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Olympus AL120-6 Series Operation Manual Download Page 8

Introduction

/Safety Precautions

 

Operation/Maintenance Manual

 

 

 

 

i-6 

Page 

Working Environment 

Please prepare the table for the equipment at your side. 

This equipment is designed so as to show the best performance in being set on the table of which height is 

approx. 700mm and thickness of work surface is more than 22mm. 

This equipment is designed in accordance with the SEMI S8 standard. 

If any other tables are selected, the best performance can not be assured. 

When selecting the table, please refer to the SEMI S8 standard.

 

Part Dimensions 

AL120-6 Series 

Unit: mm

 

 

Summary of Contents for AL120-6 Series

Page 1: ...ries Thank you for purchasing the Olympus AL120 Series Wafer Loader In order to fully utilize its performance and secure safety please read this manual before operation Please also keep it at hand during operation as well as for future reference AX7833 05 ...

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Page 3: ... Back Macro inspection N A Available N A N A Available Available Available 2nd Back Macro inspection N A Available N A N A Available Available Available Microscope Available Available Available Available Available Available Available Wafer Loader AL120 L6 150 AL120 LMB6 150 AL120 L86 AL120 L86 180 AL120 LMB86 AL120 LMB86 180 AL120 LMB8 90 Option AL120 SLK8 Option Tray AL120 TRY M61 86 Option Micro...

Page 4: ...0 mm The operability is designed based on the SEMI Standard S8 Our company s designed operability is not guaranteed if the loader is installed on a table that does not satisfy the conditions specified above Please refer to the SEMI Standard S8 to select a table 1 Precautions Operators must follow the instructions in the Operation Maintenance Manual If these instructions are not followed safety can...

Page 5: ...hen clearing broken wafers 9 Wafers under inspection could fall down when the vacuum supply is stopped The check valve and buffer tank should be connected to maintain a vacuum even when the vacuum supply is stopped Buffer tank and the check valve are not attached to Wafer Loader When it is necessary please contact it to nearest OLYMPUS distributor 10 Wafers could fall down if you touch them or app...

Page 6: ...range You can get more working space during maintenance or other work by changing the observation tube mounting direction and moving the stage This installation space is determined according to the SEMI guideline SEMI S8 0308 Provide adequate space for operating the loader according to your intended use by referring to the installation space and outer dimensions shown on the next page Installation...

Page 7: ...Operation Maintenance Manual Introduction Safety Precautions i 5 Page Position of the Center of Gravity AL120 6 Series Position of the center of gravity AL120 86 Series Position of the center of gravity ...

Page 8: ...as to show the best performance in being set on the table of which height is approx 700mm and thickness of work surface is more than 22mm This equipment is designed in accordance with the SEMI S8 standard If any other tables are selected the best performance can not be assured When selecting the table please refer to the SEMI S8 standard Part Dimensions AL120 6 Series Unit mm ...

Page 9: ...Operation Maintenance Manual Introduction Safety Precautions i 7 Page AL120 86 Series Unit mm ...

Page 10: ...or fixing the equipment Please fix the equipment on the tray and Wafer Loader not to be moved by unexpected force such as earthquake Use two M8 steel bolts and boss through the holes provided to secure the Tray and Wafer Loader to supporting surface table etc Fixing part Recommended dimensions For the wafer loader For the tray Fixing part Bosses optional Material Stainless steel Fixing bolt M8 hex...

Page 11: ...Operation Maintenance Manual Introduction Safety Precautions i 9 Page Fixed taps M8 position dimensions AL 120 6 Series AL 120 86 Series M8 M8 ...

Page 12: ...ation The warning indication is attached on the part to which you need to pay attention to ensure safety when operating using the loader Strictly follow the instructions If this warning label becomes dirty or peels off contact your nearest OLYMPUS distributor for replacement and servicing Position of warning indication label CAUTION MECHANICAL HAZARD CONTACT TO MOVING PARTS OF THE MECHANISM MAY RE...

Page 13: ...ft cloth moistened with pure water Wipe heavy dirt or stains with a clean paper moistened with commercially available absolute alcohol Never place absolute alcohol close to a flame as it is highly flammable Take care not to cause sparks by turning on or off an electric appliance or fluorescent lamp 2 Wear gloves to protect your hands while cleaning the loader when for example a wafer is damaged 3 ...

