Olympus AL120-6 Series, Operation Manual, Page: 41 / 80

Operation Manual Outline of Operation Procedure
2-15
5 Transferring a Wafer onto the Vacuum Stage
To transfer a wafer onto the vacuum stage during the Microscope
inspection, move the vacuum stage to the loader.
When the A-arm is lowered completely and the stage is ready
to move, the green Stage Operation Permission LED
c
on the stage
detection sensor will light up.
When the A-arm is lowered completely and the stage is ready
to move, you can sound a buzzer by setting.
In the inspection sequence composed of the Top Macro
inspection, the Back Macro inspection and the Microscope
inspection, when the vacuum stage is moved to the wafer transfer
position during the Top Macro inspection, the loader can proceed to
the Microscope inspection by interrupting the Back Macro inspection.
Ref.
Ref.
c
Ref.
y
Do not move the vacuum stage until the Stage Operation Permission LED lights up.
Moving the stage is dangerous as a wafer may be released for transfer.
If the stage is moved during transfer, a wafer may be transferred in an incorrect position
and be damaged.
Caution
y
By using the optional stage lock, the vacuum stage movement can be disabled until the
wafer transfer is completed.
y
If the vacuum stage is moved before the stage up and down movement is completed, the
warning W0002 is shown on the liquid crystal panel.
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