Olympus AL120-6 Series, Operation Manual, Page: 60 / 80

Specifications
/ AL120-L6-150 and LMB6-150
Operation Manual
4-2
Page
Item AL120-L6-150 AL120-LMB6-150
Common time setting for the Top Macro and Back Macro
inspections
4. Microscope Inspection
Applicable microscope
OLYMPUS MX61 , MX63
Applicable microscope
stage
AL120-VS6
Microscopic observation
method
Reflected light observation only
Stage operation method
Manually-operated stage with XY coarse and fine adjustment and a 360-degree rotation
mechanism (with an X-direction coarse travel clutch)
Stage driving method
Belt drive
Microscopic observation
range

150 mm
Stroke below stage
3 mm below the observation position
Wafer table
Conductive PEEK resin
Wafer holding method
Vacuum adsorption (Vacuum supplied by the loader)
5. Inspection Mode
All (100%) inspection
Continuous transfer (Two wafers at a time are transferred)
Sampling transfer
patterns
10 patterns (P1 to P10) can be registered.
Transfer of specified wafers (Two wafers at a time are transferred) (When one wafer is
being inspected under the microscope, the next wafer is being transferred to the macro
(center) table position.)
Sampling inspection
patterns
Not available
10 patterns (P1 to P10) can be registered.
Transfer and inspection of specified wafers (One wafer is
transferred at a time)
Automatic skip function
Slots with no wafer are automatically skipped in both the All and Sampling modes.
6. Auxiliary Functions during Inspection
Wafer registration
Numbers of defective wafers registered in each type of inspection can be displayed.
Pause
Not available
When the inspection time is set to 0 - 8 seconds, it can be
extended by pausing the loader.
Wafer removal
Wafers can be removed by using tweezers or similar tools during inspection.
Orientation flat alignment
Contactless detection using the opto-sensor
Four orientation flat positions (the near, far, right and left sides) can be selected on the
microscope stage at 90-degree intervals.
Settings can be changed during inspection. (The position specified before the orientation
flat alignment is effective.)
Orientation flat alignment during unloading: Can be set using the memory button. (Settings
can be changed during inspection.)
Wafer alignment
Contactless alignment (optical)
7. Protective Functions
Immediate stoppage
Transfer is stopped by pressing the Loader Stop button (with the switch guard to prevent
mistaken operation).
Wafer popping
Wafers popping out of a cassette can be detected.
Warnings and error
display The liquid crystal panel shows error codes and their details.
An error log can be displayed and obtained.
Wafers in the cassette
Any slanted wafers can be detected (1st-slot cross).
Stage lock
The stage position can be locked until the wafer is transferred onto the microscope
completely (option).