Page 14: ...there are no wafers or tools inside the wafer loader 2 Confirm the following points before starting the inspection 1 Make sure that the power is on Check the liquid crystal panel Turn the main switch ON and make sure that each arm position is initialized and the model name is shown on the liquid crystal panel The loader may have been set to skip initialization when the power is turned on This is n...

Page 15: ...rates use and can radiate radio frequency energy and if not installed and used in accordance with the instruction manual may cause harmful interference to radio communications Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense SEMI This equipment is carrying out evaluation ...

Page 16: ...Introduction Conformity Standards Operation Maintenance Manual i 14 Page ...

Page 17: ...Operation Maintenance Manual Introduction Conformity Standards i 15 Page ...

Page 18: ...Introduction Conformity Standards Operation Maintenance Manual i 16 Page This page intentionally left blank ...

Page 19: ...Setting the Orientation Flat and Notch Positions on the Microscope Wafer alignment Position Control 2 9 8 Setting the Inspection Time Inspection Time Control 2 9 9 Detailed Settings for the Top Macro Inspection Top macro spin direction and Top macro spin speed Controls 2 9 10 Setting Wafer Alignment when Unloading a Wafer 2 10 2 2 Vacuum Stage 2 12 1 How to Move the Vacuum Stage 2 12 2 How to Use ...

Page 20: ...ON 3 5 3 2 5 TOP MACRO INSPECTION MICROSCOPE INSPECTION 3 6 3 2 6 BACK MACRO INSPECTION MICROSCOPE INSPECTION 3 8 3 2 7 TOP MACRO INSPECTION BACK MACRO INSPECTION 3 10 3 2 8 MICROSCOPE INSPECTION TOP MACRO INSPECTION BACK MACRO INSPECTION 2ND BACK MACRO INSPECTION 3 11 3 3 Special Operations 3 13 3 3 1 CHANGING THE WAFER SELECTION SETTING 3 13 4 Specifications 4 1 4 1 AL120 L6 150 and LMB6 150 4 1...

Page 21: ...Operation Manual Table of Contents C 3 Page 4 When a Wafer is on the Vacuum Stage 5 10 ...

Page 22: ...Operation Manual Table of Contents C 4 This page intentionally left blank Page ...

Page 23: ...m and the joystick are integrated in the LMB models Hand guard AC line receptacle Circuit breakers Stage vacuum tube connector A2 arm A1 arm Stage operation permission LED L arm Macro center table Orientation flat alignment sensor Cassette table elevator Cassette guide Warning label Vacuum tube receptacle Operation panel Joystick Lock ring Main switch Liquid crystal panel ...

Page 24: ...on mode button Wafer alignment position control Option button Supporting function buttons 4 way button Menu buttons Loader stop button Observation setting buttons Wafer No selector buttons Quit button Auxiliary function buttons Top macro spin direction control Top macro spin speed control Wafer alignment position control Inspection time control Pause button Start button Wafer unload button LED dis...

Page 25: ...enance Manual Nomenclature Remote Controller Option 1 3 1 3 Remote Controller Option Remote controller AL120 RC Registration setting button Macro Registration setting button Micro Start button Wafer unload button Page ...

Page 26: ... Stage Operation Maintenance Manual 1 4 1 4 Vacuum Stage Vacuum stage AL120 VS6 AL120 VS8 Page Y fine travel knob X fine travel knob Clutch lever Coarse adjustment grip Wafer rotating knob Vacuum table Stage sensor plate ...

Page 27: ...mode When you use any cassette or inspection wafers that are not registered in the menu mode you need to newly register the inspection wafer For registration please refer to 2 Registration of New Inspection Wafer Types Cassettes to be Used and Wafer Thickness in 2 Adjustments in the Maintenance Manual page 2 2 The operation procedure flowchart is shown on the next page When selected the Top Macro ...

Page 28: ...nspection Top macro spin direction control 2 7 9 for the LMB model only Set the wafer rotation speed during Top Macro inspection Top macro spin speed control 2 7 9 for the LMB model only Press the Start button Start button 2 9 1 Start transfer Top Macro inspection Back Macro inspection 2nd Back Macro inspection Set the vacuum stage in place Transfer of wafer onto the vacuum stage 2 11 5 Microscope...

Page 29: ...e is not in the proper transfer position the warning code W0002 is displayed Set the vacuum stage in the transfer position c 2 Cassette Setting Set the cassette along a cassette guide suitable for the cassette size c 200mm wafer cassette guide d 150mm wafer cassette guide e 200mm and 150mm wafer common cassette guide Page y Set the cassette carefully to prevent wafers from popping out y If a defor...

