Olympus AL120-6 Series, Operation Manual, Page: 5 / 80

Operation/Maintenance Manual
Introduction/
Safety Precautions
i-3
Page
2. Safety Precautions
1. Use the loader within the scope of the specifications.
2. Use only the OLYMPUS power cord provided with the loader.
Otherwise the safety performance of the loader can not be assured.
3. The power cord plug must be easily accessible at any time. Immediately unplug the
power cord if you find any abnormalities in the loader.
4. Bind wires and tubes to table legs and the like to prevent them from catching your
feet.
5. Be sure to ground the loader. Otherwise our intended electric safety performance of
the loader cannot be assured.
6. Never put any metallic objects in the vent. This could cause an electric shock or
malfunction.
7. Place the loader and the microscope on a sturdy and level table (with a tilt angle of no
more than 1 degree).
8. Wear gloves when clearing broken wafers.
9. Wafers under inspection could fall down when the vacuum supply is stopped. The
check valve and buffer tank should be connected to maintain a vacuum even when the
vacuum supply is stopped. Buffer tank and the check valve are not attached to Wafer
Loader. When it is necessary, please contact it to nearest OLYMPUS distributor.
10. Wafers could fall down if you touch them or apply a force to them during inspection.
Do not touch wafers during inspection.
11. Undergo maintenance training before attempting to do maintenance on the loader.
12. Consult your nearest OLYMPUS distributor if you need to move the loader.
(The loader weight is approximately 44kg.)
13. Down flow that may cause a wafer to shake may cause the wafer transfer operation to
be accompanied by physical danger. Take care that the wafer transfer operation is
performed at a location where there is no such down flow.
14. Use a cassette that complies with the SEMI standard. If a deformed cassette is used,
there is an increased risk of a wafer being damaged.