Olympus AL120-6 Series, Operation Manual, Page: 59 / 80

Operation Manual Specifications
/ AL120-L6-150 and LMB6-150
4-1
Page
4
Specifications
4-1 AL120-L6-150 and LMB6-150
Item AL120-L6-150 AL120-LMB6-150
1. Transferable Wafer Size
Applicable SEMI
standard
SEMI M1-1105
Class 1.8: 150 mm mirror-polished single-crystal silicon wafer (with secondary flat)
Class 1.13: 150 mm mirror-polished single-crystal silicon wafer
Applicable wafer
diameter
150

0.2 mm
Applicable wafer
thickness
t = 675 um to 150 um (Wafers in a cassette must have uniform thickness and deflection.)
Wafer deflection in a
cassette 2 mm or less
(Wafers in a cassette must have uniform thickness and deflection.)
Applicable wafer
warpage
0.1 mm or less
Applicable wafer material
Silicon
Applicable positioning
shape
Orientation flat
Class 1.8 = Primary flat length 57.5

2.5 mm and secondary flat length 37.5

2.5 mm
Class 1.13 = Primary flat length 47.5

2.5 mm
Transferable wafer
weight
As per the SEMI M1-1105 standard (28 g for a 150mm wafer)
2. Settable Cassette
Applicable cassette
150 mm plastic and metal wafer carrier that conforms to the SEMI E1.5-91 150 standard
Standard cassette: Entegris PA182-60MB-06
* You may need to adjust the cassette guide when using other types of cassettes.
Number of settable
cassettes
1 cassette (for both loading and unloading)
Cassette positioning
Drop-in type
with a positioning guide adjustment function
Maximum withstand load
2.0 kg (150mm wafers(25) + Cassette)
3. Macro Inspections
Top Macro inspection
Not available
Tilt drive type: Joystick direct drive
Tilt angle: 30 degrees (max.)
Wafer rotation direction: Clockwise, counterclockwise, and
non rotating
Wafer rotation speed: 3 to 30 seconds/rotation (continuously
variable)
Back Macro inspection
Not available
Tilt drive type: Motorized drive
Tilt angle: 360 degrees from horizon (stepless)
Angle can be changed during inspection.
Registered tilt positions: 2 positions
2nd Back Macro
inspection
Not available
After the Back Macro inspection, the wafer is rotated
counterclockwise about 20 degrees and inspected again.
Inspection time setting
Not available
From 0 to 8 seconds and

The

setting maintains the inspection state.
Time can be set in 1 second steps.