Page 30: ...tion wafer already registered Move to the number of the type of wafer to be inspected and press the M1 f OK button to determine the setting Your loader may only have a setting for one type of wafer Indication example when a setting for one type of wafer AL120 LMB86 90 ALL d c f set the cassette No Size Thick comment 1 200 725 400 Recall Wafer Setting Memory No Size Thick Speed comment x1 200 725 4...

Page 31: ...nged once inspection is started The LEDs in the selected Observation setting buttons light up 2nd Back Macro Back Macro The 2nd Back Macro inspection performs the Back Macro inspection again with the wafer rotated about 20 degrees counterclockwise on the macro table after the Back Macro inspection is completed The 2nd Back Macro inspection enables inspection of the areas hidden by the rear arm dur...

Page 32: ...he right or left button of the 4 way button is pressed y The inspection sequence to be used is the one established before the Start button is pressed y Ten patterns can be registered in slots P1 to P10 y Two wafers are transferred at a time While one wafer is under Micro inspection the next wafer is transferred to the Macro inspection position 2 How to register sampling loading patterns P1 to P10 ...

Page 33: ...Press the inspection mode button to display the pattern number L1 to L10 that you want to register on the liquid crystal panel y Press the M3 Setting button to display the setting registration screen y Specify the number of a wafer to be subjected to sampling inspection with the Wafer No button The selected Wafer No selector button will blink Specify the inspection sequence for the selected wafer ...

Page 34: ...tton goes off y After the settings have been completed press the M4 Memory button As the buzzer sounds the registration process is completed y Press the M1 Exit button to exit the setting registration screen 6 Selecting Wafers for Inspection Wafer No Selector Button You can specify the number of the wafer to be inspected in the sampling mode The button is alternately selected and deselected each t...

Page 35: ...anged at any time Even during this period the loader will proceed to the next operation when the Start button or the Unload button is pressed or when the vacuum stage is set Setting the inspection time to 0 zero seconds disables the macro registration function If the inspection time is set to rotation is temporarily stopped when the Top Macro inspection has been left for more than one minute The o...

Page 36: ...e Thick Comment 1 200 725 400 3 The setup screen is displayed Move X to the setting you are dealing with by manipulating the up and down buttons of the 4 way button Move the cursor to the values of each item to be set by operating the right and left buttons of the 4 way button and change the values with the up and down buttons of the 4 way button y Centering a wafer when unloading Centering unload...

Page 37: ... 11 Page 4 Press the M1 Save button to register the wafer alignment setting This completes the wafer alignment setting at unloading To exit without registering the wafer alignment setting without changing the current setting press the M2 Cancel button ...

Page 38: ... the stage can be moved freely y Moving the stage without depressing the clutch will affect fine travel accuracy Caution y Forcing the grip handle downward will affect vacuum stage accuracy and damage the stage y Adhesion of clutch and belt When the stage is left unmoved for long periods the clutch and belt will adhere to each other This could hinder smooth drive release operations To fix this ful...

Page 39: ...on The status of the loader is indicated by LED lighting Page y In operation Lit green to indicate that the loader is in operation y Warning Lit yellow to indicate a warning y Error Lit red and with a buzzer to indicate that an error has occurred LED display The liquid crystal panel c shows the following information c M02 S01 No Size Thick Comment 1 200 725 400 E0101 Beep OFF y When the loader is ...

Page 40: ...d abruptly a wafer may bump into with the arm Operate the joystick at 30 degrees per second or slower You can change the Speed and Direction settings 4 Back Macro Inspection and 2nd Back Macro Inspection Setting the Back Macro Tilt Angle This function is available for the LMB model only 1 The Back Macro Tilt Angle setting buttons can be reset in a 360 degree range during inspection 2 The tilt angl...

Page 41: ...n and the Microscope inspection when the vacuum stage is moved to the wafer transfer position during the Top Macro inspection the loader can proceed to the Microscope inspection by interrupting the Back Macro inspection Ref Ref c Ref y Do not move the vacuum stage until the Stage Operation Permission LED lights up Moving the stage is dangerous as a wafer may be released for transfer If the stage i...

Page 42: ...the inspection mode is All or Sampling P1 to P10 Wafers on the microscope cannot be registered after the specified inspection time has elapsed If registration is needed set the inspection time to 2 How to confirm Page y After inspection is completed press the menu button M1 Recall in the liquid crystal panel operating part or the Recall e button in the operating panel The liquid crystal panel show...

