Olympus AL120-6 Series, Operation Manual, Page: 44 / 80

Outline of Operation Procedure Operation Manual
2-18
3 Unloading a Wafer during Inspection: [Unload] Button
The [Unload]
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button is used to unload a wafer from the transfer
path in the loader (in the Top or Back Macro inspection position) into
the cassette and transfer the next wafer. This operation is possible
only when two or more types of inspection are selected in the
sequence.
You can also perform this operation using the remote
controller.
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Ref.
4 Stopping the Operation Immediately: [Loader Stop] Button
Pressing the Loader Stop button
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immediately stops loader
operation.
To return to the normal state, turn the main switch OFF, remove the
cause of the loader stoppage, and then turn the main switch back to
ON.
If there are any wafers in the transfer path, refer to section 5-6
Automatic Unloading .
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Ref.
5 Terminating the Inspection: [Quit] Button
Pressing the [Quit]
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button terminates inspection halfway, unloads
the inspected or transferred wafers into the cassette, and returns the
loader to its initial state.
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