Olympus AL120-6 Series, Operation Manual, Page: 53 / 80

Operation Manual Inspections
3-9
* By setting the vacuum stage to the wafer transfer position during Back Macro inspection, the Back Macro
inspection is terminated before the inspection time is completed. Microscope inspection is given preference
and the wafer is transferred onto the vacuum table.
* If Microscope inspection is not required, press the [Unload] button. The first wafer is unloaded into the
cassette and the second wafer is transferred to the Back Macro inspection position.
7. Subsequent wafers are transferred automatically and sequentially.
8. After the last wafer is unloaded into the cassette, the operating units return to their initial positions and the
loader stops.
9. Replace the cassette with the next one, and repeat the procedure from step 1.
Ref.
* If [2nd Back Macro] is selected for the inspection sequence, refer to [3-2-4 Back Macro Insp 2nd
Back Macro Inspection] .
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