Page 43: ...ton while the Pause button is pressed or while the wafer is waiting for a start command input with an inspection time of You can remove wafers which have numbers shown on the liquid crystal panel The position from which a wafer can be removed differs depending on the sequence setting and the state of wafer transfer 1 When a wafer is on the stage the wafer on the stage will be removed Press the Waf...

Page 44: ...peration using the remote controller c Ref 4 Stopping the Operation Immediately Loader Stop Button Pressing the Loader Stop button c immediately stops loader operation To return to the normal state turn the main switch OFF remove the cause of the loader stoppage and then turn the main switch back to ON If there are any wafers in the transfer path refer to section 5 6 Automatic Unloading c Ref 5 Te...

Page 45: ...not in the proper transfer position Set the vacuum stage to the transfer position 3 2 Inspection Operations 3 2 1 Microscope Inspection 1 Set a cassette on the cassette table 2 Make sure that the Microscope LED in the Observation button is lit This step is not required for the L model c If the Microscope ED is not lit press the button to turn on the LED If LEDs for other types of inspection are li...

Page 46: ...s selected the wafer waits for inspection 8 When the first wafer inspection is completed the inspected wafer is replaced by the second wafer after the vacuum stage is set to the wafer transfer position If the first wafer inspection has already been completed and the vacuum stage has been set to the wafer transfer position before the second wafer is ready reset the stage or press the Start button 9...

Page 47: ...e 4 Set and confirm the inspection mode Select All or Sampling P1 to P10 f Set the inspection wafer number s as needed g 5 Press the Start button and the first wafer is transferred to the Top Macro inspection position h You can change the wafer tilt direction for observation using the joystick Release the lock ring before using the joystick 6 After the specified inspection time has elapsed the waf...

Page 48: ...and confirm the inspection mode Select All or Sampling P1 to P10 e Set the inspection wafer number s as needed f 5 Press the Start button to transfer the first wafer to the Back Macro inspection position g You can change the wafer tilt position angle for observation using the Back Macro Tilt Angle button h 6 After the specified inspection time has elapsed the wafer is unloaded into the cassette an...

Page 49: ...to P10 e Set the inspection wafer number s as needed f 5 Press the Start button to transfer the first wafer to the Back Macro inspection position g You can change the wafer tilt position angle for observation using the Back Macro Tilt Angle button h 6 After the specified inspection time has elapsed the wafer is placed on the macro table and rotated counterclockwise about 20 degrees and the loader ...

Page 50: ...wafer rotation direction during Top Macro inspection f 4 Top Macro spin speed Enables the setting of wafer rotation speed during Top Macro inspection f 4 Set and confirm the inspection mode Select All or Sampling P1 to P10 g Set the inspection wafer number s as needed h 5 Press the Start button to transfer the first wafer to the Top Macro inspection position i Top Macro Inspection is started 6 Aft...

Page 51: ...e inspection is given preference and the wafer is transferred onto the vacuum table If Microscope inspection is not required press the Unload button The first wafer is unloaded into the cassette and the second wafer is transferred to the Top Macro inspection position 7 Subsequent wafers are transferred automatically and sequentially 8 After the last wafer is unloaded into the cassette the operatin...

Page 52: ... or Sampling P1 to P10 f Set the inspection wafer number s as needed g 5 Press the Start button to transfer the first wafer to the Back Macro inspection position h You can change the wafer tilt position angle for observation using the Back Macro Tilt Angle button i 6 After the specified inspection time has elapsed the Back Macro inspection is completed and the first wafer is transferred onto the v...

Page 53: ... the Unload button The first wafer is unloaded into the cassette and the second wafer is transferred to the Back Macro inspection position 7 Subsequent wafers are transferred automatically and sequentially 8 After the last wafer is unloaded into the cassette the operating units return to their initial positions and the loader stops 9 Replace the cassette with the next one and repeat the procedure ...

Page 54: ...3 Top Macro spin speed Enables the setting of wafer rotation speed during the Top Macro inspection e 4 Set and confirm the inspection mode Select All or Sampling P1 to P10 f Set the inspection wafer number s as needed g 5 Press the Start button to transfer the first wafer is transferred to the Top Macro inspection position h 6 After the specified inspection time has elapsed the macro table is lowe...

