Olympus AL120-6 Series, Operation Manual, Page: 14 / 80

Introduction
/Daily Check
Operation/Maintenance Manual
i-12
Page
AL120-LMB8-90 ALL
set the cassette
No |Size |Thick
|Comment
1. |200 |750-400 |
Recall Wafer Setting Memory
5. Daily Check
1. Confirm the following points before operating the loader.
(1) Vacuum supply pressure: -67KPa to -80KPa
When there are not a vacuum gauge and a regulator, please contact it to the OLYMPUS distributor.
(2) Make sure that there are no wafers or tools inside the wafer loader
2. Confirm the following points before starting the inspection.
(1) Make sure that the power is on (Check the liquid crystal panel)
Turn the main switch ON and make sure that each arm position is
initialized and the model name is shown on the liquid crystal panel.
The loader may have been set to skip initialization when the power
is turned on. This is not a malfunction. The loader executes
initialization when the [Start] button is pressed.
(2) Check the loader stop button
Press the loader stop button and make sure that the loader stops operation.