
Outline of Operation Procedure
Operation Manual
2-4
3 Selecting the Type of Inspection Wafer: 4-way button
The initial menu appears on the liquid crystal panel
c
.
Page
1) To change the type of inspection wafer shown on the liquid
crystal panel
c
, press the [M2]
d
<Wafer> button to bring
the inspection wafer type selection screen.
2) Press the 4-way button
e
, and the <x> mark moves to the
number of the inspection wafer already registered.
Move <*> to the number of the type of wafer to be inspected,
and press the [M1]
f
<OK> button to determine the setting.
* Your loader may only have a setting for one type of wafer.
* Indication example when a setting for one type of wafer.
AL120-LMB86-90 ALL
d
c
f
set the cassette
No |Size |Thick
|comment
1. |200 |725-400 |
Recall Wafer Setting
Memory
No |Size |Thick
|Speed |comment
x1 | 200 |725-400 |High
|
2 | 200 |725-400 |High
|
3 | 200 |725-400 |High
|
4 | 200 |725-400 |High
|
5 | 200 |725-400 |High
|
6 | 200 |725-400 |High
OK Cancel PageUp PageDn
e
No |Size|Thick
|Speed |comment
x1 | 200|725-400
|High |
OK Cancel PageUp PageDn
Summary of Contents for AL120-6 Series
Page 2: ...This page intentionally left blank ...
Page 9: ...Operation Maintenance Manual Introduction Safety Precautions i 7 Page AL120 86 Series Unit mm ...
Page 16: ...Introduction Conformity Standards Operation Maintenance Manual i 14 Page ...
Page 17: ...Operation Maintenance Manual Introduction Conformity Standards i 15 Page ...
Page 21: ...Operation Manual Table of Contents C 3 Page 4 When a Wafer is on the Vacuum Stage 5 10 ...
Page 22: ...Operation Manual Table of Contents C 4 This page intentionally left blank Page ...
Page 58: ...Inspections Operation Manual 3 14 This page intentionally left blank Page ...