Page 55: ... Macro Back Macro 2nd Back Macro and Microscope LEDs are not lit press the buttons to turn on the LEDs 2nd Back Macro can be selected only when Back Macro is selected 3 Set and confirm the detailed settings for inspection 1 Wafer alignment Indicates the specified orientation flat notch positions on the stage d 2 Inspection Time Enables the setting of Macro inspection time e 3 Top Macro spin direct...

Page 56: ...inspection of the second wafer the L arm is lowered The wafer is placed on the macro table and rotated counterclockwise about 20 degrees and then the loader proceeds to the 2nd Back Macro inspection 11 After the specified inspection time has elapsed for the 2nd Back Macro inspection of the second wafer the L arm is lowered waiting for the next wafer Ref Press the Start button if the Inspection Tim...

Page 57: ...ect the wafer numbers using the Wafer No selector buttons 4 Press the Start button and the wafers are transferred with the new wafer selection settings 5 The original wafer selection settings are restored after the entire operation of the specified cassette has finished y Settings can not be changed for the wafer being inspected indicated by a blinking LED in the Wafer No selector button y When wa...

Page 58: ...Inspections Operation Manual 3 14 This page intentionally left blank Page ...

Page 59: ...plicable cassette 150 mm plastic and metal wafer carrier that conforms to the SEMI E1 5 91 150 standard Standard cassette Entegris PA182 60MB 06 You may need to adjust the cassette guide when using other types of cassettes Number of settable cassettes 1 cassette for both loading and unloading Cassette positioning Drop in type with a positioning guide adjustment function Maximum withstand load 2 0 ...

Page 60: ...kip function Slots with no wafer are automatically skipped in both the All and Sampling modes 6 Auxiliary Functions during Inspection Wafer registration Numbers of defective wafers registered in each type of inspection can be displayed Pause Not available When the inspection time is set to 0 8 seconds it can be extended by pausing the loader Wafer removal Wafers can be removed by using tweezers or...

Page 61: ...s Loader power supply voltage AC100 to 120 V 10 1 0 A AC220 to 240 V 10 0 5 A Power supply frequency 50 60 Hz 5 Hz Circuit breaker capacity 1 2 A Vacuum 67 kPa to 80 kPa Vacuum connection tube 1 4 inch soft polyurethane tube with insert pipe joint Vacuum discharge 20 Liter min or more including vacuum supply for the stage 11 Operating Environment Place of use Indoor use in a clean room Altitude 20...

Page 62: ...ntation flat Transferable wafer weight As per the SEMI M1 1105 standard 53 g for 200mm wafer 53ｇ 2 Settable Cassette Applicable cassette 150 mm plastic and metal wafer carrier that conforms to the SEMI E1 5 91 150 standard Standard cassette 150 mm Entegris PA182 60MB 06 200 mm Entegris PA192 80M 06 180 um or larger Entegris PA192 80M 06 below 180 um Dainichi Shoji AL 8 Metal cassette You may need ...

Page 63: ...stered Transfer of specified wafers Two wafers at a time are transferred When a wafer is being inspected under the microscope the next wafer is being transferred to the macro center table position Sampling inspection patterns Not available 10 patterns P1 to P10 can be registered Transfer and inspection of specified wafers One wafer at a time is transferred Automatic skip function Slots with no waf...

Page 64: ...1 arm A2 arm Conductive Fluorine coating Macro center table Conductive PEEK resin Back macro arm L arm Conductive Fluorine rubber Back macro arm L arm Conductive PEEK resin Conductive Fluorine rubber Transfer speed Registered for each thickness of wafer transferred Noise level during transfer 80 dB A or lower 9 Dimensions and Weight Loader dimensions 640 W 620 D 378 H mm Weight Approx 40 5 kg Appr...

Page 65: ...r loader main unit Microscope Microscope fixing tray Stage MX61 MX61 F MX SWETTR SWH10X U D5BDREMC OB BD U LH100 3 MX BSH ESD Footprint 1100 W 620 D mm Width 1326 W mm System weight Approx 88 9 kg Approx 92 4 kg Note SEMI M1 1105 Class 1 8 150 mm mirror polished single crystal silicon wafer with secondary flat Class 1 13 150 mm mirror polished single crystal silicon wafer Class 1 8 Primary flat le...

Page 66: ...Specifications AL120 L86 LMB86 L86 180 LMB86 180 and LMB 90 Operation Manual 4 8 Page This page intentionally left blank ...

