desorption rate If a container is fitted to the high vacuum flange of the turbo pump without support it must be en...

Page 17: ...pprox 15 20 Fit splinter shield 3 with clamping ring 4 as per Fig 7 in the hollow of high vacuum flange 1 and clamp the clamping ring in the high vacuum flange with the three set screws 27 Si la posit...

Page 18: ...d during heating air coo ling is not permissible Two PTC resistors provide thermal protection for the pump One PTC resistor is located in the motor win dings and the other in the pump hou sing If the...

Page 19: ...essure max 7 bar No aggressive carbon dioxide and ammonia should be detectable If the actual values are above or below the levels indicated above and as a result problems arise with or dama ges occur...

Page 20: ...reils comme ci dessous la soupape de remise l air peut tre ouverte imm diatement ou avec temporisation apr s une coupure de courant ou la mise l arr t Branchement lectrique du dispositif de remise l a...

Page 21: ...ise l air Fig 10 D visser la vis d a ration du raccord de remise l air 14 G 1 8 Visser la soupape de remise l air 16 avec le raccord G 1 8 1 dans le raccord de remise l air 14 Les soupapes de remise l...

Page 22: ...required the turbo pump must also be earthed Earthing the Turbo Pump When the turbo pump is separated from the pumping unit and operated with a longer cable an extra cable to the site ground must be...

Page 23: ...6 Operation 6 1 Switching on 6 1 1 Before the first Start Check if the turbo pump has been fil led with pump fluid as per Section 4 1 6 1 2 Before each Start Open the sealing gas supply Sec tion 4 6 C...

Page 24: ...13 may open due to degassing of the pump fluid In this case the electronic drive unit switches off the turbo pump It must be restarted by Reset push button S3 on the Electronic Drive Unit TCP 380 or T...

Page 25: ...throttle the volume flow rate must be fitted This can be achieved either by connecting a conductance control unit or by using a TCP 600 with variable rotation speed option In the latter case a reducti...

Page 26: ...rive unit If the pump is connected as shown in the wiring diagram see the Elec tronic Drive Unit TCP 380 or TCP 600 Operating Instructions the follo wing operations are performed on switching off the...

Page 27: ...er does not have such facili ties it is possible to have decontami nation carried out by the manufactu rer against presentation of an invoice Marking and returning toxically conta minated pumps to the...

Page 28: ...vacuum side Place the turbo pump vertically with the high vacuum flange pointing downward in a suitable vessel Fill cleaning agent pure alcohol into the vessel up to the backing pump flange Fig 12 Im...

Page 29: ...pump Vent the turbo pump and disconnect from the backing pump Fill the turbo pump with pump fluid Section 7 1 2 The turbo pump is now ready for operation and can be re fitted in the system Initial ev...

Page 30: ...paliers de la pompe de fluide moteur Fig 13 En cas de d rangement de l alimenta tion de fluide moteur la pompe turbo sera mise l arr t par le contact 33 on peut voir par le hublot 36 si la pompe de f...

Page 31: ...found replace the bearing as per Fig 13 Clean new bearing 35 in pure alcohol and then moisten with pump fluid F3 and push onto the shaft manually Re fit the complete pump fluid pump in reservoir 43 ta...

Page 32: ...est adapter and external mains unit DC power supply Feed the Hall probes with a constant current of 40 mA at contacts G and F positive pole at G Check Hall probes by turning the rotor by hand 7 2 Chan...

Page 33: ...lpumpe mit Betriebsmittel sensor 33 33 Kontakt 83 Interne Steckverbindung Motor Betriebsmittelpumpe 1 bei TCP 600 wei Wiring diagram TCP 380 25 Drive motor with auxiliary motor winding Hall probes and...

Page 34: ...our customers on a regular basis If you are interested please contact our agencies or subsidiaries Spare parts pack I contains all parts needed for bearing housing replace ments see Section 9 The pump...

Page 35: ...pposing of the four screws 82 SW 3 from bearing hou sing 51 screw in 2 studs B Fig 20 onto which the two knurled nuts D should be screwed tight Fig 20 Screw out the other two screws 82 SW 3 Screw off...

Page 36: ...move compensating ring 81 Enlever l anneau de compensation 81 Fig 25 Austauschteile Exchange parts Pi ces de rechange L gende Fig 17 30 31 Bride de vide lev 32 Bride de vide primaire 38 Raccord d eau...

Page 37: ...up to the stop point Fig 28 Screw in splash nut 49 left hand thread and tighten with the SW 4 Allan key Fig 29 Screw in the two knurled nuts D evenly until bearing housing 51 is pulled against the ax...

Page 38: ...er part 31 Introduire le ch ssis de palier 51 dans la partie inf rieure 31 Fig 28 Lagerfassung 51 aufschieben Push bearing housing 51 up to the stop Monter le ch ssis de palier 51 Fig 29 Spritzmutter...

Page 39: ...39 Fig 31 1 48 8 31 68 66 81 83 51 82 49 43 80 32...

Page 40: ...zers Service Center should pro blems arise All repair orders are carried out on the basis of our General Terms of Delivery only For repairs the warranty period is 6 months Repair work is performed wit...

Page 41: ...M 053 531 U 61 Quad Ring Quad ring Joint en Quad VI 10 82 x 1 78 1 P 4081 630 C 63 USIT Ring USIT ring Joint en USIT MS NBR U12 7 18 x 1 5 4 P 3529 142 64 O Ring O ring Joint torique VI 36 x 2 2 P 407...

Page 42: ...42 Fig 32 Fig 33 78 77 65 72 71 76 75 51 36 30 79 49 70 68 74 73 61...

Page 43: ...ting en cas de montage en rack Eingang Input Entr e PM 001 164 T Ausgang Output Sortie PM 001 165 T Flutventil TSF 0122 Venting Valve TSF 0122 Vanne de remise l air TSF 0122 G 1 8 PM Z01 106 DN 10 ISO...

Page 44: ...ungsk rper TPU Vibration compensator TPU Amortisseur TPU DN 250 CF F PM 006 671 X Zentrierring Vi f r TPH Centering ring Vi for TPH Anneau de centrage Vi pour TPH DN 250 ISO BP 213 207 T DN 200 ISO BP...

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