Olympus AL120-6 Series, Operation Manual, Page: 61 / 80

Operation Manual Specifications
/ AL120-L6-150 and LMB6-150
4-3
Page
Item AL120-L6-150 AL120-LMB6-150
Wafer protection in case
of power failure
Wafers are held in case of power failure.
8. Transfer Mechanism
Wafer transfer method
Wafer back side vacuum adsorption and mechanical arm transfer
Wafer contact area
material
Wafer removal arm(A1-arm,A2-arm): Conductive Teflon coating
Macro (center) table: Conductive PEEK resin
- Back macro arm (L-arm): Conductive Fluorine rubber
Transfer speed
Registered for each thickness of wafer transferred
Noise level during
transfer
80 dB(A) or lower
9. Dimensions and Weight
Loader dimensions
570 (W)

620 (D)

400 (H) mm
Weight
Approx. 36.5 kg Approx. 40 kg
10. Loader Utilities
Loader power supply
voltage AC100 to 120 V

10%, 1.0 A
AC220 to 240 V

10%, 0.5 A
Power supply frequency
50/60 Hz

5 Hz
Circuit breaker capacity
1.2 A
Vacuum
−67 kPa to −80 kPa
Vacuum connection tube
1/4-inch soft polyurethane tube with insert pipe joint
Vacuum discharge
20 Liter/min. or more (including vacuum supply for the stage)
11. Operating Environment
Place of use
Indoor use (in a clean room)
Altitude
2000 m or lower
Temperature
19 to 25

C (Storage and transport temperature: 5 to 40

C)
Humidity
40 to 80% (Storage and transport humidity: 40 to 80%)
Pollution degree
2 (IEC60664)
Installation category
(Overvoltage category)
II (IEC60664)
12. Required Dimensions and Weight of the Entire System (Wafer loader main unit + Micr
Microscope fixing tray + Stage)
MX61: MX61-F,MX-SWETTR,SWH10X,U-D5BDREMC,OB(BD),U-LH100-3,MX-BSH-ESD
Footprint
980 (W)

620 (D) mm
Width
1184 (W) mm
System weight
Approx. 84.9 kg Approx. 88.5 kg