Page 67: ...that the stage operation permission LED is lit before moving the stage W0003 Cause A foreign object wafer has been detected on the A1 arm The wafer is detected as a foreign object due to vacuum pressure being too high Solution Remove the wafer or set the vacuum pressure within the specifications and then press the Start button Note To unload the wafer automatically refer to 5 6 Automatic Unloading...

Page 68: ...wafers W0011 Cause A wafer is improperly inserted into a slot inside a cassette it is inserted diagonally Solution Insert the wafer by taking care that both edges of the wafer are in the same slot and press the Start button W0012 Cause The thickness of a wafer is different from the standard thickness value Solution Check to see if two wafers are inserted into the same slot or if the type of the wa...

Page 69: ...switch OFF and then turn it back to ON When there are wafers in the transfer path turn the main switch OFF remove the wafer s using tweezers or similar tools and ensure that the cause is dealt with When an adsorption error has occurred the loader may be unable to hold wafers securely Take care not to perform automatic unloading without dealing with the cause Wafers may be damaged If any similar er...

Page 70: ...e U202 E0203 A Linear No sensor detection after movement to the cassette position U201 E0205 A Linear Two or more sensors ON U201 U202 U203 E0206 A Linear Not in place at the start of operation E0207 A Linear Movement set to an impossible position E0208 A Linear No initialization within the specified time U203 E0211 A Linear Not in a position where it can be initialized E0212 A Linear Driver origi...

Page 71: ...ified time U401 E0511 L Rotation Not in a position where it can be initialized E0513 L Rotation Overheating of the motor driver Elevator movement errors E0601 E No sensor detection after movement to the upper limit U101 E0606 E Not in place at the start of operation E0607 E Movement set to an impossible position E0608 E No initialization within the specified time E0609 E Motor step out was detecte...

Page 72: ...ction of the vacuum ON status within the specified time U010 E0910 Stage No detection of the vacuum OFF status within the specified time U010 Contact centering unit error only for the wafer loader with AL120 CC E1101 Close position sensor cannot be detected within the specified time E1102 Open position sensor cannot be detected within the specified time E1103 Type sensor error E1105 Two or more se...

Page 73: ...remove the cause 5 4 After use of Loader Stop When the Loader Stop switch is pressed the loader stops operations immediately Turn the main switch OFF disconnect the power cord on the back side of the Loader remove the cause of the loader stop and then turn the main switch back ON If any wafers remain in the loader check the transfer safety If there are no problems with transfer refer to 5 6 Automa...

Page 74: ...ossible is displayed on the liquid crystal panel In this case turn the main switch OFF and unload the wafer into the cassette using tweezers or similar tools When using the automatic unloading procedure after a warning or error has occurred remove the cause of the warning or error before attempting automatic unloading If automatic unloading is done before the cause is removed it may cause damage t...

Page 75: ...tor button lights up 5 Press the Unload button 6 After wafer mapping is completed the wafer is automatically unloaded into the specified slot 2 During the Back Macro Inspection When the loader has stopped with a wafer held on the L arm the vacuum remains on Unload the wafer according to the following procedure 1 If the main switch is turned ON the loader will not operate but will indicate the warn...

Page 76: ...specified Wafer No selector button lights up 5 Press the Unload button 6 After wafer mapping is completed the wafer is automatically unloaded into the specified slot 7 Repeat the procedure from step 2 to unload the remaining wafer Mapping has already been executed at this time You can specify only a vacant slot with the LED lit in the Wafer No selector button 4 When a Wafer is on the Vacuum Stage ...

Page 77: ...d Countermeasures Automatic Unloading 5 11 Page 5 The LED in the specified Wafer No selector button lights up 6 Press the Unload button 7 After wafer mapping is completed the wafer is automatically unloaded into the specified slot ...

Page 78: ...Troubles and Countermeasures Automatic Unloading Operation Manual 5 12 Page This page intentionally left blank ...

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Page 80: ...LYMPUS SCIENTIFIC SOLUTIONS AMERICAS CORP 48 Woerd Avenue Waltham MA 02453 U S A OLYMPUS SINGAPORE PTE LTD 491B River Valley Road 12 01 04 Valley Point Office Tower Singapore 248373 OLYMPUS KOREA CO LTD 8F Olympus Tower 446 Bongeunsa ro Gangnam gu Seoul 06153 Korea This publication is printed on clean paper Printed in Japan ...

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